公开(公告)号：US20220155573A1

公开(公告)日：2022-05-19

申请号：US17588179

申请日：2022-01-28

申请人： Nikon Corporation

发明人： Tomoki ITO

IPC分类号： G02B15/20 ,  G02B15/167 ,  G02B15/14 ,  G02B15/173 ,  H04N5/225

摘要： Comprising a first lens group G1 having positive refractive power, disposed at the most object side, and an image side lens group disposed at a side closer to an image than the first lens group G1, upon zooming, at least a distance between the first lens group G1 and the image side lens group being varied, the image side lens group comprising a vibration reduction lens group GVR which is moved so as to have a component in a direction perpendicular to the optical axis and a focusing lens group GF which is moved along the optical axis upon focusing, thereby providing a variable magnification optical system which has a higher optical performance, an optical apparatus and a method for manufacturing a variable magnification optical system.

公开(公告)号：US11327279B2

公开(公告)日：2022-05-10

申请号：US16880945

申请日：2020-05-21

申请人： Nikon Corporation

发明人： Satoru Shibata ,  Tomoyuki Sashima

IPC分类号： G02B15/20 ,  G02B15/14 ,  G02B15/173 ,  G02B27/64

摘要： A zoom optical system comprises, in order from an object side: a first lens group having positive refractive power; a front-side lens group; an intermediate lens group having positive refractive power; and a rear-side lens group. The front-side lens group is composed of one or more lens groups and has a negative lens group. At least part of the intermediate lens group is a focusing lens group. The rear-side lens group is composed of one or more lens groups. Upon zooming, distances between the first lens group and the front-side lens group, between the front-side lens group and the intermediate lens group, and between the intermediate lens group and the rear-side lens group change. At least one of the following conditional expressions is satisfied: 0.010

公开(公告)号：US11317046B2

公开(公告)日：2022-04-26

申请号：US16737993

申请日：2020-01-09

申请人： NIKON CORPORATION

发明人： Shiro Tsunai ,  Hironobu Murata

IPC分类号： H04N5/374 ,  H04N5/3745 ,  H04N5/353 ,  H04N5/378 ,  H01L27/146 ,  H04N5/369 ,  H04N5/355 ,  H04N9/04

摘要： An imaging element includes: an imaging unit in which a plurality of pixel groups including a plurality of pixels that output pixel signals according to incident light are formed, and on which incident light corresponding to mutually different pieces of image information is incident; a control unit that controls, for each of the pixel groups, a period of accumulating in the plurality of pixels included in the pixel group; and a readout unit that is provided to each of the pixel groups, and reads out the pixel signals from the plurality of pixels included in the pixel group.

公开(公告)号：US11313758B2

公开(公告)日：2022-04-26

申请号：US16817293

申请日：2020-03-12

申请人： Nikon Corporation

发明人： Michael Sogard

IPC分类号： G01M11/02 ,  G03F1/84 ,  G03F7/20

摘要： An apparatus and method for measuring thermo-mechanically induced reticle distortion or other distortion in a lithography device enables detecting distortion at the nanometer level in situ. The techniques described use relatively simple optical detectors and data acquisition electronics that are capable of monitoring the distortion in real time, during operation of the lithography equipment. Time-varying anisotropic distortion of a reticle can be measured by directing slit patterns of light having different orientations to the reticle and detecting reflected, transmitted or diffracted light from the reticle. In one example, corresponding segments of successive time measurements of secondary light signals are compared as the reticle scans a substrate at a reticle stage speed of about 1 m/s to detect temporal offsets and other features that correspond to spatial distortion.

公开(公告)号：US20220120937A1

公开(公告)日：2022-04-21

申请号：US17565881

申请日：2021-12-30

申请人： NIKON CORPORATION

发明人： Yoshihiro SOMEYA ,  Masayuki SHIJO

IPC分类号： G02B1/04 ,  C07D487/00 ,  C08F18/14 ,  G02B7/02

摘要： A compound represented by Formula (1) given below. (In the formula, R1 represents a hydrogen atom or a methyl group, and X represents a C2 to 6 alkylene group, a C4 to 6 alkylene group containing an oxygen atom and/or a sulfur atom, or a C3 to 6 alkylene group in which at least one hydrogen is replaced with an acryloxy group or a methacryloxy group.)

