公开(公告)号：US08422132B2

公开(公告)日：2013-04-16

申请号：US12629644

申请日：2009-12-02

Applicant: Herb He Huang

Inventor： Herb He Huang

IPC: G02B5/30

CPC classification number: G02B5/3058 ,  H04N9/3167

Abstract: The embodiments of the present invention provide an integrated planar polarizing device and methods of fabrication. The device, in the order of incidence along an optical path of an incident light beam from back position to front position, comprises a planar array of micro mirrors, a quarter wave retarder film and a reflective polarization plate. The micro mirrors are regularly spaced-apart in an identical tilted angle α relative to a base plane. The quarter wave retarder film is positioned between the micro mirrors and the reflective polarization plate. The reflective polarization plate is in parallel to the base plane and is adapted to transmit and polarize a first polarized light of the incident light beam in a first polarization state, and to reflect and polarize a second polarized light of the incident light beam in a second polarization, The micro mirrors are adapted to reflect the second polarized light passing and polarized through the quarter wave retarder film first time to pass and be polarized through the quarter wave retarder film second time, thereby converting the second polarized light to be a third polarized light in the first polarization state which can transmit the reflective polarization plate. The planar array of micro mirrors, the quarter wave retarder film and the reflective polarization plate are embedded in a transparent medium. The embodiments of the present invention could improve in device integration and simplification in assembly robustness.

Abstract translation: 本发明的实施例提供一种集成的平面偏振装置和制造方法。 该装置沿着从后方位置到前方位置的入射光束的光路的入射顺序包括微镜的平面阵列，四分之一波长延迟膜和反射偏振板。 微反射镜相对于基面以相同的倾斜角α规则地间隔开。 四分之一波长延迟膜位于微反射镜和反射偏振板之间。 所述反射偏振板与所述基底平面平行，并且适于以第一偏振状态透射和偏振入射光束的第一偏振光，并且在第二偏振态中反射和偏振入射光束的第二偏振光 微反射镜适于反射经过四分之一波长延迟器膜的第二偏振光通过第二偏振光并通过四分之一波长延迟片二次偏振，从而将第二偏振光转换为第三偏振光 在可以透射反射偏振板的第一偏振状态下。 微镜的平面阵列，四分之一波长延迟膜和反射偏振板嵌入透明介质中。 本发明的实施例可以在设备集成和组装鲁棒性的简化方面得到改善。

公开(公告)号：US08220930B2

公开(公告)日：2012-07-17

申请号：US12411308

申请日：2009-03-25

Applicant: Deming Tang

Inventor： Deming Tang

IPC: G03B21/14 ,  H01J40/14 ,  G02F1/01 ,  H01L31/00

CPC classification number: G01J1/32 ,  G01J1/04 ,  G01J1/0414 ,  G01J1/42 ,  G02F1/136277 ,  G03B21/14 ,  G03B21/2066 ,  G03B21/2073

Abstract: An integrated opto-electronic device, a portable reflective projection system and a method for in situ monitoring and adjusting light illumination are provided. The device includes a reflective polarizing composite film (150) configured to receive a source light (210) at a desired non-normal incident angle (221), polarizes and reflects a first portion (211) of said source light (210) as polarized illumination light (16) at a reciprocal angle (222) to said desired non-normal incident angle (221); and a photovoltaic cell (180), adhered to an opposite side of said reflective polarizing composite film (150) to said source light (210), configured to receive a second portion (212) of said source light (210) that passes through said reflective polarizing composite film (150) and transform said second portion (212) to photogenerated charge. Unused illumination can be collected in order to re-store and reuse recovered energy.

Abstract translation: 提供集成光电装置，便携式反射投影系统和用于原位监测和调节光照的方法。 该装置包括被配置为以期望的非正常入射角（221）接收源光（210）的反射偏振复合膜（150），偏振并将所述源光（210）的第一部分（211）反射为偏振 照明光（16）以相对的角度（222）延伸到所述期望的非正常入射角（221）; 以及光电池（180），其粘附到所述反射型偏振复合膜（150）与所述源光（210）的相对侧，被配置为接收穿过所述源光（210）的所述源光（210）的第二部分（212） 反射偏振光复合膜（150），并将所述第二部分（212）转换成光生电荷。 可以收集未使用的照明，以便重新储存和重新利用回收的能量。

