公开(公告)号：US08148792B2

公开(公告)日：2012-04-03

申请号：US12588241

申请日：2009-10-08

申请人： Goro Nakatani

发明人： Goro Nakatani

IPC分类号： H01L29/84

CPC分类号： G01L9/0073 ,  G01L9/0016

摘要： A pressure sensor of the present invention includes a lower substrate which has an insulating layer having a through-hole penetrating from one side to the other side, and an active layer formed to have a uniform thickness on the insulating layer and having a portion facing the through-hole as an oscillating portion capable of oscillating in a direction opposing the through-hole; a lower electrode formed on the oscillating portion; an upper substrate arranged opposite to the active layer and having a recess at a portion opposed to the oscillating portion; and an upper electrode formed on the recess.

摘要翻译： 本发明的压力传感器包括具有绝缘层的下基板，该绝缘层具有从一侧到另一侧贯通的通孔，以及形成为在绝缘层上具有均匀厚度的有源层，并且具有面向 通孔作为能够在与通孔相反的方向上振荡的振荡部; 形成在所述振荡部上的下电极; 与所述有源层相对布置并且在与所述振荡部相对的部分处具有凹部的上基板; 以及形成在所述凹部上的上电极。

公开(公告)号：US07692358B2

公开(公告)日：2010-04-06

申请号：US11940005

申请日：2007-11-14

申请人： Terje Kvisteroy ,  Reidar Holm ,  Sverre Horntvedt

发明人： Terje Kvisteroy ,  Reidar Holm ,  Sverre Horntvedt

IPC分类号： H01L41/107

CPC分类号： G01D21/00 ,  G01L9/0016 ,  G01L9/0019 ,  G01P15/097

摘要： A micro mechanical backscatter sensor includes a receiver for receiving a modulated electromagnetic signal, a capacitive element operatively connected to the receiver, the capacitive element being arranged such that a voltage is generated across the capacitor in response to the frequency of the received signal, and a resonator operatively connected to the capacitive element such that electrostatic forces that are induced by the voltage generated cause the resonator to vibrate at a resonance frequency, the resonator being arranged such that an applied external force alters the resonance frequency of vibration. The sensor further includes a demodulator for demodulating the received signal, a modulator for modulating a carrier signal of the received signal by mixing the carrier signal with the resonance frequency of the resonator to produce a modulated electromagnetic transmission signal, and a transmitter, operatively connected to the capacitive element and arranged to transmit the modulated transmission signal.

摘要翻译： 微机械后向散射传感器包括用于接收调制的电磁信号的接收器，可操作地连接到接收器的电容元件，电容元件被布置成使得响应于接收信号的频率在电容器两端产生电压， 谐振器可操作地连接到电容元件，使得由所产生的电压引起的静电力导致谐振器以谐振频率振动，所述谐振器布置成使得施加的外力改变振动的共振频率。 传感器还包括用于解调接收信号的解调器，用于通过将载波信号与谐振器的谐振频率混合以产生调制电磁传输信号来调制接收信号的载波信号的调制器，以及可操作地连接到 该电容元件被布置成发送调制的发送信号。

公开(公告)号：US07644622B2

公开(公告)日：2010-01-12

申请号：US12038988

申请日：2008-02-28

申请人： Dong-Hai Qiao ,  Yuan Yao ,  Kai-Li Jiang ,  Liang Liu

发明人： Dong-Hai Qiao ,  Yuan Yao ,  Kai-Li Jiang ,  Liang Liu

IPC分类号： G01L9/00

CPC分类号： G01L9/0016 ,  G01L9/0019

摘要： The present micro-electro-mechanical pressure sensor includes a substrate, a dielectric isolation layer, at least two electrodes, and a vibrating membrane. The substrate includes an acoustic cavity. The dielectric isolation layer is formed on the substrate, and the dielectric isolation layer includes a through hole corresponding to the acoustic cavity. The at least two electrodes are separately formed on the dielectric isolation layer. The vibrating membrane covers the through hole, and the vibrating membrane includes at least one carbon nanotube structure with two opposite ends. The two opposite ends of the carbon nanotube are respectively connected to at least a given one of the at least two electrodes.

摘要翻译： 本发明的微机电压力传感器包括基板，电介质隔离层，至少两个电极和振动膜。 衬底包括声腔。 介电隔离层形成在基板上，介电隔离层包括对应于声腔的通孔。 所述至少两个电极分别形成在介电隔离层上。 振动膜覆盖通孔，振动膜包括至少一个具有两个相对端的碳纳米管结构。 碳纳米管的两个相对端分别连接到至少两个电极中的给定的一个。

公开(公告)号：US20090013792A1

公开(公告)日：2009-01-15

申请号：US12038988

申请日：2008-02-28

申请人： Dong-Hai Qiao ,  Yuan Yao ,  Kai-Li Jiang ,  Liang Liu

发明人： Dong-Hai Qiao ,  Yuan Yao ,  Kai-Li Jiang ,  Liang Liu

IPC分类号： G01L9/00

CPC分类号： G01L9/0016 ,  G01L9/0019

摘要： The present micro-electro-mechanical pressure sensor includes a substrate, a dielectric isolation layer, at least two electrodes, and a vibrating membrane. The substrate includes an acoustic cavity. The dielectric isolation layer is formed on the substrate, and the dielectric isolation layer includes a through hole corresponding to the acoustic cavity. The at least two electrodes are separately formed on the dielectric isolation layer. The vibrating membrane covers the through hole, and the vibrating membrane includes at least one carbon nanotube structure with two opposite ends. The two opposite ends of the carbon nanotube are respectively connected to at least a given one of the at least two electrodes.

