公开(公告)号：US5790503A

公开(公告)日：1998-08-04

申请号：US755405

申请日：1996-11-22

申请人： Sadao Mizuno ,  Tsuguhiro Korenaga ,  Shinji Uchida

发明人： Sadao Mizuno ,  Tsuguhiro Korenaga ,  Shinji Uchida

IPC分类号： G11B7/00 ,  G11B7/135

CPC分类号： G11B7/1395 ,  G11B7/1353 ,  G11B7/1356 ,  G11B7/1365 ,  G11B7/1374 ,  G11B7/1381 ,  G11B2007/0006 ,  G11B2007/13727

摘要： An optical head has a light source, luminous flux splitting means for splitting radiation luminous flux of linearly polarized light radiated from the light source into plural luminous fluxes, a wavelength plate for polarizing at least one of the luminous fluxes split by the luminous flux splitting means into a nearly circularly polarized light as illumination luminous flux, an objective lens for converging the illumination luminous flux on an optical information medium and collecting the reflected light, and a photo detector for receiving the reflected luminous flux, after passing through the wavelength plate and the luminous flux splitting means, wherein supposing a power efficiency when splitting the illumination luminous flux from the radiation luminous flux to be E1, a power efficiency when transmitting a polarized light component of the reflected luminous flux, the component being orthogonal to a direction of polarization of the illumination luminous flux, to the photo detector to be E2, and a power efficiency when transmitting a polarized light component of the reflected luminous flux, the component having substantially same direction as a direction of polarization of the illumination luminous flux, to the photo detector to be E3, the E2 is larger than the E1 and the E1.times.E3 is such amount that can be detected by the photo detector.

摘要翻译： 光头具有光源，用于将从光源辐射的线偏振光的辐射光束分解成多个光束的光束分离装置，用于偏振由光束分离装置分割的至少一个光束的波长板 成为近似圆偏振光作为照明光束，用于将照明光束会聚在光信息介质上并收集反射光的物镜，以及用于接收反射光束的光检测器，在经过波长板和 光束分离装置，其中当将从所述辐射光通量分离所述照明光束时的功率效率设定为E1时，将所述反射光束的偏振光分量透射时的功率效率，所述偏振光分量正交于偏振方向 照明光通量，到光电检测器 为E2，当将具有与照明光束的偏振方向大致相同的方向的反射光束的偏振光分量发送到光电检测器时的功率效率为E2，E2大于 E1和E1xE3是可以由光电检测器检测到的量。

公开(公告)号：US5410411A

公开(公告)日：1995-04-25

申请号：US3807

申请日：1993-01-13

申请人： Shinji Uchida ,  Tsuguhiro Korenaga ,  Akito Sawada ,  Hideo Kurokawa

发明人： Shinji Uchida ,  Tsuguhiro Korenaga ,  Akito Sawada ,  Hideo Kurokawa

IPC分类号： C23C14/54 ,  G01B11/06 ,  H01J37/32 ,  G01B11/02

CPC分类号： H01J37/32935 ,  C23C14/547 ,  G01B11/0683 ,  H01J2237/30455 ,  H01J2237/3132

摘要： A method of and an apparatus for forming a multi-layer film, includes: a thickness control device for controlling an optical film thickness or a thickness of each of the layers of the multi-layer film; a multi-layer film monitoring substrate on which the multi-layer film is formed; a measurement device for measuring the optical characteristics of the multi-layer film formed on the multi-layer film monitoring substrate; and a processing device which processes the results obtained by the measurement device so as to feed the processed results back to the thickness control device.

摘要翻译： 一种用于形成多层膜的方法和装置，包括：用于控制多层膜的每个层的光学膜厚度或厚度的厚度控制装置; 形成有多层膜的多层膜监视基板; 用于测量形成在所述多层膜监视基板上的多层膜的光学特性的测量装置; 以及处理装置，其处理由测量装置获得的结果，以便将处理结果送回厚度控制装置。