公开(公告)号：US08854720B2

公开(公告)日：2014-10-07

申请号：US13540356

申请日：2012-07-02

Applicant: Herb He Huang

Inventor： Herb He Huang

IPC: G02B26/00 ,  G02B27/42 ,  G02B5/18 ,  G09G5/00 ,  G02B26/08 ,  G02F1/21

CPC classification number: G02B26/0808 ,  G02F1/21

Abstract: The present invention relates to a tri wavelength diffraction modulator (TWDM) and a method of tri wavelength diffraction modulation. The tri wavelength diffraction modulator includes: a stationary substrate with a bottom electrode plate formed on top of the stationary substrate; a first electrode plate comprising a first suspended beam suspended in parallel above the stationary substrate and a first connection anchored onto the stationary substrate; and a second electrode plate comprising a second suspended beam suspended in parallel above the first electrode plate and a second connection anchored onto the stationary substrate. The diffraction modulator and the method for diffraction modulation are suitable to projection system.

Abstract translation: 本发明涉及三波长衍射调制器（TWDM）和三波长衍射调制方法。 三波长衍射调制器包括：固定基板，其具有形成在固定基板的顶部上的底部电极板; 第一电极板，包括平行地悬挂在固定基板上的第一悬挂梁和锚固在固定基板上的第一连接件; 以及第二电极板，包括平行地悬挂在第一电极板上方的第二悬挂梁和锚固在固定基板上的第二连接件。 衍射调制器和衍射调制方法适用于投影系统。

公开(公告)号：US08507385B2

公开(公告)日：2013-08-13

申请号：US12435835

申请日：2009-05-05

Applicant: Deming Tang

Inventor： Deming Tang

IPC: H01L21/311

CPC classification number: B81C1/0015

Abstract: A method for processing a thin film micro device on a substrate includes: 1) depositing a carbon film on the substrate as a sacrificial layer; 2) photolithographically defining a first predetermined pattern in the carbon film; 3) etching an unwanted portion of the carbon film outside the first predetermined pattern; 4) depositing a structural film including a single or multiple layers of solid state materials; 5) photolithographically defining a second predetermined pattern in the structural film; 6) etching the discarded portion of the structural film outside the second predetermined pattern; 7) selectively removing the remaining portion of the sacrificial carbon film by using a selective etch process gas in a reactor chamber, so that the overlapped portion of the remaining structural element with the first predetermined pattern is suspended above an underneath cavity above the substrate.

Abstract translation: 一种在衬底上处理薄膜微器件的方法包括：1）在衬底上沉积碳膜作为牺牲层; 2）光刻地限定碳膜中的第一预定图案; 3）在第一预定图案之外蚀刻碳膜的不想要的部分; 4）沉积包括单层或多层固态材料的结构膜; 5）光刻地限定结构膜中的第二预定图案; 6）在第二预定图案之外蚀刻结构膜的废弃部分; 7）通过在反应器室中使用选择性蚀刻工艺气体来选择性地去除牺牲碳膜的剩余部分，使得具有第一预定图案的剩余结构元件的重叠部分悬浮在衬底上方的下方空腔的上方。

公开(公告)号：US08467128B2

公开(公告)日：2013-06-18

申请号：US12622382

申请日：2009-11-19

Applicant: Herb He Huang

Inventor： Herb He Huang

IPC: G02B5/30

CPC classification number: G02B5/3058 ,  G02B27/283

Abstract: A polarizing cube includes a pair of identical and symmetric triangular prisms which sandwich a thin optical composite plate containing a planner array of reflective straight wires spaced apart in parallel as a built-in wire grid polarizer. All of its subcomponents and the polarizing cube itself are physically and optically symmetrical to one of its diagonal planes so as to provide improved integration and robustness for projection display application. The cubic configuration of the disclosed polarizer can be readily produced through common means and sequences typically used in semiconductor wafer fabrication processes, including photolithographic patterning, gap dielectric filling and planarization, and wafer thinning, bonding and cutting among others.

