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    INSPECTION APPARATUS AND INSPECTION METHOD
    3.
    发明公开
    INSPECTION APPARATUS AND INSPECTION METHOD 审中-公开

    公开(公告)号：US20230349846A1

    公开(公告)日：2023-11-02

    申请号：US18350361

    申请日：2023-07-11

    申请人： CANON ANELVA CORPORATION

    发明人： Takeo TSUKAMOTO

    IPC分类号： G01N23/223 ,  G01N23/04

    CPC分类号： G01N23/223 ,  G01N23/04

    摘要： An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane, and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector includes a long X-ray receiver.

    ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CLEANING ELECTRODE ASSEMBLY
    6.
    发明申请
    ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CLEANING ELECTRODE ASSEMBLY 有权

    公开(公告)号：US20220262598A1

    公开(公告)日：2022-08-18

    申请号：US17739830

    申请日：2022-05-09

    申请人： CANON ANELVA CORPORATION

    发明人： Yasushi Yasumatsu ,  Naoyuki Okamoto ,  Masashi Tsujiyama ,  Fumihito Suzuki

    IPC分类号： H01J37/305 ,  H01J27/02 ,  H01J37/08 ,  B08B3/08 ,  H01J37/063 ,  H01J37/317

    摘要： Provided is an ion beam processing apparatus including an ion generation chamber, a processing chamber, and electrodes to form an ion beam by extracting ions generated in the ion generation chamber to the processing chamber. The electrodes includes a first electrode disposed close to the ion generation chamber and provided with an ion passage hole to allow passage of the ions, and a second electrode disposed adjacent to the first electrode and closer to the processing chamber than the first electrode is, and provided with an ion passage hole to allow passage of the ions. The apparatus also includes a power unit which applies different electric potentials to the first electrode and the second electrode, respectively, so as to accelerate the ions generated by an ion generator in the ion generation chamber. A material of the first electrode is different from a material of the second electrode.

    Etching apparatus
    7.
    发明授权
    Etching apparatus 有权

    公开(公告)号：US11195700B2

    公开(公告)日：2021-12-07

    申请号：US14277295

    申请日：2014-05-14

    申请人： CANON ANELVA CORPORATION

    发明人： Hidekazu Suzuki ,  Masami Shibagaki ,  Atsushi Sekiguchi

    IPC分类号： H01J37/32

    摘要： An etching apparatus includes a chamber capable of being evacuated, a first electrode provided in the chamber and including a tray support portion configured to support a tray which can hold a plurality of substrates and load/unload the substrates into/from the chamber, and a voltage applying unit configured to apply a voltage to the first electrode. A dielectric plate is attached to a portion, of an obverse surface of the first electrode, which faces an outer edge portion of a non-target surface of the substrate.

    X-ray generation apparatus and X-ray imaging apparatus
    8.
    发明授权
    X-ray generation apparatus and X-ray imaging apparatus 有权

    公开(公告)号：US11140763B2

    公开(公告)日：2021-10-05

    申请号：US17194767

    申请日：2021-03-08

    申请人： Canon Anelva Corporation

    发明人： Junya Kawase

    IPC分类号： H05G1/06 ,  G01N23/04 ,  G01N23/083

    摘要： An X-ray generation apparatus includes an X-ray generation unit, a storage container configured to store the X-ray generation unit, and an insulating component arranged between an inner surface of the storage container and at least a part of the X-ray generation unit. The insulating component includes a first insulating member and a second insulating member, the first insulating member includes a first portion having a first surface, and a second portion having a second surface, a step difference is formed by the first surface and the second surface, and the second portion has a thickness smaller than that of the first portion, an adhesive surface of the second insulating member and the second surface of the first insulating member are connected by an adhesive material, and a flatness of the second surface is better than a flatness of the first surface.

    IONIZATION GAUGE AND CARTRIDGE
    9.
    发明申请
    IONIZATION GAUGE AND CARTRIDGE 有权

    公开(公告)号：US20210080336A1

    公开(公告)日：2021-03-18

    申请号：US17019419

    申请日：2020-09-14

    申请人： CANON ANELVA CORPORATION

    发明人： Yohsuke KAWASAKI

    IPC分类号： G01L21/34 ,  G01L19/06

    摘要： An ionization gauge includes an anode, a cathode, and an electromagnetic wave source. The cathode includes a first cathode plate having a through hole through which the anode passes, a storage portion configured to store the electromagnetic wave source, and a passage arranged between the storage portion and the through hole and configured to pass an electromagnetic wave generated by the electromagnetic wave source.

    X-ray generation apparatus and X-ray imaging apparatus
    10.
    发明授权
    X-ray generation apparatus and X-ray imaging apparatus 有权

    公开(公告)号：US10743396B1

    公开(公告)日：2020-08-11

    申请号：US16821495

    申请日：2020-03-17

    申请人： CANON ANELVA CORPORATION

    发明人： Junya Kawase

    IPC分类号： H01J35/16 ,  H05G1/06 ,  H05G1/32 ,  H01J35/02

    摘要： An X-ray generation apparatus includes an X-ray generation tube including a cathode having an electron emitting portion, and an anode having a target, a voltage supply supplying voltage to the X-ray generation tube via a conductive line, a storage container having a first portion forming a first space storing the voltage supply, a second portion forming a second space storing the X-ray generation tube, and a connecting portion connecting the first portion and the second portion, and an insulating liquid filling internal space of the storage container. The connecting portion includes a convex portion pointed toward the internal space. The cathode is arranged between the convex portion and the anode, and an insulating member is arranged to surround portion of the conductive line and block shortest path between the conductive line and the convex portion.