公开(公告)号：US20060238755A1

公开(公告)日：2006-10-26

申请号：US11472368

申请日：2006-06-22

申请人： Hisae Shibuya ,  Yuji Takagi

发明人： Hisae Shibuya ,  Yuji Takagi

IPC分类号： G01N21/00 ,  G06K9/00

CPC分类号： G01N21/956 ,  G01N21/9501 ,  G06T7/0006 ,  G06T7/001 ,  G06T2207/30148

摘要： The distribution states of defects are analyzed on the basis of the coordinates of defects detected by an inspection apparatus to classify them into a distribution feature category, or any one of repetitive defect, congestion defect, linear distribution defect, ring/lump distribution defect and random defect. In the manufacturing process for semiconductor substrates, defect distribution states are analyzed on the basis of defect data detected by an inspection apparatus, thereby specifying the cause of defect in apparatus or process.

公开(公告)号：USRE39163E1

公开(公告)日：2006-07-11

申请号：US10702057

申请日：2003-11-06

申请人： Yuji Takagi ,  Takahiro Nagai ,  Yoshihisa Fukushima ,  Shunji Ohara ,  Isao Satoh

发明人： Yuji Takagi ,  Takahiro Nagai ,  Yoshihisa Fukushima ,  Shunji Ohara ,  Isao Satoh

IPC分类号： G11B7/24

CPC分类号： G11B20/1883 ,  G11B20/10 ,  G11B20/1258 ,  G11B2220/20

摘要： In a recording and reproducing apparatus for a disc-shaped recording medium, and a defect substitution method for a disc-shaped recording medium (8), whether reproduction of recorded data is good is determined by sector unit and not by product code unit, defective sector discrimination is performed by sector unit, and only sectors determined defective are alternately recorded, when using a recording format in which data that is error detection and correction coded with a product code is segmented and recorded to a plurality of sectors.

摘要翻译： 在盘形记录介质的记录和再现装置以及盘形记录介质（8）的缺陷替换方法中，记录数据的再现是否良好是由扇区单元而不是产品代码单元来确定的 当使用其中利用产品代码进行的错误检测和校正的数据被分段并记录到多个扇区的记录格式时，扇区鉴别由扇区单元执行，并且仅仅确定有缺陷的扇区被交替地记录。

公开(公告)号：US07034299B2

公开(公告)日：2006-04-25

申请号：US10918340

申请日：2004-08-16

申请人： Ryo Nakagaki ,  Yuji Takagi ,  Hirohito Okuda ,  Hiroshi Kakibayashi

发明人： Ryo Nakagaki ,  Yuji Takagi ,  Hirohito Okuda ,  Hiroshi Kakibayashi

IPC分类号： H01J37/26 ,  G01N23/04

CPC分类号： H01J37/222 ,  G01N23/04 ,  G06T7/0012 ,  H01J2237/26

摘要： It is possible to reliably and efficiently determine whether a specimen contains viruses, bacteria, etc. and, if it does, identify their types, regardless of the observer. Furthermore, even a newly-discovered bacterium can be quickly identified by utilizing a database at a remote location. A transmission microscope system has a microscope for observing a specimen and a database which stores, for each microscopic thing (such as a virus), a name, a specimen pretreatment method and an imaging condition used when the microscopic thing is observed, captured image data, etc. An image of the specimen is captured according to a specimen pretreatment method and an imaging condition retrieved from the database using the name of a target microscopic thing as a key, and the captured image is compared with images stored in the database to identify microscopic things present in the specimen.

摘要翻译： 无论观察者如何，都可以可靠而有效地确定样本是否含有病毒，细菌等，如果有，则可以识别其类型。 此外，甚至可以通过利用远程位置的数据库来快速识别新发现的细菌。 透射显微镜系统具有用于观察标本的显微镜和存储针对每个微观事物（例如病毒）的名称，样本预处理方法和观察微观事物时使用的成像条件的数据库，捕获的图像数据 等等。根据样本预处理方法和使用目标微观事物的名称作为关键从数据库检索的成像条件来捕获样本的图像，并将捕获的图像与存储在数据库中的图像进行比较以识别 样品中存在微观物质。

公开(公告)号：US06984589B2

公开(公告)日：2006-01-10

申请号：US10460217

申请日：2003-06-13

申请人： Maki Tanaka ,  Chie Shishido ,  Yuji Takagi

发明人： Maki Tanaka ,  Chie Shishido ,  Yuji Takagi

IPC分类号： H01L21/306

CPC分类号： G01N23/225 ,  G01N23/2251 ,  H01J37/244 ,  H01J37/3171 ,  H01J2237/2814 ,  H01L21/32137 ,  H01L22/10 ,  H01L2924/0002 ,  H01L2924/00

