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81.发明授权Reduced gas flow purging system in reflectometer, ellipsometer, polarimeter and the like systems 有权反射计，椭偏仪，偏光计等系统中减少了气流清洗系统公开(公告)号：US07426030B1
公开(公告)日：2008-09-16
申请号：US11704545
申请日：2007-02-10
申请人： Martin M. Liphardt , James D. Welch
发明人： Martin M. Liphardt , James D. Welch
IPC分类号： G01J4/00
CPC分类号： G01J1/02 , G01J1/0252 , G01J3/02 , G01J3/0224 , G01J3/0286 , G01J4/00 , G01N21/211 , G01N2021/151 , G01N2021/213
摘要： Reflectometer, ellipsometer, polarimeter or the like system, which functionally comprise means for providing gas confined in a mini-chamber near the surface of a sample, at a location at which a beam having UV, VUV, IR and NIR wavelengths of electromagnetic radiation is caused to be impinged thereupon.
摘要翻译： 反射计，椭偏仪，偏振仪等系统，其功能上包括用于在具有UV，VUV，IR和NIR波长的电磁辐射的光束的位置处提供限制在样品表面附近的小室中的气体的装置 导致了它的冲击。
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公开(公告)号：US07333198B1
公开(公告)日：2008-02-19
申请号：US11495130
申请日：2006-07-29
申请人： Martin M. Liphardt
发明人： Martin M. Liphardt
IPC分类号： G01J4/00
CPC分类号： G01N21/21 , G01N21/211
摘要： Disclosed are systems and methodology for orienting the vertical position, and tilt, of samples, as applied in ellipsometer and the like systems.
摘要翻译： 公开了用于定向样品的垂直位置和倾斜的系统和方法，如应用在椭偏仪等系统中。
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83.发明授权System for sequentially providing aberation corrected electromagnetic radiation to a spot on a sample at multiple angles of incidence 有权用于以多个入射角顺序地将样本校正的电磁辐射提取到样品上的斑点的系统公开(公告)号：US07304792B1
公开(公告)日：2007-12-04
申请号：US11397393
申请日：2006-04-05
CPC分类号： G02B27/0025 , G02B17/061 , G02B21/06
摘要： A system for sequentially providing electromagnetic radiation to a spot on a sample at different angles of incidence, and after reflection therefrom into a detector. The system includes a plurality of spherical mirrors, and a refractive element for correcting aberration.
摘要翻译： 一种系统，用于以不同的入射角度，并且在从其入射到检测器中之后，向样品上的点依次提供电磁辐射。 该系统包括多个球面镜和用于校正像差的折射元件。
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公开(公告)号：US10247611B1
公开(公告)日：2019-04-02
申请号：US14757280
申请日：2015-12-14
申请人： Martin M. Liphardt , Ping He , Duane E. Meyer
发明人： Martin M. Liphardt , Ping He , Duane E. Meyer
摘要： Application of detectors of electromagnetic radiation and systems for enabling the optimization thereof for application over various specific wavelength ranges, involving functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics.
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公开(公告)号：US09041927B1
公开(公告)日：2015-05-26
申请号：US13815489
申请日：2013-03-07
IPC分类号： G01J4/00 , G01J4/04 , G01N21/21 , G01N21/3581
CPC分类号： G01J4/04 , G01J5/20 , G01J5/42 , G01N21/211 , G01N21/3581 , G01N2021/3595 , G01N2201/06113
摘要： A dual scanning and FTIR system for application in the Terahertz and broadband blackbody frequency range including sources for providing Thz and broadband blackbody range and electromagnetic radiation, at least one detector of electromagnetic radiation in the THZ and broadband blackbody ranges, and at least one rotating element between the source and detector.
摘要翻译： 用于太赫兹和宽带黑体频率范围的双扫描和FTIR系统，包括用于提供Thz和宽带黑体范围和电磁辐射的源，至少一个THZ和宽带黑体范围内的电磁辐射检测器，以及至少一个旋转元件 在源和检测器之间。
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86.发明授权System for viewing samples that are undergoing ellipsometric investigation in real time 有权用于查看正在进行椭偏仪调查的样品的系统公开(公告)号：US08953030B1
公开(公告)日：2015-02-10
申请号：US13385762
申请日：2012-03-06
IPC分类号： H04N7/18
CPC分类号： G01N21/211 , G01N21/55
摘要： In the context of an ellipsometer or the like, positioning a camera other than directly above a sample being investigated by an electromagnetic beam, while said camera provides an optical view of a surface of said sample which is in focus over the entire viewed extent of the sample.