Abstract translation: 偏振立方体包括一对相同和对称的三角形棱镜，其夹持包含平行间隔开的​​反射直线的计划器阵列作为内置线栅偏振器的薄光学复合板。 其所有子部件和偏振立方体本身都与其对角平面之一物理和光学对称，从而为投影显示应用提供改进的集成度和鲁棒性。 所公开的偏振器的立方体结构可以通过通常用于半导体晶片制造工艺中的常用手段和序列容易地产生，包括光刻图案，间隙介电填充和平面化，以及晶片间隔，结合和切割等。

公开(公告)号：US08460962B2

公开(公告)日：2013-06-11

申请号：US12813832

申请日：2010-06-11

Applicant: Herb He Huang

Inventor： Herb He Huang

IPC: B81C1/00 ,  B81B3/00

CPC classification number: H01H59/0009 ,  B81B2201/014 ,  B81C1/00246 ,  B81C2203/0714 ,  H01H1/0036

Abstract: The present invention discloses a capacitive MEMS switch on top of a semiconductor substrate containing a CMOS driving circuitry. The capacitive MEMS switch disclosed includes: 1) a semiconductor substrate containing a driving circuitry inside, and first and second conductors as well as a bottom electrode on top; 2) a suspended composite beam above and anchored onto the semiconductor substrate, containing a top electrode aligned to the bottom electrode with a first vertical distance, a top conductor, capped by a dielectric layer, having a first and second contact tips aligned with the first and second bottom conductors with a second vertical distance differentially smaller than the first vertical distance. The electrostatic attraction generated between the top electrode and the bottom electrode pulls the first and second contact tips in physical contact with and electrically connects the first and second bottom conductors through the top conductor.

Abstract translation: 本发明公开了一种在包含CMOS驱动电路的半导体衬底之上的电容MEMS开关。 所公开的电容MEMS开关包括：1）在其内部包含驱动电路的半导体衬底，以及顶部的第一和第二导体以及底部电极; 2）在半导体衬底之上并锚固在半导体衬底上的悬挂复合梁，其包含具有第一垂直距离的与底部电极对准的顶部电极，由电介质层封盖的顶部导体，具有与第一垂直距离对准的第一和第二接触尖端 以及具有小于第一垂直距离的第二垂直距离的第二底部导体。 在顶部电极和底部电极之间产生的静电吸引力拉动第一和第二接触尖端物理接触并通过顶部导体电连接第一和第二底部导体。

公开(公告)号：US08228467B2

公开(公告)日：2012-07-24

申请号：US12830623

申请日：2010-07-06

Applicant: Herb He Huang

Inventor： Herb He Huang

IPC: G02F1/1343

CPC classification number: G02F1/133514 ,  G02F1/133553 ,  G02F1/136277 ,  G02F2001/133521

Abstract: A reflective color filter liquid crystal display, in the reverse order of receiving incident light, includes a backplane substrate, a reflective electrode layer, a planar liquid crystal cell, a transparent protective dielectric layer and a transparent plate. The transparent plate is adapted for receiving and transmitting the incident light. The planar liquid crystal cell is sandwiched between the reflective electrode layer and the transparent conductive film. The reflective electrode layer further includes a first band reflective electrode, a second band reflective electrode and a third band reflective electrode in a regularly tiled planar arrangement.

Abstract translation: 反射滤色器液晶显示器以与接收入射光相反的顺序包括背板基板，反射电极层，平面液晶单元，透明保护介电层和透明板。 透明板适于接收和透射入射光。 平面液晶单元夹在反射电极层和透明导电膜之间。 反射电极层还包括第一带状反射电极，第二带状反射电极和以规则平铺的平面布置的第三带状反射电极。

公开(公告)号：US08125271B2

公开(公告)日：2012-02-28

申请号：US12821968

申请日：2010-06-23

Applicant: Lei Zhang ,  Herb He Huang

Inventor： Lei Zhang ,  Herb He Huang

IPC: H03F3/217

CPC classification number: H03F3/2173 ,  H01H59/0009 ,  H03F21/00 ,  H03F2200/03 ,  H03F2200/351

Abstract: A power amplifier and a bridge circuit in a power amplifier, thereinto, the power amplifier includes a comparator, a bridge circuit and a low-pass filter. The comparator is adapted to receive a first analog signal, compare the first analog signal with a reference signal and output a square wave signal. The bridge circuit is adapted to amplify the square wave signal and output the amplified square wave signal. The low-pass filter is adapted to convert the amplified square wave signal into a second analog signal. The bridge circuit includes a first MEMS switch and a second MEMS switch. The first MEMS switch and the second MEMS switch turn on alternately when the polarity of the square wave changes, and output a first voltage signal or a second voltage signal respectively. The amplified square wave signal includes the first voltage signal and the second voltage signal output alternately. The present disclosure substitutes the MOS transistors in prior art with surface MEMS switches, so the power consumption, the size of devices and the manufacture costs all can be reduced.

