摘要:
A silicon film forming apparatus includes a deposition chamber (10), a silicon sputter target (2) arranged in the chamber, a hydrogen gas supply circuit (102 or 102′) supplying a hydrogen gas into the chamber, and a high-frequency power applying device (antenna 1, 1′, power source PW and others) generating inductively coupled plasma by applying high-frequency power to the gas supplied into the deposition chamber (10). Chemical sputtering is effected on the target (2) by the plasma to form a silicon film on a substrate S. A silane gas may be used. A silane gas supply circuit (101) may be provided with a gas reservoir unit (GR). The silicon film can be formed inexpensively and fast at a relatively low temperature.
摘要:
A secondary battery comprises a pair of collectors made of a valve action metal, a pair of electrodes comprising a sulfuric acid aqueous solution, a separator and an outer can. Each collector is covered with an oxide film of a thickness of 1.7-10 nm. The oxide film is formed in a range of from 30% by area or more to less than 100% by area relative to the surface area of the collector. Each collector has one electrode disposed thereon.
摘要:
A method of producing a conductive polymer comprises the following steps of depositing a solid-state organic compound and contacting a collector with an electrolytic solution thereby to cause an electrolytic polymerization of said organic compound.
摘要:
Disclosed is a burner for burning liquid fuel that is able to obtain a long flame in which the proportion of the luminous flame portion is large, and thereby particularly effective for radiant heat transfer. This liquid fuel burner is composed of a fuel feed pipe (4) having a fuel spray nozzle (3) at its distal end, a combustion-assisting gas feed pipe (6) provided concentrically on the outside of the fuel feed pipe (4) to form a combustion-assisting gas passage (5), and an orifice member (7) arranged within the above-mentioned fuel feed pipe (4) at an interval from the distal end of the fuel feed pipe (4). In addition, the orifice (9) of the orifice member (7) and the fuel spray nozzle (3) of the above-mentioned fuel feed pipe (4) are mutually eccentric.
摘要:
A document creating apparatus for creating and editing a document in which a plurality of different types of descriptive element data, such as text data, graph data, pattern data, image data and other data, coexist. Plural types of edit sections are provided in correspondence with the types of data to be handled. Various types of data are edited under coordination by selecting edit sections corresponding to the types of data, respectively, while maintaining the editing function of the editing section once selected and activated so that the editing section can be selected again without losing its editing function.
摘要:
Provided are sulfonamide-containing compositions, topcoat polymers, and additive polymers for use in lithographic processes that have improved static receding water contact angles over those known in the art. The sulfonamide-containing topcoat polymers and additive polymers of the present invention include sulfonamide-substituted repeat units with branched linking group as shown in Formula (I):
摘要:
An insulating film that does not contain hydrogen or free fluorine and has good film properties is provided. A silicon oxynitride film includes silicon, nitrogen, oxygen, and fluorine, wherein the elemental percentage (N+O+F)/Si of the total (N+O+F) of nitrogen (N), oxygen (O), and fluorine (F) to silicon (Si) is in a range of 1.93 to 1.48, and in the silicon oxynitride film, an elemental percentage of silicon ranges from 0.34 to 0.41, an elemental percentage of nitrogen ranges from 0.10 to 0.22, an elemental percentage of oxygen ranges from 0.14 to 0.38, and an elemental percentage of fluorine ranges from 0.17 to 0.24. The film can be formed on a substrate by inductive coupling type plasma CVD whereby a plasma is generated by inductive coupling using a silicon tetrafluoride gas, a nitrogen gas, and an oxygen gas as a material gas.
摘要翻译:提供不含氢或游离氟并具有良好膜性能的绝缘膜。 氧氮化硅膜包括硅,氮,氧和氟,其中氮(N),氧(O)和氟的总(N + O + F)的总量(N + O + F)/ Si (F)与硅(Si)的比例在1.93〜1.48的范围内,氮氧化硅膜的元素百分比为0.34〜0.41,氮的元素百分比为0.10〜0.22,元素的比例 氧的范围为0.14〜0.38,氟的元素百分比为0.17〜0.24。 可以通过感应耦合型等离子体CVD在基板上形成膜,由此通过使用四氟化硅气体,氮气和氧气作为原料气体的感应耦合产生等离子体。
摘要:
A blood test device (21) ensuring successful measurement wherein fingers scarcely slip out from the blood test device and blood never sticks to other sites in the course from the puncture of the patient's skin to the completion of the blood test. This blood test device (21) comprises a cartridge (24) in which sensors (23) pooling blood oozing out from the punctured skin are stored in a layered state, a transport unit transporting a single sensor sheet (23) from the inside of the cartridge (24) to the outside, a holder (25) holding the transported sensor (23), a laser emitting unit (26) puncturing the skin in the state where the sensor (23) is held by the holder (25), and a pump (28) keeping the inside of the holder (25) and the inside of the cartridge (24) under negative pressure.
摘要:
A display device includes a TFT substrate (30) containing a transparent first resin substrate (11) having the heat resistance and a plurality of TFTs (5) disposed on the first resin substrate (11) and a counter-substrate (50) containing a transparent second resin substrate (41) having the heat resistance and being disposed opposing to the TFT substrate (30), wherein the first resin substrate (11) and the second resin substrate (41) have a thickness of 5 μm or more and 20 μm or less and a birefringence of 0.002 or more and 0.1 or less.