公开(公告)号：US08592932B2

公开(公告)日：2013-11-26

申请号：US13430195

申请日：2012-03-26

申请人： Paul S. Andry ,  John M. Cotte ,  John U. Knickerbocker ,  Cornelia K. Tsang

发明人： Paul S. Andry ,  John M. Cotte ,  John U. Knickerbocker ,  Cornelia K. Tsang

IPC分类号： H01L31/0203

CPC分类号： H01L21/6835 ,  H01L23/147 ,  H01L23/49827 ,  H01L23/49833 ,  H01L23/50 ,  H01L24/81 ,  H01L25/0655 ,  H01L25/0657 ,  H01L2221/68345 ,  H01L2224/16225 ,  H01L2224/81801 ,  H01L2924/00011 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01077 ,  H01L2924/01079 ,  H01L2924/10253 ,  H01L2924/14 ,  H01L2924/15174 ,  H01L2924/15311 ,  H01L2924/19011 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2924/3025 ,  H01L2924/00 ,  H01L2224/0401

摘要： Apparatus and methods are provided for high density packaging of semiconductor chips using silicon space transformer chip level package structures, which allow high density chip interconnection and/or integration of multiple chips or chip stacks high I/O interconnection and heterogeneous chip or function integration.

公开(公告)号：US08519260B2

公开(公告)日：2013-08-27

申请号：US12832375

申请日：2010-07-08

申请人： John M. Cotte ,  Laura L. Kosbar ,  Deborah A. Neumayer ,  Xiaoyan Shao

发明人： John M. Cotte ,  Laura L. Kosbar ,  Deborah A. Neumayer ,  Xiaoyan Shao

IPC分类号： H01L31/0236

CPC分类号： H01L31/02168 ,  H01L31/022425 ,  H01L31/068 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： A method to determine the cleanness of a semiconductor substrate and the quantity/density of pin holes that may exist within a patterned antireflective coating (ARC) is provided. Electroplating is employed to monitor the changes in the porosity of the ARC caused by the pin holes during solar cell manufacturing. In particular, electroplating a metal or metal alloy to form a metallic grid on an exposed front side surface of a substrate also fills the pin holes. The quantity/density of metallic filled pin holes (and hence the number of pin holes) in the patterned ARC can then be determined.

公开(公告)号：US08388758B2

公开(公告)日：2013-03-05

申请号：US11866255

申请日：2007-10-02

申请人： John P. Simons ,  Kenneth J. McCullough ,  Wayne M. Moreau ,  John M. Cotte ,  Keith R. Pope ,  Charles J. Taft ,  Dario L. Goldfarb

发明人： John P. Simons ,  Kenneth J. McCullough ,  Wayne M. Moreau ,  John M. Cotte ,  Keith R. Pope ,  Charles J. Taft ,  Dario L. Goldfarb

IPC分类号： B08B7/00

CPC分类号： H01L21/02101 ,  B08B7/0021 ,  H01L21/67109 ,  H01L21/67248 ,  Y10S134/902

摘要： A surface cleaning apparatus comprising a chamber, and a thermal transfer device. The chamber is capable of holding a semiconductor structure therein. The thermal transfer device is connected to the chamber. The thermal transfer device has a surface disposed inside the chamber for contacting the semiconducting structure and controlling a temperature of the semiconductor structure in contact with the surface. The thermal transfer device has a thermal control module connected to the surface for heating and cooling the surface to thermally cycle the surface. The thermal control module effects a substantially immediate thermal response of the surface when thermally recycling the surface.

摘要翻译： 一种表面清洁装置，包括腔室和热转印装置。 该室能够在其中保持半导体结构。 热传递装置连接到腔室。 热传递装置具有设置在室内的表面，用于接触半导体结构并控制与表面接触的半导体结构的温度。 热转印装置具有连接到表面的热控制模块，用于加热和冷却表面以使表面热循环。 当热再循环表面时，热控制模块会对表面产生实质上即时的热响应。

公开(公告)号：US08307994B2

公开(公告)日：2012-11-13

申请号：US12607258

申请日：2009-10-28

申请人： John M. Cotte ,  Christopher V. Jahnes ,  Hongbo Peng ,  Stephen M. Rossnagel

发明人： John M. Cotte ,  Christopher V. Jahnes ,  Hongbo Peng ,  Stephen M. Rossnagel

IPC分类号： B01D71/02 ,  B01D69/00 ,  B05D1/00 ,  B05D3/00 ,  C25B7/00

CPC分类号： B01D67/0065 ,  B01D71/022 ,  B01D2323/283 ,  B01D2325/021 ,  Y10T428/249953

摘要： A filter includes a membrane having a plurality of nanochannels formed therein. A first surface charge material is deposited on an end portion of the nanochannels. The first surface charge material includes a surface charge to electrostatically influence ions in an electrolytic solution such that the nanochannels reflect ions back into the electrolytic solution while passing a fluid of the electrolytic solution. Methods for making and using the filter are also provided.

