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公开(公告)号：US12128150B2
公开(公告)日：2024-10-29
申请号：US17764078
申请日：2020-10-05
发明人： Hideaki Yagyu
IPC分类号： A61L2/10
CPC分类号： A61L2/10 , A61L2202/11
摘要： Provided is a compact ultraviolet irradiation device in which a degree of an adverse effect on the human body is suppressed. The ultraviolet irradiation device includes: a lamp house on the surface of which a light extraction surface is formed; an excimer lamp accommodated in the lamp house, a main emission wavelength of which belongs to a first wavelength band of 190-225 nm; an optical filter that is arranged on the light extraction surface and substantially transmits the ultraviolet light in the first wavelength band and substantially reflect the ultraviolet light of a wavelength of 240-300 nm; and a reflecting surface that is a surface located outside the luminous tube of the excimer lamp and inclined with respect to the light extraction surface, the reflecting surface exhibiting reflectivity with respect to the ultraviolet light in the first wavelength band.
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公开(公告)号：US20240332045A1
公开(公告)日：2024-10-03
申请号：US18622319
申请日：2024-03-29
CPC分类号： H01L21/67115 , H01L33/0095
摘要： Provided is an optical heating apparatus that allows high flexibility in setting an in-plane heating condition for a processing target substrate. The optical heating apparatus includes: a chamber; a supporter to support the processing target substrate; a light source unit including a plurality of heating groups being configured to emit light; and a controller to control electricity supplied to each of the plurality of the heating groups. One of the processing target substrate and the light source unit is configured to rotate relative to an other on a rotation axis. The plurality of the heating groups each include a plurality of light sources, and a nth and (n+1)th circular rotation loci partially overlap each other. The nth and (n+1)th circular rotation loci are drawn by virtual rotation of the light emission region of each light source belonging to a nth and (n+1)th heating group around the rotation axis.
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公开(公告)号：US12103246B2
公开(公告)日：2024-10-01
申请号：US15814267
申请日：2017-11-15
IPC分类号： B29C65/74 , B29C35/08 , B29C59/14 , B29C59/16 , B29C65/00 , B29C65/02 , B29C65/14 , B29L11/00 , B29L31/00 , B81C3/00 , C09J5/02 , H01L21/18 , H01L21/20 , H01L21/67
CPC分类号： B29C65/7415 , B29C59/14 , B29C59/16 , B29C65/1406 , B29C65/1432 , B29C66/028 , B29C66/1122 , B29C66/53461 , B29C66/54 , B29C66/83221 , B81C3/001 , C09J5/02 , H01L21/187 , H01L21/2007 , H01L21/67005 , B29C2035/0827 , B29C65/02 , B29C66/232 , B29C66/30223 , B29C66/534 , B29C66/71 , B29C66/712 , B29C66/73366 , B29C66/7465 , B29C66/919 , B29C66/92445 , B29C66/929 , B29C66/949 , B29L2011/00 , B29L2011/0016 , B29L2031/756 , C09J2400/143 , C09J2400/146 , C09J2400/163 , C09J2400/166 , B29C66/71 , B29K2083/00 , B29C66/71 , B29K2023/38 , B29C66/71 , B29K2069/00 , B29C66/71 , B29K2025/06
摘要： Disclosed herein is a method of bonding substrates, a microchip, and a method of manufacturing the microchip capable of joining two substrates in a higher adhered state even when at least one of the substrate has a warpage or a roll. A method of bonding a first substrate and a second substrate each of which is made of glass or a resin comprises: a surface activating step for activating each of joining surfaces of the first substrate and the second substrate; and a pressurizing step for pressurizing the first substrate and the second substrate in a state that the first substrate and the second substrate are stacked such that respective joining surfaces contact each other. The joining surface of the first substrate and/or the joining surface of the second substrate are constituted with a plurality of joining regions segmented to be separate from one another by a segmenting recessed portion.
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公开(公告)号：US12064525B2
公开(公告)日：2024-08-20
申请号：US17827595
申请日：2022-05-27
发明人： Tatsushi Igarashi
CPC分类号： A61L2/0047 , A47K10/48 , A61L2/26 , A61L2202/11 , A61L2202/14
摘要： A sterilizing device includes a housing having an opening in at least one direction thereof. The housing also has a hollow portion configured to allow insertion of an object (target) including part of a human body from the opening into the hollow portion. The sterilizing device also includes at least one air blower unit configured to send a flow of air toward an interior of the hollow portion, and at least one ultraviolet light emitting unit configured to emit ultraviolet light toward the interior of the hollow portion. The ultraviolet light emitted from each ultraviolet light emitting unit includes at least part of ultraviolet light having a wavelength between 190 nm and 230 nm and at least part of ultraviolet light having a wavelength between 230 nm and 237 nm, but does not include ultraviolet light having a wavelength below 190 nm and beyond 237 nm.
