INFRARED SPECTROSCOPY OF MEDIA, INCLUDING AQUEOUS
    71.
    发明申请
    INFRARED SPECTROSCOPY OF MEDIA, INCLUDING AQUEOUS 审中-公开
    媒体的红外光谱,包括水性

    公开(公告)号:US20090262343A1

    公开(公告)日:2009-10-22

    申请号:US12426547

    申请日:2009-04-20

    Abstract: Wide band infrared spectroscopy of molecules in a variety of media is provided by apparatuses, materials and methods that allow real time spectroscopic view of molecules such as proteins in native environments. Precisely machined sample holders and algorithms are used to reduce spectroscopic effects of solvents such as water. Multiple samples can be analyzed simultaneously. Embodiments provide secondary and tertiary structure information of substances such as proteins based on molecular interactions that can be monitored and manipulated in real time.

    Abstract translation: 在各种介质中的分子的宽带红外光谱由装置,材料和方法提供,其允许在天然环境中实现分子如蛋白质的实时光谱观察。 精确加工的样品架和算法用于降低溶剂如水的光谱效应。 可以同时分析多个样品。 实施例提供物质的二级和三级结构信息,例如可以实时监测和操纵的基于分子相互作用的蛋白质。

    Dual illumination system for an imaging apparatus and method
    72.
    发明授权
    Dual illumination system for an imaging apparatus and method 有权
    用于成像设备和方法的双照明系统

    公开(公告)号:US07474399B2

    公开(公告)日:2009-01-06

    申请号:US11434606

    申请日:2006-05-15

    Abstract: A dual illumination system is disclosed for use with an imaging apparatus. The imaging apparatus defines a light-tight imaging compartment with an interior wall having a view port extending into the imaging compartment. This view port enables data acquisition of a biological specimen contained in the imaging compartment. The dual illumination system includes a first illumination assembly configured to direct structured light onto a first side of the specimen to enable structured light and surface topography measurements thereof. A second illumination assembly then directs light at the specimen wherein diffused fluorescent light emanates from a surface thereof for receipt through the view port to acquire fluorescence data of the specimen. The combination of structured light imaging and fluorescence imaging enables 3D diffuse tomographic reconstructions of fluorescent probe location and concentration.

    Abstract translation: 公开了一种与成像装置一起使用的双照明系统。 成像装置限定了具有内壁的不透光成像室,该内壁具有延伸到成像室中的视口。 该视图端口能够对包含在成像室中的生物样本进行数据采集。 双照明系统包括第一照明组件,其被配置为将结构化光引导到样本的第一侧上,以使其能够进行结构化的光和表面形貌测量。 第二照明组件然后引导样品的光,其中扩散的荧光从其表面发出,以通过视口接收,以获取样本的荧光数据。 结构光成像和荧光成像的结合使得能够进行荧光探针位置和浓度的3D漫射层析成像重建。

    Bottom fluorescence illumination assembly for an imaging apparatus
    74.
    发明授权
    Bottom fluorescence illumination assembly for an imaging apparatus 有权
    用于成像装置的底部荧光照明组件

    公开(公告)号:US07177024B2

    公开(公告)日:2007-02-13

    申请号:US11155078

    申请日:2005-06-17

    Abstract: A macroscopic fluorescence illumination assembly is provided for use with an a imaging apparatus with a light-tight imaging compartment. The imaging apparatus includes an interior wall defining a view port extending into the imaging compartment to enable viewing of a specimen contained therein. The illumination assembly includes a specimen support surface sized and dimensioned for receipt in the imaging compartment, and oriented to face toward the view port of the imaging apparatus. The support surface is substantially opaque and defines a window portion that enables the passage of light there through. The window portion is selectively sized and dimensioned such that the specimen, when supported atop the support surface, can be positioned and seated over the window portion in a manner forming a light-tight seal substantially there between. The illumination assembly further includes an excitation light source, and a bundle of fiber optic strands having proximal ends thereof in optical communication with the light source. The distal ends of the strands terminate proximate the window portion of the support surface. The distal ends each emit a respective beam of light originating from the light source which are then collectively directed toward the window portion and into a bottom side of the specimen wherein the diffused light passes there through and exits a topside thereof for receipt through the view port to view the fluorescence of the specimen.

    Abstract translation: 提供了一种用于与具有不透光成像室的成像装置一起使用的宏观荧光照明组件。 该成像设备包括限定了一个视图端口的内壁,该视图端口延伸到成像室中以使得能够观察其中包含的标本。 照明组件包括尺寸和尺寸适于接收在成像室中的样本支撑表面,并且被定向成面向成像设备的视口。 支撑表面基本上是不透明的,并且限定了能够使光通过的窗口部分。 窗口部分被选择性地定尺寸和尺寸使得当被支撑在支撑表面上方时,样本可以以基本上在其之间形成不透光密封的方式被定位和安置在窗口部分上。 照明组件还包括激发光源,以及一束光纤束,其光纤束的近端与光源光学连通。 股线的末端终止于支撑表面的窗口部分。 远端各自发出源自光源的相应光束,然后将它们共同指向窗口部分并进入样本的底侧,其中漫射光通过其并穿过其顶侧并通过观察端口接收 以观察样品的荧光。

    Chamber leakage detection by measurement of reflectivity of oxidized thin film
    76.
    发明申请
    Chamber leakage detection by measurement of reflectivity of oxidized thin film 失效
    通过测量氧化薄膜的反射率进行室内泄漏检测