摘要： Conventionally, there is no method for quantitatively evaluating the three-dimensional shape of an etched pattern in a non-destructive manner and it takes much time and costs to determine etching conditions. With the conventional length measuring method only, it has been impossible to detect an abnormality in the three-dimensional shape and also difficult to control the etching process.According to the present invention, variations in signal amounts of an SEM image are utilized to compute three-dimensional shape data on the pattern associated with the etching process steps, whereby the three-dimensional shape is quantitatively evaluated. Besides, determination of etching process conditions and process control are performed based on the three-dimensional shape data obtained.The present invention makes it is possible to quantitatively evaluate the three-dimensional shape of the etched pattern in a non-destructive manner. Further, the efficiency of determining the etching process conditions and a stable etching process can be realized.

摘要翻译： 通常，没有以非破坏性的方式定量地评价蚀刻图案的三维形状的方法，并且确定蚀刻条件需要花费大量时间和成本。 仅使用常规的长度测量方法，就不可能检测到三维形状的异常，并且也难以控制蚀刻工艺。 根据本发明，利用SEM图像的信号量的变化来计算与蚀刻工艺步骤相关联的图案上的三维形状数据，从而定量评估三维形状。 此外，基于获得的三维形状数据进行蚀刻工艺条件和工艺控制的确定。 本发明能够以非破坏性的方式对蚀刻图案的三维形状进行定量评价。 此外，可以实现确定蚀刻工艺条件的效率和稳定的蚀刻工艺。

公开(公告)号：US20050082476A1

公开(公告)日：2005-04-21

申请号：US11003506

申请日：2004-12-06

申请人： Takashi Hiroi ,  Maki Tanaka ,  Masahiro Watanabe ,  Asahiro Kuni ,  Yukio Matsuyama ,  Yuji Takagi ,  Hiroyuki Shinada ,  Mari Nozoe ,  Aritoshi Sugimoto

发明人： Takashi Hiroi ,  Maki Tanaka ,  Masahiro Watanabe ,  Asahiro Kuni ,  Yukio Matsuyama ,  Yuji Takagi ,  Hiroyuki Shinada ,  Mari Nozoe ,  Aritoshi Sugimoto

IPC分类号： G01Q20/00 ,  G01Q30/04 ,  G01Q30/02 ,  G01Q60/00 ,  H01J37/20 ,  H01J37/22 ,  H01J37/256 ,  H01J37/28 ,  H01L21/66 ,  G01N23/00

CPC分类号： H01J37/28 ,  H01J2237/2817

摘要： An inspection method and apparatus includes control of an acceleration voltage of an electron beam, irradiation of the electron beam to an object to be inspected mounted on a stage which is continuously moving at least in one direction, and detection of at least one of secondary electrons and reflected electrons emanated from the object in response to the irradiation. An image of the object is obtained from the detected electron by using positional information of the stage and inspection or measurement of the object is conducted using and obtained image. In the detection, an electric field in the vicinity of the object mounted on the stage is controlled so that at least one secondary electrons and the reflected electrons emanated from the object in response to the irradiation of the electron beam are decelerated.

摘要翻译： 检查方法和装置包括控制电子束的加速电压，将电子束照射到安装在至少在一个方向上连续移动的台上的被检查物体，以及二次电子中的至少一个的检测 以及响应于照射从物体发射的反射电子。 通过使用舞台的位置信息从被检测的电子获得对象的图像，并使用获得的图像进行对象的检查或测量。 在检测中，控制安装在平台上的物体附近的电场，使得响应于电子束的照射而从物体发出的至少一个二次电子和反射电子减速。

公开(公告)号：US06875984B2

公开(公告)日：2005-04-05

申请号：US10621444

申请日：2003-07-18

申请人： Hiroshi Kakibayashi ,  Shigeyuki Hosoki ,  Yuji Takagi ,  Ryo Miyake ,  Kuniyasu Nakamura ,  Mitsugu Sato ,  Hiroyuki Kobayashi

发明人： Hiroshi Kakibayashi ,  Shigeyuki Hosoki ,  Yuji Takagi ,  Ryo Miyake ,  Kuniyasu Nakamura ,  Mitsugu Sato ,  Hiroyuki Kobayashi

IPC分类号： G01N23/04 ,  G01N1/28 ,  G01N23/225 ,  G01N33/483 ,  G01N37/00 ,  H01J37/20 ,  H01J37/22 ,  H01J37/26 ,  H01J37/28 ,  H01J49/44

