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219 条记录 (耗时 0.028 秒)

    Method and its apparatus for inspecting a specimen
    81.
    发明授权
    Method and its apparatus for inspecting a specimen 有权
    检测样本的方法及其装置

    公开(公告)号：US06553323B1

    公开(公告)日：2003-04-22

    申请号：US09661182

    申请日：2000-09-13

    申请人： Kenji Obara ,  Yuji Takagi ,  Toshifumi Honda ,  Ryo Nakagaki ,  Toshiei Kurosaki ,  Yasuhiko Ozawa

    发明人： Kenji Obara ,  Yuji Takagi ,  Toshifumi Honda ,  Ryo Nakagaki ,  Toshiei Kurosaki ,  Yasuhiko Ozawa

    IPC分类号： G01B528

    CPC分类号： H01L22/20 ,  G01N21/88 ,  G01N2021/8861

    摘要： The present invention improves inspection efficiency in detailed inspections of defects performed based on inspection information from a defect inspection. Particles and defects are detected by a defect inspection device 1. If the cause of the particles and defects are to be determined by performing a detailed inspection with a details inspection device 3 using an SEM or the like, attributes are determined on the particles and defects detected by the defects inspection device 1 before the detailed inspection is performed. The attributes are determined with an attribute inspection device using an optical microscope or the like. Based on these attributes, the defects and particles are separated into those that require detailed inspection and those that do not require detailed inspection or that cannot be inspected in detail. A details inspection device 3 is used to inspect the particles and defects requiring detailed inspection.

    摘要翻译： 本发明基于来自缺陷检查的检查信息进行的缺陷的详细检查，提高了检查效率。 通过缺陷检查装置1检测颗粒和缺陷。如果通过使用SEM等的细节检查装置3进行详细检查来确定颗粒和缺陷的原因，则根据颗粒和缺陷确定属性 在执行详细检查之前由缺陷检查装置1检测到。 属性由使用光学显微镜等的属性检查装置确定。 基于这些属性，缺陷和颗粒被分成需要详细检查的那些和不需要详细检查或者不能被详细检查的那些。 细节检查装置3用于检查需要详细检查的颗粒和缺陷。

    Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices
    83.
    发明授权
    Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices 失效
    用于制造半导体器件的方法和系统以及用于检查半导体器件的方法和系统

    公开(公告)号：US06438438B1

    公开(公告)日：2002-08-20

    申请号：US09002529

    申请日：1998-01-02

    申请人： Yuji Takagi ,  Hideaki Doi ,  Makoto Ono

    发明人： Yuji Takagi ,  Hideaki Doi ,  Makoto Ono

    IPC分类号： G06F1900

    CPC分类号： G01N21/94

    摘要： The present invention relates to a method and system of inspecting a product, including extracting defects from the product, classifying the defects on the basis of information about the extracted defects representing the analogy of the defects, extracting the feature data of the defects on the basis of the result of defect classification, and feeding back the feature data of the extracted defects for inspection. The method and system is characterized in that the extracted feature data of the defects is fed back for inspecting the product. The present invention also relates to a method of manufacturing a semiconductor electric or electronic device, including extracting defects from the semiconductor electric or electronic device, classifying the defects on the basis of information about the extracted defects representing the analogy of the defects, extracting the feature data on the defects on the basis of the result of defect classification, and feeding back the feature data of the extracted defects to an apparatus for manufacturing the semiconductor electric or electronic device.

    摘要翻译： 本发明涉及一种检查产品的方法和系统，包括从产品中提取缺陷，基于代表缺陷类比的提取缺陷的信息对缺陷进行分类，基于缺陷提取缺陷的特征数据 的缺陷分类结果，并将提取的缺陷的特征数据反馈进行检查。 该方法和系统的特征在于反馈所提取的缺陷特征数据以检查产品。 本发明还涉及一种制造半导体电气或电子设备的方法，包括从半导体电子或电子设备中提取缺陷，基于关于表示类似于缺陷的提取缺陷的信息来分类缺陷，提取特征 基于缺陷分类的结果对缺陷的数据，并将提取的缺陷的特征数据反馈到用于制造半导体电子或电子设备的装置。

    Fluid-impermeable composite hose
    85.
    发明授权
    Fluid-impermeable composite hose 失效
    流体不可渗透复合软管

    公开(公告)号：US06390140B2

    公开(公告)日：2002-05-21

    申请号：US09781321

    申请日：2001-02-13

    申请人： Nobuaki Niki ,  Kunihiro Noba ,  Yuji Takagi

    发明人： Nobuaki Niki ,  Kunihiro Noba ,  Yuji Takagi

    IPC分类号： F16L1110

    CPC分类号： F16L11/085

    摘要： A fluid-impermeable composite hose has a wall including a laminated layer formed by longitudinally lapping a laminated sheet which contains a metallic foil, or a metallic layer formed by vapor deposition. The laminated layer is bound with thread wound about it at a density not exceeding 20%, and bound to an extent forming constrictions therein if required. The thread prevents the deformation in cross section of the hose and the separation of the overlapping edge portions of the laminated sheet which might otherwise be caused by the bending resistance of the laminated sheet. The constrictions improve the flexibility of the hose.

    摘要翻译： 流体不可渗透的复合软管具有壁，其包括通过纵向研磨包含金属箔的层叠片或通过气相沉积形成的金属层而形成的层叠层。 层压层以不超过20％的密度缠绕在其周围，并且如果需要则结合到其中形成收缩的程度。 螺纹防止软管的横截面变形，层压片的重叠边缘部的分离，否则可能由层压片的抗弯曲性引起。 收缩提高了软管的灵活性。