Method for forming two device wafers from a single base substrate utilizing a controlled spalling process
    72.
    发明授权
    Method for forming two device wafers from a single base substrate utilizing a controlled spalling process 有权
    使用受控的剥落过程从单个基底基板形成两个器件晶片的方法

    公开(公告)号:US08841203B2

    公开(公告)日:2014-09-23

    申请号:US13159877

    申请日:2011-06-14

    CPC分类号: H01L21/7813 H01L21/304

    摘要: The present disclosure provides a method for forming two device wafers starting from a single base substrate. The method includes first providing a structure which includes a base substrate with device layers located on, or within, a topmost surface and a bottommost surface of the base substrate. The base substrate may have double side polished surfaces. The structure including the device layers is spalled in a region within the base substrate that is between the device layers. The spalling provides a first device wafer including a portion of the base substrate and one of the device layers, and a second device wafer including another portion of the base substrate and the other of the device layer.

    摘要翻译: 本公开提供了从单个基底基板开始形成两个器件晶片的方法。 该方法包括首先提供一种结构,该结构包括具有位于基底板的最上表面和最底表面之上或之内的器件层的基底基板。 基底可以具有双面抛光表面。 包括器件层的结构在基底衬底内位于器件层之间的区域中被剥落。 剥落提供了包括基底部分的一部分和器件层之一的第一器件晶片,以及包括基底衬底的另一部分和器件层另一部分的第二器件晶片。

    Semiconductor substrates using bandgap material between III-V channel material and insulator layer
    76.
    发明授权
    Semiconductor substrates using bandgap material between III-V channel material and insulator layer 有权
    在III-V沟道材料和绝缘体层之间使用带隙材料的半导体衬底

    公开(公告)号:US08614447B2

    公开(公告)日:2013-12-24

    申请号:US13361004

    申请日:2012-01-30

    IPC分类号: H01L21/20

    摘要: Improved semiconductor substrates are provided that employ a wide bandgap material between the channel and the insulator. A semiconductor substrate comprises a channel layer comprised of a III-V material; an insulator layer; and a wide bandgap material between the channel layer and the insulator layer, wherein a conduction band offset (ΔEc) between the channel layer and the wide bandgap material is between 0.05 eV and 0.8 eV. The channel layer can be comprised of, for example, In1-xGaxAs or In1-xGaxSb, with x varying from 0 to 1. The wide bandgap material can be comprised of, for example, In1-yAlyAs, In1-yAlyP, Al1-yGayAs or In1-yGayP, with y varying from 0 to 1.

    摘要翻译: 提供了改进的半导体衬底,其在通道和绝缘体之间采用宽带隙材料。 半导体衬底包括由III-V材料构成的沟道层; 绝缘体层; 以及在沟道层和绝缘体层之间的宽带隙材料,其中沟道层和宽带隙材料之间的导带偏移(DeltaEc)在0.05eV和0.8eV之间。 沟道层可以由例如In1-xGaxAs或In1-xGaxSb组成,x的变化范围为0到1.宽带隙材料可以由例如In1-yAlyAs,In1-yAlyP,Al1-yGayAs 或In1-yGayP,y从0变化到1。