    公开(公告)号:US20040212798A1

    公开(公告)日:2004-10-28

    申请号:US10423379

    申请日:2003-04-25

    CPC classification number: G01N21/55 G01N21/8422 G01N2201/0227

    Abstract: A system and method for detecting chamber leakage by measuring the reflectivity of an oxidized thin film. In a preferred embodiment, a method of detecting leaks in a chamber includes providing a first monitor workpiece, placing the first monitor workpiece in the chamber, and forming at least one film on the first monitor workpiece. The reflectivity of the least one film of the first monitor workpiece is measured, wherein the reflectivity indicates whether there are leaks in the at least one seal of the chamber. In another embodiment, the method includes providing a second monitor workpiece, placing the second monitor workpiece in the chamber, and forming at least one film on the second monitor workpiece. The reflectivity of the at least one film of the second monitor workpiece is measured, and the second monitor workpiece film reflectivity is compared to the first monitor workpiece film reflectivity.

    Abstract translation: 通过测量氧化薄膜的反射率来检测室泄漏的系统和方法。 在优选实施例中,检测腔室泄漏的方法包括提供第一监测工件,将第一监测器工件放置在腔室中,以及在第一监测器工件上形成至少一个膜。 测量第一监视器工件的至少一个膜的反射率,其中反射率指示在室的至少一个密封件中是否有泄漏。 在另一个实施例中,该方法包括提供第二监视器工件,将第二监视器工件放置在腔室中,以及在第二监视器工件上形成至少一个膜。 测量第二监测工件的至少一个膜的反射率,并将第二监测工件膜反射率与第一监测工件膜反射率进行比较。

    Optical inspection equipment for semiconductor wafers with precleaning
    77.
    发明申请
    Optical inspection equipment for semiconductor wafers with precleaning 有权
    具有预清洗功能的半导体晶片的光学检测设备

    公开(公告)号:US20040100633A1

    公开(公告)日:2004-05-27

    申请号:US10717316

    申请日:2003-11-19

    Abstract: A method for improving the measurement of semiconductor wafers is disclosed. In the past, the repeatability of measurements was adversely affected due to the unpredictable growth of a layer of contamination over the intentionally deposited dielectric layers. Repeatability can be enhanced by removing this contamination layer prior to measurement. This contamination layer can be effectively removed in a non-destructive fashion by subjecting the wafer to a cleaning step. In one embodiment, the cleaning is performed by exposing the wafer to microwave radiation. Alternatively, the wafer can be cleaned with a radiant heat source. These two cleaning modalities can be used alone or in combination with each other or in combination with other cleaning modalities. The cleaning step may be carried out in air, an inert atmosphere or a vacuum. Once the cleaning has been performed, the wafer can be measured using any number of known optical measurement systems.

    Abstract translation: 公开了一种改善半导体晶片测量的方法。 在过去,由于在有意沉积的介电层上的污染层的不可预测的增长,测量的重复性受到不利影响。 在测量之前,通过去除这个污染层可以提高重复性。 通过使晶片进行清洁步骤,可以非破坏性地有效地去除该污染层。 在一个实施例中,通过将晶片暴露于微波辐射来进行清洁。 或者,可以用辐射热源清洁晶片。 这两种清洁方式可以单独使用或彼此组合使用或与其他清洁模式组合使用。 清洁步骤可以在空气,惰性气氛或真空中进行。 一旦执行了清洁,就可以使用任何数量的已知光学测量系统测量晶片。

    Multiple-gas NDIR analyzer
    78.
    发明授权
    Multiple-gas NDIR analyzer 失效
    多气体NDIR分析仪

    公开(公告)号:US5811812A

    公开(公告)日:1998-09-22

    申请号:US743411

    申请日:1996-11-01

    CPC classification number: G01N21/61 G01N2201/0227 G01N2201/0228

    Abstract: A non-dispersive infrared (NDIR) multi-gas analyzer has an optical element that is positioned with respect to the axis of incident IR radiation such that it passes nearly all of the IR energy within a narrow band pass to one detector and reflects nearly all of the IR energy outside the narrow band pass to another detector. Thus, the optical element simultaneously functions both as a narrow band pass filter and a beam splitter, which transmits nearly all the IR energy within a band pass and reflects nearly all the IR energy outside the band pass. Additionally, the separation of the incoming energy can be achieved without an extended roll off. This allows using a reference transmission band that is very close to the absorption band of the gases of interest. It more specifically allows using a reference transmission band that is located between the absorption bands for hydrocarbons and carbon dioxide in an infrared analyzer that uses beam splitters.

    Abstract translation: 非分散红外(NDIR)多气体分析仪具有相对于入射IR辐射轴定位的光学元件,使得其将窄带内的几乎所有IR能量传递到一个检测器并几乎全部反射 的窄带外的IR能量通过到另一个检测器。 因此,光学元件同时用作窄带通滤波器和分束器,其在带通内传输几乎所有的IR能量,并将几乎所有的IR能量反射到带通外。 此外,可以实现进入能量的分离而不需要延长的滚降。 这允许使用非常接近感兴趣的气体的吸收带的参考传输带。 更具体地,允许在使用分束器的红外分析器中使用位于碳氢化合物的吸收带和二氧化碳之间的参考传输带。

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