Abstract translation: 功率放大器和功率放大器中的桥式电路，功率放大器包括比较器，桥式电路和低通滤波器。 比较器适于接收第一模拟信号，将第一模拟信号与参考信号进行比较并输出方波信号。 桥电路适用于放大方波信号并输出​​放大的方波信号。 低通滤波器适于将放大的方波信号转换为第二模拟信号。 桥接电路包括第一MEMS开关和第二MEMS开关。 当方波的极性发生变化时，第一MEMS开关和第二MEMS开关交替接通，分别输出第一电压信号或第二电压信号。 放大的方波信号交替地包括第一电压信号和第二电压信号。 本公开将现有技术中的MOS晶体管代替表面MEMS开关，因此可以降低功耗，器件尺寸和制造成本。

公开(公告)号：US08498039B2

公开(公告)日：2013-07-30

申请号：US12965009

申请日：2010-12-10

Applicant: Herb He Huang

Inventor： Herb He Huang

IPC: G02B26/00 ,  G02B26/08

CPC classification number: G02B26/001 ,  G02B26/0816 ,  G02B26/0841

Abstract: The present invention relates to a tri wavelength interference modulator (TWIM) and a method of tri wavelength interference modulation. The tri wavelength interference modulator includes: a stationary substrate with a bottom electrode plate formed on top of the stationary substrate; a first electrode plate comprising a first suspended beam suspended in parallel above the stationary substrate and a first connection electrically connected onto the stationary substrate; and a second electrode plate comprising a second suspended beam suspended in parallel above the first electrode plate and a second connection electrically connected onto the stationary substrate. The inference modulator and the method for inference modulation are suitable to projection system.

Abstract translation: 本发明涉及三波长干扰调制器（TWIM）和三波长干扰调制方法。 三波长干涉调制器包括：固定基板，其具有形成在固定基板上的底电极板; 第一电极板，包括平行地悬挂在固定基板上的第一悬挂梁和电连接到固定基板上的第一连接; 以及第二电极板，包括平行地悬挂在第一电极板上方的第二悬挂梁和电连接到固定基板上的第二连接。 推理调制器和推理调制方法适用于投影系统。

公开(公告)号：US08389317B2

公开(公告)日：2013-03-05

申请号：US12788622

申请日：2010-05-27

Applicant: Herb He Huang

Inventor： Herb He Huang

IPC: H01L21/00

CPC classification number: B81C1/00246 ,  B81B2203/0118 ,  B81B2203/0307 ,  B81C1/0015 ,  B81C2203/0735

Abstract: A micro electrical-mechanical system (MEMS) device comprises a suspended thin film microstructure which includes an anchoring portion adhered to the top surface of the substrate and a suspended portion above the top surface of the substrate. Having a base plane configured in parallel to the substrate, the suspended portion further includes a first recess portion spaced at a first vertical clearance with the substrate, the first vertical clearance being configured differentially smaller than a base clearance of the suspended portion outside the first recess portion. The method for processing a MEMS device includes: depositing a first carbon film, etch-removing a first sacrificial pre-removal portion and an anchor portion of the first carbon film, depositing a second carbon film conformally topping the first carbon film and the substrate, etch-removing the anchor portion of the second carbon film, depositing and patterning the suspended thin film microstructure onto the first carbon film, the second carbon film and the substrate, removing the first carbon film and the second carbon film to release the suspended thin film microstructure above the substrate by selective gaseous oxidation or nitridation preferably enhanced via plasma.

Abstract translation: 微机电系统（MEMS）装置包括悬浮的薄膜微结构，其包括粘附到基板的顶表面的锚定部分和在基板顶表面上方的悬挂部分。 具有与基板平行配置的基面平面，所述悬挂部分还包括与所述基板隔开的第一垂直间隙的第一凹陷部分，所述第一垂直间隙被构造成小于所述第一凹部外部的所述悬挂部分的基座间隙 一部分。 用于处理MEMS器件的方法包括：沉积第一碳膜，蚀刻去除第一碳膜的第一牺牲预除去部分和锚固部分，沉积保形地顶起第一碳膜和基底的第二碳膜， 蚀刻去除第二碳膜的锚固部分，将悬浮的薄膜微结构沉积并图案化到第一碳膜，第二碳膜和基板上，去除第一碳膜和第二碳膜以释放悬浮薄膜 优选通过等离子体增强通过选择性气体氧化或氮化的衬底上的微结构。