公开(公告)号：US12117736B2

公开(公告)日：2024-10-15

申请号：US17621472

申请日：2020-06-05

申请人： ASML Netherlands B.V.

发明人： Marcus Adrianus Van De Kerkhof ,  Satish Achanta ,  Johannes Hubertus Josephina Moors ,  Vadim Yevgenyevich Banine ,  Stef Marten Johan Janssens ,  Andrey Nikipelov

IPC分类号： G03F7/00 ,  G03F1/82 ,  H01L21/683 ,  H01L21/687

CPC分类号： G03F7/707 ,  G03F1/82 ,  H01L21/6831 ,  H01L21/68721

摘要： A lithographic apparatus comprising: a clamping surface for supporting a substrate, wherein a property of the clamping surface is defined by at least one clamping surface parameter, and wherein the property of the clamping surface has been selected to exhibit low wear; a clamping apparatus for actuating a clamping operation between the clamping surface and the substrate, wherein the clamping operation is defined at least in part by at least one interface characteristic between the clamping surface and the substrate; and a processing station, operable to apply an adjustment to a first property of the substrate to optimize at least one interface characteristic of a particular clamping operation in dependence on the clamping surface parameter and at least one substrate surface parameter which defines a second property of the substrate.

公开(公告)号：US12000583B2

公开(公告)日：2024-06-04

申请号：US17442249

申请日：2020-03-26

申请人： CoeLux S.r.l.

发明人： Matteo Molteni ,  Paolo Ragazzi ,  Antonio Lotti ,  Davide Magatti

IPC分类号： F21V9/02 ,  F21V3/04 ,  F21V5/00 ,  F21V11/06 ,  G02B27/30 ,  F21Y105/10 ,  F21Y115/10

CPC分类号： F21V9/02 ,  F21V3/049 ,  F21V5/004 ,  F21V11/06 ,  G02B27/30 ,  F21Y2105/10 ,  F21Y2115/10

摘要： A direct-light generator includes an optical unit positioned downstream of an output surface of a collimated light source and upstream from a first emitting surface with respect to a direct light direction. The optical unit includes a first planar light mixing element characterized by a first response function having a first angular profile with a peak having a first divergence angle, and a second planar light mixing element characterized by a second response function having a second angular profile with a peak having a second divergence angle. The first planar light mixing element at least partially intercepts collimated light exiting the output surface of the collimated light source and defines a unit input surface. The second planar light mixing element is positioned downstream of the unit input surface to at least partially intercept light crossing the unit input surface and to define a unit emitting surface.

公开(公告)号：US11992784B2

公开(公告)日：2024-05-28

申请号：US17437623

申请日：2020-03-18

申请人： Hasbro, Inc.

发明人： Katherine Alexandra Fakonas

IPC分类号： A63H33/00 ,  A63H33/22

CPC分类号： A63H33/001

摘要： A toy set includes a first canister configured to hold a first amount of moldable material; a second canister configured to hold a second amount of moldable material; one or more pre-formed design elements; and a storage apparatus configured to hold the first canister and the second canister, the storage apparatus including: a first storage component including a structure that defines an opening that extends in a first direction, the structure being configured to hold one of the at least one pre-formed design elements or the first canister in the opening; and a second storage component including a base portion that extends along a second direction that is different from the first direction, the base portion including an interface configured to hold the second canister.

公开(公告)号：US11843331B2

公开(公告)日：2023-12-12

申请号：US17887859

申请日：2022-08-15

申请人： Eaton Intelligent Power Limited

发明人： Yaojin Mo ,  Huaqiang Li ,  Jimmy Qi ,  Tony Zhao ,  Hao Cai

IPC分类号： H02P21/22 ,  H02P21/32 ,  H02P25/03 ,  H02P21/18 ,  H02P6/18

CPC分类号： H02P21/32 ,  H02P6/183 ,  H02P21/18 ,  H02P21/22 ,  H02P25/03 ,  H02P2203/11

摘要： A system for determining an initial angular position of a rotor of a synchronous machine includes a motor driver module configured to provide a motor driver voltage signal to the synchronous machine, the motor driver voltage signal being sufficient to induce an electrical current in the synchronous machine; and a rotor position determination module configured to receive an indication of the current generated in the machine and to determine the initial position of the rotor based on the indication of the current generated in the machine.

