公开(公告)号：US20050029369A1

公开(公告)日：2005-02-10

申请号：US10863205

申请日：2004-06-09

申请人： Hideki Nagaoka ,  Hiroshi Koizumi ,  Jun Ooyabu ,  Tsuyoshi Shimazu ,  Hiroki Endo ,  Keiki Ito ,  Daisuke Hayashi

发明人： Hideki Nagaoka ,  Hiroshi Koizumi ,  Jun Ooyabu ,  Tsuyoshi Shimazu ,  Hiroki Endo ,  Keiki Ito ,  Daisuke Hayashi

IPC分类号： B01J4/00 ,  H01L21/00 ,  B05B1/14

CPC分类号： H01L21/67253 ,  H01L21/67017 ,  Y10T137/2499 ,  Y10T137/7722 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/8733

摘要： A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are respectively connected to the each valves 2 in series and which detect pressure of the operation gas, and a controller 25 which proportionally controls the operation of the valves 2 based on detection result of the pressure sensors 3, thereby relatively controlling pressures P1 and P2 of the two valves. With this configuration, it is possible to reduce wastefull consumption of the operation gas, and to enhance the responsivity with respect to change of setting and the like.

摘要翻译： 分压控制系统45包括从操作气体供给管44分支并且可变地控制操作气体的压力传感器3和分别连接到每个阀2的压力传感器3并且检测操作气体的压力的两个阀2， 以及控制器25，其基于压力传感器3的检测结果按比例地控制阀2的操作，从而相对控制两个阀的压力P1和P2。 利用这种结构，可以减少操作气体的浪费，并且提高相对于设定变化等的响应性。

公开(公告)号：US06821691B2

公开(公告)日：2004-11-23

申请号：US10798379

申请日：2004-03-12

申请人： Kazuhiro Machiguchi ,  Yuuji Ueda ,  Hiroki Endo ,  Taichi Natori ,  Toyomi Jinwaki

发明人： Kazuhiro Machiguchi ,  Yuuji Ueda ,  Hiroki Endo ,  Taichi Natori ,  Toyomi Jinwaki

IPC分类号： G02B520

CPC分类号： G02B5/201

摘要： A color filter array having a red filter layer on a substrate wherein the red filter layer comprises a xanthene % dye having its absorption maximum at a wavelength of 500 to 600 nm, and a pirazolone azo dye having its absorption maximum at a wavelength of 400 to 550 nm; and has a transmittance at a wavelength of 535 nm of 1% or less and that at 650 nm of 90% or more; and the color filter array shows excellent spectroscopic characteristics with respect to red light and has a red filter layer excellent in light fastness.

摘要翻译： 一种滤色器阵列，其在基板上具有红色滤色层，其中所述红色滤色层包含在500至600nm的波长下具有最大吸收的呫吨染料，以及在波长为400至 550nm; 并且在535nm的波长下的透射率为1％以下，650nm的透射率为90％以上。 并且滤色器阵列显示出相对于红光的优异的光谱特性，并且具有耐光性优异的红色滤色器层。

公开(公告)号：US06713227B2

公开(公告)日：2004-03-30

申请号：US09893450

申请日：2001-06-29

申请人： Kazuhiro Machiguchi ,  Yuuji Ueda ,  Hiroki Endo ,  Taichi Natori ,  Toyomi Jinwaki

发明人： Kazuhiro Machiguchi ,  Yuuji Ueda ,  Hiroki Endo ,  Taichi Natori ,  Toyomi Jinwaki

IPC分类号： G03F7004

CPC分类号： G02B5/201

摘要： A color filter array having a green filter layer on a substrate wherein the green filter layer comprises a copper phthalocyanine dye having its absorption maximum at a wavelength of 600 to 700 nm, and a pyridone azo dye having its absorption maximum at a wavelength of 400 to 500 nm; and has a transmittance at a wavelength of 450 nm of 5% or less and that at 535 nm of 62% or more is provided; and the color filter array shows excellent spectroscopic characteristics with respect to green light and has a green filter layer excellent in light fastness.

公开(公告)号：US06277441B1

公开(公告)日：2001-08-21

申请号：US08389119

申请日：1995-02-15

申请人： Hiroki Endo ,  Hideya Kobari ,  Koji Ueda ,  Hiroyoshi Sago

发明人： Hiroki Endo ,  Hideya Kobari ,  Koji Ueda ,  Hiroyoshi Sago

IPC分类号： B05D312

CPC分类号： H01L21/6715 ,  B05D1/005 ,  C03C17/001 ,  C03C2218/116 ,  H01L21/02126 ,  H01L21/02282 ,  H01L21/31051 ,  H01L21/316

摘要： According to the invention disclosed, application liquid such as spin-on-glass (SOG) is dropped on the surface of a substrate such as a semiconductor wafer having irregularities thereon and is dispersed on the substrate surface using a centrifugal force generated by rotating the substrate. The rotation of the substrate is performed in a first rotational action at a low speed and a second rotational action at a high speed, the first and second rotational actions being separated by a time interval. The second rotation may be at a constant speed. Alternatively, the rotational speed of the second rotational action may comprise rotation at an intermediate speed continuously followed by rotation at a higher speed. The time interval between the first and second rotational actions is ten times the duration of the first rotational action or longer. The duration of the second rotational action is three times that of the first rotational action or longer. Such time interval and relative durations make the application liquid more conformable to the substrate surface and causes the application liquid to be sufficiently dispersed on the substrate to provide a film having the desired thickness on the substrate, even though the substrate has irregularities thereon.