CPC分类号： H01J37/22 ,  H01J37/26 ,  H01J2237/05 ,  H01J2237/2809 ,  H01J2237/2813

摘要： A bio electron microscope and an observation method which can observe a bio specimen by low damage and high contrast to perform high-accuracy image analysis, and conduct high-throughput specimen preparation. 1) A specimen is observed at an accelerating voltage 1.2 to 4.2 times a critical electron accelerating voltage possible to transmit a specimen obtained under predetermined conditions. 2) An electron energy filter of small and simplified construction is provided between the specimen and an electron detector for imaging by the electron beam in a specified energy region of the electron beams transmitting the specimen. 3) Similarity between an observed image such as virus or protein in the specimen and a reference image such as known virus or protein is subjected to quantitative analysis by image processing. 4) A preparation protocol of the bio specimen is made into a chip using an MEMS technique, which is then mounted on a specimen stage part of an electron microscope to conduct specimen introduction, preparation and transfer onto a specimen holder.

摘要翻译： 一种生物电子显微镜和观察方法，可以通过低损伤和高对比度观察生物样品，进行高精度图像分析，并进行高通量样品制备。 1）在可能传输在预定条件下获得的样品的临界电子加速电压的1.2至4.2倍的加速电压下观察样品。 2）在样品和电子检测器之间提供小而简化结构的电子能过滤器，用于通过电子束在传输样品的电子束的规定能量区域内的电子束进行成像。 3）通过图像处理对样本中的观察图像（例如病毒或蛋白质）与已知病毒或蛋白质等参考图像之间的相似性进行定量分析。 4）使用MEMS技术将生物样品的制备方案制成芯片，然后将其安装在电子显微镜的样品台部分上，以将样品引入，准备和转移到样品架上。

公开(公告)号：US20050051725A1

公开(公告)日：2005-03-10

申请号：US10918340

申请日：2004-08-16

申请人： Ryo Nakagaki ,  Yuji Takagi ,  Hirohito Okuda ,  Hiroshi Kakibayashi

发明人： Ryo Nakagaki ,  Yuji Takagi ,  Hirohito Okuda ,  Hiroshi Kakibayashi

IPC分类号： G01N23/04 ,  G01N33/48 ,  G01N23/00

CPC分类号： H01J37/222 ,  G01N23/04 ,  G06T7/0012 ,  H01J2237/26

摘要： It is possible to reliably and efficiently determine whether a specimen contains viruses, bacteria, etc. and, if it does, identify their types, regardless of the observer. Furthermore, even a newly-discovered bacterium can be quickly identified by utilizing a database at a remote location. A transmission microscope system has a microscope for observing a specimen and a database which stores, for each microscopic thing (such as a virus), a name, a specimen pretreatment method and an imaging condition used when the microscopic thing is observed, captured image data, etc. An image of the specimen is captured according to a specimen pretreatment method and an imaging condition retrieved from the database using the name of a target microscopic thing as a key, and the captured image is compared with images stored in the database to identify microscopic things present in the specimen.

摘要翻译： 无论观察者如何，都可以可靠而有效地确定样本是否含有病毒，细菌等，如果有，则可以识别其类型。 此外，甚至可以通过利用远程位置的数据库来快速识别新发现的细菌。 透射显微镜系统具有用于观察标本的显微镜和存储针对每个微观事物（例如病毒）的名称，样本预处理方法和观察微观事物时使用的成像条件的数据库，捕获的图像数据 等等。根据样本预处理方法和使用目标微观事物的名称作为关键从数据库检索的成像条件来捕获样本的图像，并将捕获的图像与存储在数据库中的图像进行比较以识别 样品中存在微观物质。

公开(公告)号：US06865288B1

公开(公告)日：2005-03-08

申请号：US09612501

申请日：2000-07-07

申请人： Chie Shishido ,  Masahiro Watanabe ,  Yuji Takagi ,  Hiroshi Miyai

发明人： Chie Shishido ,  Masahiro Watanabe ,  Yuji Takagi ,  Hiroshi Miyai

IPC分类号： H01L21/66 ,  G01N21/88 ,  G01N21/956 ,  G06K9/00 ,  G06T1/00 ,  G06T7/00

CPC分类号： G06T7/001 ,  G06T2207/30148

摘要： A pattern inspection method and apparatus are disclosed, the method has the steps of generating a reference digital image signal to be compared with a detection digital image signal detected continuously from the desired band-shaped inspection area on an object to be inspected, determining zero or one or more candidate , matching positions between the detection digital image signal and the reference digital image signal for each block unit area sequentially cut out and calculating a mass of candidate matching positions over the entire band-shaped inspection area, determining an accurate matching position between the detection digital image signal and the reference digital image signal for each block unit area based on the continuity of the block unit areas from the calculated mass of candidate matching positions over the entire band-shaped inspection area, and determining a defect by matching the positions based on the determined accurate matching position for each block unit area and comparing the images.