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公开(公告)号：US20240241457A1
公开(公告)日：2024-07-18
申请号：US18393599
申请日：2023-12-21
发明人： Naoya SOHARA
CPC分类号： G03F9/7088 , G03F7/70175 , G03F7/70191
摘要： A detection apparatus includes: an alignment microscope that captures an image of a mask mark and an image of a workpiece mark; and a position detector that detects a position of the mask mark and a position of the workpiece mark on the basis of those images. The alignment microscope includes an imaging unit, a beam splitter that splits each of the first light and the second light, and one or more aberration correction lenses. The beam splitter includes first and second members connected to each other with a light-splitting surface being sandwiched therebetween. All of first and second incident surfaces and emission surfaces are configured to have different surface directions with respect to the light-splitting surface. The one or more aberration correction lenses includes a first aberration correction lens disposed in a first optical path and a second aberration correction lens disposed in a second optical path.
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6.发明公开公开(公告)号：US20240207470A1
公开(公告)日：2024-06-27
申请号：US18557811
申请日：2022-03-04
发明人： Kyosuke FUJINA
CPC分类号： A61L2/10 , A61L9/20 , A61L2202/11
摘要： Provided are an ultraviolet irradiation device that can effectively inactivate pathogens while ensuring safety for a human body, a method for using the irradiation device, and the ultraviolet irradiation method. The ultraviolet irradiation device according to the present invention includes: a light source that emits ultraviolet light having a main emission wavelength belonging to a range from 190 nm to 240 nm; a housing that accommodates the light source; an extraction part that extracts the ultraviolet light emitted from the light source to the outside of the housing; and a diverging optical system that enlarges a light distribution angle of the ultraviolet light passing through the extraction part.
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公开(公告)号：US20240203725A1
公开(公告)日：2024-06-20
申请号：US18555367
申请日：2022-04-15
发明人： Akihiro KUNO , Hideaki YAGYU , Shigeki FUJISAWA
摘要： The startability of an ultraviolet ray generation device including an excimer lamp as an ultraviolet light source is to be improved. An ultraviolet ray generation device includes: an excimer lamp having a discharge container in which a discharge gas is sealed; a first electrode body and a second electrode body that are disposed so as not to be exposed to the discharge gas; and a first conductor electrically connected to one of the first electrode body and the second electrode body. The first conductor faces the other electrode body or a second conductor electrically connected to the other electrode body, through a dielectric member. The first conductor causes an atmospheric discharge around the first conductor.
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8.发明公开公开(公告)号：US20240176246A1
公开(公告)日：2024-05-30
申请号：US18519917
申请日：2023-11-27
发明人： Osamu OSAWA , Koichi ITO
CPC分类号： G03F7/70066 , G01J1/42 , G02B5/20
摘要： An illumination optical system that irradiates a target object with light from a light source unit includes an integrator optical system, a condenser lens, and a bandpass filter. The integrator optical system is disposed on an optical path of the light emitted from the light source unit and uniformizes an illuminance distribution of the light with which the target object is to be irradiated. The condenser lens includes a plurality of lenses and irradiates the target object with the light emitted from the integrator optical system. The bandpass filter is disposed between any two of the plurality of lenses included in the condenser lens.
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公开(公告)号：US11971163B2
公开(公告)日：2024-04-30
申请号：US18230084
申请日：2023-08-03
发明人： Takeo Matsushima
IPC分类号： F21V5/00 , F21V14/06 , F21V17/02 , F21Y105/18 , F21Y115/10
CPC分类号： F21V5/008 , F21V14/06 , F21V17/02 , F21Y2105/18 , F21Y2115/10
摘要： A light source device includes a plurality of LED elements dispersed and arranged in a plane direction orthogonal to an optical axis, a first optical system that converts light emitted from each of the LED elements into collimated light; and a second optical system that focuses the collimated light. The first optical system includes a first collimating optical system including optical components disposed corresponding to the LED elements and a second collimating optical system including optical components disposed corresponding to the LED elements at the latter stage of the first collimating optical system. The second collimating optical system is capable of adjusting a relative optical positional relation with respect to the LED elements and the first collimating optical system when viewed in a direction of the optical axis in a state in which the LED elements and the first collimating optical system are fixed.
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公开(公告)号：US11970681B2
公开(公告)日：2024-04-30
申请号：US17261466
申请日：2019-07-02
发明人： Daisuke Nomoto , Makoto Yamanaka
CPC分类号： C12M23/16 , B81B1/006 , B81C99/007 , C12M23/12 , C12M23/50 , B81B2201/05 , B81B2203/0338
摘要： To provide a plate with which, although the plate has a plurality of microchannels or a microchannel in which a plurality of branch channels are formed, when a sample flowing through a microchannel is observed by a microscope, it is possible to easily identify the position of the microchannel or the branch channel under observation without reducing the magnification of the microscope.
A plate having a microchannel therein includes an identification mark for identifying a position of the microchannel in a plane direction of the plate. When the microchannel includes a plurality of mutually independent microchannels, the identification mark is preferably formed for each microchannel. When the microchannel includes a source channel communicating with an injection port through which a sample is injected and a plurality of branch channels communicating with the source channel, the identification mark is preferably formed for each of the source channel and the branch channels.
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