Deposition of silicon oxide films using alkylsilane liquid sources
    1.
    发明授权
    Deposition of silicon oxide films using alkylsilane liquid sources 失效
    使用烷基硅烷液体源沉积氧化硅膜

    公开(公告)号:US4981724A

    公开(公告)日:1991-01-01

    申请号:US263487

    申请日:1977-10-28

    IPC分类号: C23C16/40 H01L21/316

    CPC分类号: C23C16/402

    摘要: A chemical vapor deposition process for depositing silicon dioxide comprising the steps of heating a substrate upon which deposition is desired to a temperature of from about 325.degree. C. to about 700.degree. C. in a vacuum having a pressure of from about 0.1 to about 1.5 torr, and introducing a silane selected from the group consisting of alkylsilane, arylsilane and araylkylsilane wherein the alkyl-, aryl- or aralkyl- moiety comprises from 2-6 carbons, and oxygen or carbon dioxide into the vacuum.

    摘要翻译: 一种用于沉积二氧化硅的化学气相沉积方法,包括以下步骤:在约0.1至约1.5的压力的真空中将需要沉积的基底加热至约325℃至约700℃的温度 并引入选自烷基硅烷,芳基硅烷和芳烷基硅烷的硅烷,其中烷基,芳基或芳烷基部分包含2-6个碳,氧和二氧化碳进入真空。

    Method and apparatus for controlling an industrial gas plant complex

    公开(公告)号:US12105502B2

    公开(公告)日:2024-10-01

    申请号:US18103766

    申请日:2023-01-31

    IPC分类号: G05B19/4155

    摘要: There is provided a method of controlling an industrial gas plant complex comprising a plurality of industrial gas plants powered by one or more renewable power sources, the method being executed by at least one hardware processor, the method comprising receiving time-dependent predicted power data for a pre-determined future time period from the one or more renewable power sources; receiving time-dependent predicted operational characteristic data for each industrial gas plant; utilizing the predicted power data and predicted characteristic data in an optimization model to generate a set of state variables for the plurality of industrial gas plants; utilizing the generated state variables to generate a set of control set points for the plurality of industrial gas plants; and sending the control set points to a control system to control the industrial gas plant complex by adjusting one or more control set points of the industrial gas plants.

    METHOD AND APPARATUS FOR MANAGEMENT OF POWER IN AN INDUSTRIAL GAS PRODUCTION FACILITY

    公开(公告)号:US20240211980A1

    公开(公告)日:2024-06-27

    申请号:US18085675

    申请日:2022-12-21

    IPC分类号: G06Q30/0202 G06Q50/06

    CPC分类号: G06Q30/0202 G06Q50/06

    摘要: A method of managing power in a power microgrid, the method comprising: generating, by the facility controller, time-dependent predicted power demand data representative of at least a predicted power demand of the industrial gas production facility for a predetermined time period; utilizing, by the power controller, the predicted power demand data to generate control set point values for controlling a generated power output of the one or more renewable power sources and for controlling a flow of electrical power to or from the energy storage resources, the control set point values being selected to adjust the available power as a function of time for the predetermined time period to correspond to the demanded power for the predetermined time period; and sending one or more control signals comprising the control set point values to the one or more renewable power sources and to the one or more energy storage resources.

    Biogas upgrading apparatus and process

    公开(公告)号:US11998872B2

    公开(公告)日:2024-06-04

    申请号:US17498890

    申请日:2021-10-12

    发明人: Donald E. Henry

    IPC分类号: B01D53/22 C10L3/10 C12M1/00

    摘要: A biogas upgrading system can include a multiple stage membrane system that is configured to remove oxygen so that the biogas is upgraded to have a higher concentration of methane, a pre-selected oxygen (O2) concentration (e.g. less than or equal to 0.2 mol %, etc.), and a pre-selected carbon dioxide (CO2) concentration (e.g. less than or equal to 5 mol %, etc.). The membrane system can be configured to reject O2 by utilizing a low CO2/O2 selectivity that is within a pre-determined range (e.g. less than 5 or less than 4.5). In some embodiments, the upgraded biogas that is output from the system can be entirely made up of methane, carbon dioxide, and oxygen. In other embodiments, the biogas can be almost entirely composed of these components along with a small amount of nitrogen and a trace amount (e.g. less than or equal to 0.2%-0.1%, etc.) of other components.

    APPARATUS AND METHOD FOR AMMONIA WASTEWATER REDUCTION

    公开(公告)号:US20240109783A1

    公开(公告)日:2024-04-04

    申请号:US17956055

    申请日:2022-09-29

    IPC分类号: C01C1/04

    CPC分类号: C01C1/0476

    摘要: A process and apparatus for reducing wastewater generated during production of ammonia that can have different levels of production (e.g. ammonia production can vary from 10% to 100% production capacity, etc.) can be configured to minimize or eliminate wastewater from ammonia production. Embodiments can be adapted so that wastewater is stored in a vessel and providable to a scrubber used for processing an ammonia vapor containing stream so that ammonia within that stream can be recovered and mixed with other liquid ammonia product for subsequent storage or use. Embodiments can be implemented so the scrubber stream that may utilize a liquid to perform the scrubbing is recyclable in a way that minimizes or even eliminates formation of a wastewater stream, which can significantly improve process efficiency and provide improved environmental operation as compared to conventional approaches.

    SYSTEM AND METHOD FOR RECONDENSING BOIL-OFF GAS FROM A LIQUEFIED NATURAL GAS TANK

    公开(公告)号:US20240003618A1

    公开(公告)日:2024-01-04

    申请号:US18219808

    申请日:2023-07-10

    IPC分类号: F25J1/00 F25J1/02

    摘要: Systems and methods are described for increasing capacity and efficiency of a nitrogen refrigerant boil-off gas recovery system for a natural gas storage tank. Boil-off gas is condensed against two-phase nitrogen in a condensing heat exchanger having an inner vessel through which the boil-off gas flows and an outer vessel through which the two phase nitrogen flows. Logic controls maintain storage tank pressure and power consumption within preferred levels by adjusting the pressure of the two-phase nitrogen in the heat exchanger. Additional logic controls maintain the temperature difference between the nitrogen streams entering into and returning from the cold end of a second heat exchanger by controlling the position of an expansion valve on the return circuit.