Multi-block sputtering target and associated methods and articles

    公开(公告)号:US10727032B2

    公开(公告)日:2020-07-28

    申请号:US16238844

    申请日:2019-01-03

    Abstract: A sputtering target that includes at least two consolidated blocks, each block including an alloy including molybdenum in an amount greater than about 30 percent by weight and at least one additional alloying ingredient; and a joint between the at least two consolidated blocks, the joint being free of any microstructure due to an added bonding agent (e.g., powder, foil or otherwise), and being essentially free of any visible joint line the target that is greater than about 200 μm width (e.g., less than about 50 μm width). A process for making the target includes hot isostatically pressing, below a temperature of 1080° C., consolidated perform blocks that may be surface prepared (e.g., roughened to a predetermined roughness value) prior to pressing.

    Liquid cooled glass melt electrode
    10.
    发明授权
    Liquid cooled glass melt electrode 有权
    液体冷却玻璃熔体电极

    公开(公告)号:US09521706B2

    公开(公告)日:2016-12-13

    申请号:US14259800

    申请日:2014-04-23

    CPC classification number: H05B3/03 C03B5/027

    Abstract: In various embodiments, an electrode has a shaft extending from an electrode head and a cooling passage extending from an open end disposed at an attachment end of the shaft to a closed end disposed within the electrode head. The electrode head has an approximately teardrop shape with a smoothly rounded outer contour.

    Abstract translation: 在各种实施例中,电极具有从电极头延伸的轴和从设置在轴的附接端处的开放端延伸到设置在电极头内的封闭端的冷却通道。 电极头具有大致泪珠形状,具有平滑的圆形外轮廓。

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