摘要翻译： 本发明的微机电压力传感器包括基板，电介质隔离层，至少两个电极和振动膜。 衬底包括声腔。 介电隔离层形成在基板上，介电隔离层包括对应于声腔的通孔。 所述至少两个电极分别形成在介电隔离层上。 振动膜覆盖通孔，振动膜包括至少一个具有两个相对端的碳纳米管结构。 碳纳米管的两个相对端分别连接到至少两个电极中的给定的一个。

公开(公告)号：US20080224568A1

公开(公告)日：2008-09-18

申请号：US11940005

申请日：2007-11-14

申请人： Terje Kvisteroy ,  Reidar Holm ,  Sverre Horntvedt

发明人： Terje Kvisteroy ,  Reidar Holm ,  Sverre Horntvedt

IPC分类号： H02N2/18

CPC分类号： G01D21/00 ,  G01L9/0016 ,  G01L9/0019 ,  G01P15/097

摘要： A micro mechanical backscatter sensor includes a receiver for receiving a modulated electromagnetic signal, a capacitive element operatively connected to the receiver, the capacitive element being arranged such that a voltage is generated across the capacitor in response to the frequency of the received signal, and a resonator operatively connected to the capacitive element such that electrostatic forces that are induced by the voltage generated cause the resonator to vibrate at a resonance frequency, the resonator being arranged such that an applied external force alters the resonance frequency of vibration. The sensor further includes a demodulator for demodulating the received signal, a modulator for modulating a carrier signal of the received signal by mixing the carrier signal with the resonance frequency of the resonator to produce a modulated electromagnetic transmission signal, and a transmitter, operatively connected to the capacitive element and arranged to transmit the modulated transmission signal.

摘要翻译： 微机械后向散射传感器包括用于接收调制的电磁信号的接收器，可操作地连接到接收器的电容元件，电容元件被布置成使得响应于接收信号的频率在电容器两端产生电压， 谐振器可操作地连接到电容元件，使得由所产生的电压引起的静电力导致谐振器以谐振频率振动，所述谐振器布置成使得施加的外力改变振动的共振频率。 传感器还包括用于解调接收信号的解调器，用于通过将载波信号与谐振器的谐振频率混合以产生调制的电磁传输信号来调制接收信号的载波信号的调制器，以及可操作地连接到 该电容元件被布置成发送调制的发送信号。

公开(公告)号：US20070194395A1

公开(公告)日：2007-08-23

申请号：US10589350

申请日：2005-02-14

申请人： Tomohisa Hoshino

发明人： Tomohisa Hoshino

IPC分类号： H01L29/82

CPC分类号： G01L9/0073 ,  G01D5/24 ,  G01F1/28 ,  G01L9/0016 ,  G01L9/0019

摘要： In a capacity type sensor including a guard electrode which is disposed between a first electrode and a second electrode, an alternating current potential difference between the first electrode and the guard electrode is made substantially close to zero by a potential equalizing means, and impedance change between the first electrode and the second electrode is detected by a capacity type sensor detecting means, parasitic capacity does not function as capacitor, and the effect of the parasitic capacity to detected capacity can be cancelled in appearance, by making the potential difference at both ends of the parasitic capacity which arises between the first electrode and the guard electrode, smaller in appearance or substantially zero, resultantly, only amount of capacity change can be detected.

摘要翻译： 在包括设置在第一电极和第二电极之间的保护电极的容量型传感器中，通过电位均衡装置使第一电极和保护电极之间的交流电位差基本接近于零，并且阻抗变化在 第一电极和第二电极由容量型传感器检测装置检测，寄生电容不起电容器的作用，并且通过使两端的电位差在外观上能够消除寄生电容对检测电容的影响 在第一电极和保护电极之间产生的寄生电容在外观上较小或基本上为零，因此可以仅检测出容量变化量。

公开(公告)号：US07017418B1

公开(公告)日：2006-03-28

申请号：US11012417

申请日：2004-12-15

申请人： Parag Thakre ,  Shankar Chandrasekaran ,  Kuna Venkat Satya Rama Kishore ,  Russell William Craddock

发明人： Parag Thakre ,  Shankar Chandrasekaran ,  Kuna Venkat Satya Rama Kishore ,  Russell William Craddock

IPC分类号： G01L15/00

CPC分类号： G01L9/0019 ,  G01L9/0008 ,  G01L9/0016 ,  G01L9/0022

摘要： A differential pressure sensor for use in an industrial application is described. The differential pressure sensor includes a membrane layer having a covered portion and an exposed portion where a first side of the exposed portion of the membrane layer is in fluid communication to a first aperture and a second side of the exposed portion is in fluid communication to a second aperture. The differential pressure sensor also includes at least one resonating device secured to the covered portion of the membrane layer and configured to oscillate at a desired frequency and a sensing circuitry configured to a detect oscillation in the at least one resonating device indicative of deformation in the membrane layer.