摘要翻译： 根据所公开的发明，将诸如旋涂玻璃（SOG）的涂布液滴落在其上具有不规则性的半导体晶片等基板的表面上，并使用通过旋转基板产生的离心力将其分散在基板表面上 。 基板的旋转以低速的第一旋转动作和高速的第二旋转动作进行，第一和第二旋转动作以时间间隔分开。 第二旋转可以是恒定的速度。 或者，第二旋转动作的旋转速度可以包括以中间速度连续地以较高速度旋转的旋转。 第一和第二旋转动作之间的时间间隔是第一旋转动作的持续时间的十倍或更长。 第二旋转动作的持续时间是第一旋转动作的持续时间的3倍以上。 这样的时间间隔和相对持续时间使得施加液体更适合于衬底表面，并且使得施加液体充分地分散在衬底上，以在衬底上提供具有期望厚度的膜，即使衬底在其上具有不规则性。

公开(公告)号：US06255640B1

公开(公告)日：2001-07-03

申请号：US09277707

申请日：1999-03-26

申请人： Hiroki Endo ,  Taichi Natori

发明人： Hiroki Endo ,  Taichi Natori

IPC分类号： H01L310232

CPC分类号： G02B5/20 ,  H01L27/14621 ,  H01L27/14627 ,  H01L31/02162

摘要： The picture quality of a solid-state image sensing device is improved and its manufacturing process is simplified. The solid-state image sensing device comprises an interlayer film having a recess above a light receiving sensor unit as well as an intra-layer color filter having a protuberance formed by filling the recess in accordance with the curved surface of the recess, the protuberance having a curvature required for collecting the incident light onto the light receiving sensor unit.

摘要翻译： 固态摄像装置的图像质量得到改善，其制造工艺简化。 固体摄像装置包括在光接收传感器单元上​​方具有凹部的层间膜以及具有根据凹部的弯曲表面填充凹部形成的突起的层内滤色器，所述突起具有 将入射光收集到光接收传感器单元上​​所需的曲率。

公开(公告)号：US06033813A

公开(公告)日：2000-03-07

申请号：US96573

申请日：1998-06-12

申请人： Hiroki Endo ,  Yoshinori Uchida

发明人： Hiroki Endo ,  Yoshinori Uchida

IPC分类号： G02B5/20 ,  G03F7/40 ,  H01L27/14 ,  H04N9/07 ,  G02F1/1335

CPC分类号： G02B5/201

摘要： Disclosed is a method of manufacturing a color filter using a photoresist containing a dye in a large amount, which is capable of enhancing optical and mechanical characteristics of the color filter and improving the workability. The method includes the steps of: coating a surface of a base with a positive type photoresist containing a dye in an amount of 10 to 50 wt %, and processing the photoresist by pattern-exposure and development to form a dye containing photoresist layer having a specific pattern; and hardening the dye containing photoresist layer to form specific color filter elements; wherein the hardening step includes a step of heating the photoresist layer while letting the photoresist layer be irradiated with ultraviolet light.

摘要翻译： 公开了一种使用含有大量染料的光致抗蚀剂的滤色器的制造方法，其能够提高滤色器的光学和机械特性并提高可加工性。 该方法包括以下步骤：用含有10至50重量％染料的正型光致抗蚀剂涂覆基材的表面，并通过图案曝光和显影处理该光致抗蚀剂以形成含有染料的光致抗蚀剂层，其具有 具体模式; 并硬化含有染料的光致抗蚀剂层以形成特定的滤色器元件; 其中所述硬化步骤包括在使所述光致抗蚀剂层被紫外线照射的同时加热所述光致抗蚀剂层的步骤。

公开(公告)号：US5879457A

公开(公告)日：1999-03-09

申请号：US783988

申请日：1997-01-14

申请人： Tsutomu Sahoda ,  Koji Ueda ,  Hiroki Endo ,  Hidenori Miyamoto

发明人： Tsutomu Sahoda ,  Koji Ueda ,  Hiroki Endo ,  Hidenori Miyamoto

IPC分类号： B05C11/08 ,  G03F7/16 ,  H01L21/00 ,  H01L21/027 ,  B05C5/00 ,  B05C13/00

CPC分类号： H01L21/6715 ,  B05C11/08

摘要： A rotating cup type liquid coating device with structure for suppressing pulsatory movement of the coated liquid when stopping rotation of the inner cup 3, includes a buffer space S formed for connecting an inner space of the inner cup 3 and an inner space of an outer cup 2 surrounding the inner cup, on an outer periphery of the inner cup 3 , through respective throttle portions 16, 17.

摘要翻译： 具有用于在停止内杯3的旋转时抑制被涂液体的脉动运动的结构的旋转杯式液体涂布装置包括形成为用于连接内杯3的内部空间和外杯的内部空间的缓冲空间S 2通过相应的节流部分16,17围绕内杯3在内杯3的外周上。