摘要翻译： 公开了一种图案检查方法和装置，该方法具有以下步骤：产生参考数字图像信号，以与要检查的对象上的期望的带状检查区域连续检测的检测数字图像信号进行比较，确定零或 检测数字图像信号与每个块单位区域的基准数字图像信号之间的一个或多个候选匹配位置顺序地切出并计算整个带状检查区域上的候选匹配位置的质量，确定精确的匹配位置 所述检测数字图像信号和所述参考数字图像信号，根据所计算出的整个带状检查区域中的候选匹配位置的质量，根据所述块单位面积的连续性，以及通过匹配所述位置 基于确定的每个块单位区域的精确匹配位置 比较图像。

公开(公告)号：US06717142B2

公开(公告)日：2004-04-06

申请号：US10103194

申请日：2002-03-22

申请人： Takashi Hiroi ,  Maki Tanaka ,  Masahiro Watanabe ,  Asahiro Kuni ,  Yukio Matsuyama ,  Yuji Takagi ,  Hiroyuki Shinada ,  Mari Nozoe ,  Aritoshi Sugimoto

发明人： Takashi Hiroi ,  Maki Tanaka ,  Masahiro Watanabe ,  Asahiro Kuni ,  Yukio Matsuyama ,  Yuji Takagi ,  Hiroyuki Shinada ,  Mari Nozoe ,  Aritoshi Sugimoto

IPC分类号： G01N2300

CPC分类号： H01J37/28 ,  H01J2237/2817

摘要： An inspection method and apparatus includes control of an acceleration voltage of an electron beam, irradiation of the electron beam to an object to be inspected mounted on a stage which is continuously moving at least in one direction, and detection of at least one of secondary electrons and reflected electrons emanated from the object in response to the irradiation. An image of the object is obtained from the detected electron by using positional information of the stage and inspection or measurement of the object is conducted using an obtained image. In the detection, an electric field in the vicinity of the object mounted on the stage is controlled so that at least one of the secondary electrons and the reflected electrons emanated from the object in response to the irradiation of the electron beam are decelerated.

摘要翻译： 检查方法和装置包括控制电子束的加速电压，将电子束照射到安装在至少在一个方向上连续移动的台上的被检查物体，以及二次电子中的至少一个的检测 以及响应于照射从物体发射的反射电子。 通过使用舞台的位置信息，从检测到的电子获得对象的图像，并且使用获得的图像进行对象的检查或测量。 在检测中，控制安装在平台上的物体附近的电场，使得响应于电子束的照射而从物体发出的二次电子和反射电子中的至少一个减速。

公开(公告)号：US06587581B1

公开(公告)日：2003-07-01

申请号：US09006371

申请日：1998-01-12

申请人： Yukio Matsuyama ,  Yuji Takagi ,  Takashi Hiroi ,  Maki Tanaka ,  Asahiro Kuni ,  Junzou Azuma ,  Shunji Maeda ,  Chie Shishido

发明人： Yukio Matsuyama ,  Yuji Takagi ,  Takashi Hiroi ,  Maki Tanaka ,  Asahiro Kuni ,  Junzou Azuma ,  Shunji Maeda ,  Chie Shishido

IPC分类号： G06K900

CPC分类号： G06T7/001 ,  G01N21/8851 ,  G01N21/95607 ,  G06T5/008 ,  G06T5/40 ,  G06T5/50 ,  G06T7/30 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/2817

摘要： The present invention provides a scanning electron microscope (SEM) or optical inspection method and apparatus which correct differences in brightness between comparison images and thus which is capable of detecting a fine defect with a high degree of reliability without causing any false defect detection. According to the present invention, the brightness values of a pattern, which should be essentially the same, contained in two detected images to be compared are corrected in such a manner that, even if there may be a brightness difference in a portion free from defects, the brightness difference is reduced to such a degree so that it can be recognized as a normal portion. Also, a limit for the amount of correction is furnished in advance, and correction exceeding such limit value is not performed. Such correction prevents the difference in brightness that should be permitted as non-defective from being falsely recognized as a defect without overlooking great differences in brightness due to a defect.

摘要翻译： 本发明提供了一种扫描电子显微镜（SEM）或光学检查方法和装置，其校正比较图像之间的亮度差异，从而能够以高可靠性检测精细缺陷而不引起任何假缺陷检测。 根据本发明，将要被比较的两个检测图像中包含的基本上相同的图案的亮度值以这样的方式进行校正：即使在没有缺陷的部分中可能存在亮度差 ，亮度差降低到这样的程度，从而可以将其识别为正常部分。 此外，预先提供校正量的限制，并且不执行超过该限制值的校正。 这样的校正可以防止由于缺陷而将不允许的亮度差错误地识别为缺陷，而不会因为缺陷而忽略亮度的很大差异。