公开(公告)号：US11307392B2

公开(公告)日：2022-04-19

申请号：US16886757

申请日：2020-05-28

申请人： Nikon Corporation

发明人： Hiroshi Yamamoto ,  Satoru Shibata

IPC分类号： G02B15/14 ,  G02B27/64 ,  G02B13/00

摘要： Provided is a variable magnification optical system comprising, in order from an object side along an optical axis, a first lens group G1 having positive refractive power, a second lens group G2 having negative refractive power, a third lens group G3 having positive refractive power, and a fourth lens group G4; upon zooming from a wide angle end state to a telephoto end state, a distance between the first lens group G1 and the second lens group G2 being varied, a distance between the second lens group G2 and the third lens group G3 being varied, and a distance between the third lens group and the fourth lens group being varied; the third lens group G3 comprising, in order from the object side along the optical axis, a 3a-th lens group G3a having positive refractive power, an aperture S, and a 3b-th lens group G3b having positive refractive power; a lens group having negative refractive power within the 3b-th lens group G3b being used as a vibration reduction lens group and moved so as to include a component in a direction orthogonal to the optical axis, whereby image plane correction is performed when image blurring occurs; and predetermined conditions being satisfied. Whereby, a small-size and high-performance variable magnification optical system, capable of realizing a small variation in aberration and attaining a sufficient brightness even in the telephoto state, an imaging apparatus, and a method for manufacturing the variable magnification optical system are provided.

公开(公告)号：US20220114819A1

公开(公告)日：2022-04-14

申请号：US17509882

申请日：2021-10-25

申请人： NIKON CORPORATION

发明人： Toru ICHIHASHI ,  Hiroaki KII ,  Tetsuomi TAKASAKI ,  Takayuki UOZUMI ,  Yoichi YAMAZAKI ,  Masaki KINEHARA

IPC分类号： G06V20/69 ,  G06T7/246

摘要： A cell tracking method for performing cell tracking on the basis of a plurality of cell images captured in time series, including an extraction process of extracting a tracking region corresponding to the cell for each cell images; a tracking process of calculating a change information in a position of the extracted tracking region and tracking the cell on the basis of the change information; a determination process of determining whether or not the cell as a tracking target is in a cell division state on the basis of the cell image; and an analysis process of analyzing a movement state of the cell on the basis of the change information from which the change information in a period of the cell division state is excluded when the cell is determined to be in the cell division state in the determination process.

公开(公告)号：US20220111521A1

公开(公告)日：2022-04-14

申请号：US17496711

申请日：2021-10-07

申请人： Nikon Corporation

发明人： Michael Birk Binnard ,  Yoon Jung Jeong ,  Alton Hugh Phillips

IPC分类号： B25J9/16 ,  F16F15/027 ,  B25J9/00 ,  B25J9/12 ,  B25J9/14 ,  B25J13/08

摘要： A vibration reduction system includes a base, a carrier element, and a plurality of actuator systems extending between the base and the carrier element, the plurality of actuator systems arranged to apply forces to the carrier element in multiple axes to reduce vibration of the carrier element, each actuator system of the plurality of actuator systems including a pneumatic actuator and an electric actuator.

公开(公告)号：US11297221B2

公开(公告)日：2022-04-05

申请号：US16366133

申请日：2019-03-27

申请人： NIKON CORPORATION

发明人： Satoshi Tsuchiya ,  Yuuki Asano ,  Shuhei Yoshikawa ,  Aiko Namikawa

IPC分类号： H04N5/232 ,  G03B15/00 ,  G03B17/18 ,  H04N5/225 ,  H04N5/345 ,  H04N5/353 ,  H04N5/374

摘要： An image-capturing apparatus includes: an image sensor having a first image-capturing region and a second image-capturing region different from the first image-capturing region; and a control unit that displays an image generated by the first image-capturing region and an image generated by the second image-capturing region on a display unit, with a region targeted for setting image-capturing conditions of the image sensor being selectable.

公开(公告)号：US11294157B2

公开(公告)日：2022-04-05

申请号：US16345123

申请日：2016-11-21

申请人： Nikon Corporation

发明人： Kosuke Machida

IPC分类号： G02B15/173 ,  G02B15/14 ,  G02B9/14 ,  G02B15/20 ,  G02B27/64

摘要： A zoom optical system (ZL) comprises, in order from an object: a first lens group (G1) having a positive refractive power; a second lens group (G2) having a negative refractive power; a third lens group (G3) having a positive refractive power; and a subsequent lens group (GR), wherein upon zooming, a distance between the first lens group (G1) and the second lens group (G2) changes, a distance between the second lens group (G2) and the third lens group (G3) changes, and a distance between the third lens group (G3) and the subsequent lens group (GR) changes, the subsequent lens group (GR) comprises a focusing lens group that moves upon focusing, and the second lens group (G2) comprises a partial group that satisfies following conditional expressions, 1.40