摘要翻译： 描述了用于工业应用的差压传感器。 差压传感器包括具有被覆部分和暴露部分的膜层，其中膜层的暴露部分的第一侧与第一孔流体连通，并且暴露部分的第二侧与流体连通 第二个光圈。 差压传感器还包括至少一个固定到膜层的被覆盖部分并被配置为以期望的频率振荡的谐振装置，以及感测电路，其被配置为检测至少一个谐振装置中的振荡，指示膜中的变形 层。

公开(公告)号：US06546804B2

公开(公告)日：2003-04-15

申请号：US09733944

申请日：2000-12-12

申请人： Goeran Stemme ,  Edvard Kaelvesten

发明人： Goeran Stemme ,  Edvard Kaelvesten

IPC分类号： G01L1100

CPC分类号： G01L9/0016 ,  G01L9/0017 ,  G01L9/0042

摘要： A resonant microbeam pressure sensor is disclosed, comprising a microbeam suspended by a diaphragm at one or more points by suspension elements. Pressure applied to the diaphragm will cause the resonance frequency of the beam to shift. This shift is detectable and proportional to the pressure. The device is manufactured by surface micromachining.

摘要翻译： 公开了一种共振微束压力传感器，其包括通过悬挂元件在一个或多个点处由隔膜悬挂的微束。 施加到隔膜上的压力将导致梁的共振频率偏移。 这种变化是可检测的并且与压力成比例。 该器件通过表面微加工制造。

公开(公告)号：US20030005768A1

公开(公告)日：2003-01-09

申请号：US10183225

申请日：2002-06-26

发明人： John Christopher Greenwood

IPC分类号： G01P015/125

CPC分类号： G01P15/123 ,  G01L1/106 ,  G01L1/183 ,  G01L9/0016 ,  G01L9/0019 ,  G01P15/097

摘要： A resonant sensor comprises a support structure comprising two support points; a laminar resonator suspended between said two support points of said support structure and comprising a plurality of substantially parallel flexural members which are responsive to relative movement of said support points; means for exciting said resonator into a balanced mode of oscillation and means for sensing motion of said resonator. Said means for sensing motion of said resonator is or are spaced from, and linked to, said flexible area of said resonator by means of levers. Said support points are preferably adapted to move relative to each other in response to a difference in pressure, force or acceleration.

摘要翻译： 谐振传感器包括包括两个支撑点的支撑结构; 悬挂在所述支撑结构的所述两个支撑点之间的层状谐振器，并且包括响应于所述支撑点的相对运动的多个基本平行的弯曲构件; 用于将所述谐振器激发成平衡振荡模式的装置和用于感测所述谐振器运动的装置。 用于感测所述谐振器的运动的所述装置是借助于杠杆与所述谐振器的所述柔性区域间隔开并与之相连接的。 所述支撑点优选地适于响应于压力，力或加速度的差异而相对于彼此移动。

公开(公告)号：US4872335A

公开(公告)日：1989-10-10

申请号：US922694

申请日：1986-10-24

申请人： Michihiko Tsuruoka ,  Wataru Nakagawa ,  Noriomi Miyoshi ,  Naohiro Konosu ,  Tadao Hashimoto

发明人： Michihiko Tsuruoka ,  Wataru Nakagawa ,  Noriomi Miyoshi ,  Naohiro Konosu ,  Tadao Hashimoto

IPC分类号： G01L9/00 ,  G01N9/00

CPC分类号： G01L9/0016 ,  G01L9/0022 ,  G01N9/002

摘要： A vibrating transducer for detecting the resonant frequency of a vibrating diaphragm and using that frequency to determine the pressure or density of a fluid contacting the diaphragm. The device includes a container having a diaphragm separating the cavity in the container into two chambers with the diaphragm preventing flow communication between the two chambers. A first fluid inlet in flow communication with the first chamber introduces fluid to the first chamber with that first chamber having an acoustic compliance less than the mechanical compliance of the diaphragm. The second fluid input is in flow communication with the second chamber and introduces fluid into the second chamber. By controlling the acoustic compliance of the chamber with respect to the diaphragm accurate measurements of the density or pressure of the fluid can be obtained.

摘要翻译： 一种用于检测振动膜的谐振频率并使用该频率来确定接触隔膜的流体的压力或密度的振动传感器。 该装置包括容器，该容器具有将容器中的空腔分成两个腔室，隔膜防止两个腔室之间的流动连通。 与第一室流动连通的第一流体入口将流体引入第一室，该第一室的声学顺应性小于膜片的机械顺应性。 第二流体输入与第二腔室流体连通并将流体引入第二腔室。 通过控制腔室相对于隔膜的声学顺应性，可以获得精确的流体密度或压力的测量值。