摘要翻译： 过滤器包括其中形成有多个纳米通道的膜。 第一表面电荷材料沉积在纳米通道的端部上。 第一表面电荷材料包括静电地影响电解溶液中的离子的表面电荷，使得纳米通道在通过电解液的流体时将离子反射回电解溶液。 还提供了制造和使用过滤器的方法。

公开(公告)号：US20110127635A1

公开(公告)日：2011-06-02

申请号：US13023579

申请日：2011-02-09

申请人： Anil K. Chinthakindi ,  Douglas D. Coolbaugh ,  John M. Cotte ,  Ebenezer E. Eshun ,  Zhong-Xiang He ,  Anthony K. Stamper ,  Eric J. White

发明人： Anil K. Chinthakindi ,  Douglas D. Coolbaugh ,  John M. Cotte ,  Ebenezer E. Eshun ,  Zhong-Xiang He ,  Anthony K. Stamper ,  Eric J. White

IPC分类号： H01L23/58

CPC分类号： H01L23/5228 ,  H01L2924/0002 ,  H01L2924/00

摘要： In the course of forming a resistor in the back end of an integrated circuit, an intermediate dielectric layer is deposited and a trench etched through it and into a lower dielectric layer by a controllable amount, so that the top of a resistor layer deposited in the trench is close in height to the top of the lower dielectric layer; the trench is filled and the resistor layer outside the trench is removed, after which a second dielectric layer is deposited. Vias passing through the second dielectric layer to contact the resistor then have the same depth as vias contacting metal interconnects in the lower dielectric layer. A tri-layer resistor structure is employed in which the resistive film is sandwiched between two protective layers that block diffusion between the resistor and BEOL ILD layers.

摘要翻译： 在集成电路的后端形成电阻器的过程中，沉积中间介电层，并通过可蚀刻的量蚀刻通过该介质层并将其沉积到下介电层中，使得沉积在电介质层中的电阻层的顶部 沟槽的高度接近于下介电层的顶部; 沟槽被填充，沟槽外的电阻层被去除，然后沉积第二介电层。 通过第二电介质层以与电阻器接触的通孔的深度与下电介质层中的金属互连接触孔的深度相同。 使用三层电阻器结构，其中电阻膜夹在两个阻挡电阻器和BEOL ILD层之间的扩散的保护层之间。

公开(公告)号：US5939223A

公开(公告)日：1999-08-17

申请号：US879436

申请日：1997-06-20

申请人： John M. Cotte ,  Madhav Datta ,  Ravindra Shenoy

发明人： John M. Cotte ,  Madhav Datta ,  Ravindra Shenoy

IPC分类号： H01M4/06 ,  H01M4/50 ,  H01M4/62 ,  H01M4/66 ,  H01M6/12 ,  H01M6/16 ,  H01M6/18 ,  H01M6/22 ,  H01M6/50

CPC分类号： H01M6/164 ,  H01M4/622 ,  H01M4/667 ,  H01M6/181 ,  H01M2200/00 ,  H01M2300/004 ,  H01M2300/0085 ,  H01M4/505 ,  H01M4/668 ,  H01M6/12

摘要： A primary lithium battery particularly adapted for use in self-contained self-powered devices (SSPD) for mobile communication and computing products, such as radio frequency identification tags, PCMCIA cards, and smart cards. The battery has a flexible and compact design, and utilizes a solid polymer electrolyte membrane that preferably has a polyacrylonitrile matrix. Performance of the electrolyte membrane is optimized by controlling the amount of aprotic organic solvents within the membrane within a prescribed range of ratios. In so doing, the performance characteristics of the battery closely approximate that of conventional liquid electrolytes without the safety hazards associated with the risk of liquid electrolyte leakage, and exhibit enhanced performance at sub-ambient temperatures. A further feature is that the battery's cathode is encapsulated within a polymeric matrix that eliminates the exposure hazard posed by lithium intercalation compounds used within the cathode.

摘要翻译： 特别适用于用于移动通信和计算产品（如射频识别标签，PCMCIA卡和智能卡）的自包含自供电设备（SSPD）中的主要锂电池。 电池具有灵活且紧凑的设计，并且使用优选具有聚丙烯腈基质的固体聚合物电解质膜。 通过在规定的比例范围内控制膜内非质子有机溶剂的量来优化电解质膜的性能。 在这样做时，电池的性能特性与常规液体电解质的性能特性密切相关，而没有与液体电解质渗漏的风险相关的安全隐患，并且在低于环境温度下表现出更好的性能。 另一个特征是电池的阴极被封装在聚合物基质内，消除了在阴极内使用的锂嵌入化合物引起的暴露危害。