摘要翻译： 在椭偏仪等的上下文中，通过电磁光束将除正在研究的样品之外的相机定位，同时所述照相机提供所述样品的表面的光学视图，该光学视图在整个观察范围内聚焦 样品。
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公开(公告)号：US20140027644A1
公开(公告)日：2014-01-30
申请号：US13815487
申请日：2013-03-07
IPC分类号： G01J4/04
CPC分类号： G01J4/04 , G01J5/20 , G01J5/42 , G01N21/211 , G01N21/3581 , G01N2021/3595 , G01N2201/06113
摘要： The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including a polarization state generator comprising: an odd bounce image rotating system and a polarizer, or two polarizers; and optionally including least one compensator and/or modulator, in addition to an analyzer.
摘要翻译： 本发明涉及椭偏仪和偏振计系统，更具体地说，涉及在300GHz以下的频率范围内并延伸至高于至少1Tera-Hz（THz）的椭偏仪或偏振计等。 通过红外（IR）范围，高达100THz，包括：诸如反向波振荡器的源; 史密斯 - 珀塞尔细胞; 自由电子激光器或FTIR源和固态器件; 和诸如Golay细胞的检测器; 测辐射热计或固态检测器; 并且优选地包括偏振态发生器，其包括：奇数反弹图像旋转系统和偏振器，或两个偏振器; 以及可选地包括至少一个补偿器和/或调制器。
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公开(公告)号：US08600703B1
公开(公告)日：2013-12-03
申请号：US12653299
申请日：2009-12-11
申请人： Martin M. Liphardt
发明人： Martin M. Liphardt
CPC分类号： G01B11/0641 , G01N21/211
摘要： Methodology for determining uncertainty in a data set which characterizes a sample involving elimination of the influence of sample alteration drift caused by data set acquisition, and/or elimination of the influence of system drift during data acquisition.
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公开(公告)号：US08493565B1
公开(公告)日：2013-07-23
申请号：US13385018
申请日：2012-01-30
CPC分类号： G01N21/55 , G01N1/10 , G01N21/0332 , G01N21/05 , G01N21/211 , G01N2021/0346 , G01N2021/054
摘要： A small internal volume cell having fluid entry, and exit ports wherein at least one bubble trap is present in a fluid pathway which is continuous with the fluid exit port. There further being present an input/output aperture, for entering and exiting electromagnetic radiation, positioned to allow causing an input beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; and a mirror for directing electromagnetic radiation which reflects from said sample substrate, toward and out of said input/output aperture; as well as methodology of its use.
摘要翻译： 具有流体入口的小内部体积电池和出口端口，其中在与流体出口连续的流体路径中存在至少一个气泡阱。 进一步存在用于进入和退出电磁辐射的输入/输出孔径，其被定位成允许电磁辐射的输入束在其使用期间在其上的位置处撞击在样品基板上; 以及用于引导从所述样品基板反射并朝向和离开所述输入/输出孔的电磁辐射的反射镜; 以及其使用方法。
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90.发明授权Application of digital light processor in imaging ellipsometer and the like systems 有权数字光处理器在成像椭圆仪等系统中的应用公开(公告)号：US08345241B1
公开(公告)日：2013-01-01
申请号：US12806380
申请日：2010-08-11
申请人： Martin M. Liphardt
发明人： Martin M. Liphardt
IPC分类号： G01J4/00
CPC分类号： G01J3/447 , G01J3/02 , G01J3/021 , G01J3/0224 , G01J3/0229 , G01J3/027 , G01J3/2823 , G01J3/457 , G01N21/211 , G01N2021/213
摘要： Application of digital light processor (DLP) systems in an imaging ellipsometer or imaging polarimeter with a focusing means, sample and detector arranged to meet the Scheimpflug condition.
摘要翻译： 数字光处理器（DLP）系统在成像椭偏仪或成像偏光计中的应用，聚焦装置，样品和检测器被设置成满足Scheimpflug条件。
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