公开(公告)号：US11803126B2

公开(公告)日：2023-10-31

申请号：US17627844

申请日：2020-06-25

申请人： Cymer, LLC

发明人： Kuo-Tai Teng ,  Rahul Ahlawat

IPC分类号： G03F7/20 ,  G03F7/00 ,  H01S3/08 ,  H01S3/10

CPC分类号： G03F7/70025 ,  G03F7/70575 ,  H01S3/08004 ,  H01S3/10046

摘要： A radiation system for controlling pulses of radiation comprising an optical element configured to interact with the pulses of radiation to control a characteristic of the pulses of radiation, an actuator configured to actuate the optical element according to a control signal received from a controller, the control signal at least partially depending on a reference pulse repetition rate of the radiation system and, a processor configured to receive pulse information from the controller and use the pulse information to determine an adjustment to the control signal. The radiation system may be used to improve an accuracy of a lithographic apparatus operating in a multi-focal imaging mode.

公开(公告)号：US11769982B2

公开(公告)日：2023-09-26

申请号：US17064331

申请日：2020-10-06

申请人： Cymer, LLC

发明人： Tanuj Aggarwal

IPC分类号： H01S3/10 ,  H01S3/13 ,  G03F7/00 ,  H01S3/00 ,  H01S3/225 ,  H01S3/134 ,  H01S3/23

CPC分类号： H01S3/10046 ,  G03F7/70025 ,  G03F7/70575 ,  H01S3/0014 ,  H01S3/10069 ,  H01S3/134 ,  H01S3/1305 ,  H01S3/225 ,  H01S3/2308

摘要： Methods and apparatus for controlling laser firing timing and hence bandwidth in a laser capable of operating at any one of multiple repetition rates.

公开(公告)号：US11762038B2

公开(公告)日：2023-09-19

申请号：US17484262

申请日：2021-09-24

申请人： Eaton Intelligent Power Limited

发明人： Santosh Kumar Sharma ,  Abhilash Pani ,  Steven Andrew Dimino ,  Mark Alan Verheyen

IPC分类号： G01R31/52 ,  G01R31/34 ,  G01R31/72 ,  G01R31/42

CPC分类号： G01R31/52 ,  G01R31/34 ,  G01R31/346 ,  G01R31/42 ,  G01R31/72

摘要： A system and method for detecting a phase-to-ground fault in an AC electrical machine operates to receive measurements of three-phase voltages and currents provided to the AC electrical machine, compute at least one of a zero sequence component and a negative sequence component of voltage and current from the three-phase voltages and currents, and calculate a fault severity index (FSI) based on the zero or negative sequence component of voltage and current, so as to identify a phase-to-ground fault in the AC electrical machine. Calculating the FSI further includes determining a total value of the zero or negative sequence current, determining a noise-contributed value of the zero or negative sequence current included in the total value, determining a compensated value of the zero or negative sequence current based on the total value and the noise-contributed value, and calculating the FSI based on the compensated value.

公开(公告)号：US11588315B2

公开(公告)日：2023-02-21

申请号：US17745146

申请日：2022-05-16

申请人： Eaton Intelligent Power Limited

发明人： Darrell Dean Brown ,  Daniel Rian Kletti ,  Timothy Mark Kromrey ,  Glen Connor Spence

IPC分类号： H02H3/05 ,  H01H33/666 ,  H02J13/00 ,  H02J9/06 ,  H01H33/02 ,  H01H71/12

摘要： A system includes an electrical apparatus configured to monitor or control one or more aspects of an electrical power distribution network; and a control system including more than one electronic processor, where the electronic processors are configured to cause the control system to interact with the electrical apparatus, an interaction between the control system and the electrical apparatus including one or more of the control system providing information to the electrical apparatus and the control system receiving information from the electrical apparatus, and if some of the electronic processors are unable to cause the control system to interact with the electrical apparatus, at least one of the other electronic processors is able to cause the control system to interact with the apparatus.

公开(公告)号：US11418141B2

公开(公告)日：2022-08-16

申请号：US17004410

申请日：2020-08-27

申请人： Eaton Intelligent Power Limited

发明人： Adam Krug ,  Huaqiang Li

IPC分类号： H02P27/08 ,  H02P29/50

摘要： A motor driver apparatus includes: a converter including a first electrical network configured to convert AC electrical power into DC electrical power, the first electrical network including at least one electronic element that includes a wide bandgap semiconductor material; and an inverter electrically connected to the converter, the inverter including a second electrical network configured to generate an AC motor power signal from the DC electrical power, the second electrical network includes a plurality of electronic elements that include a semiconductor material that is not a wide bandgap semiconductor material.

公开(公告)号：US11317501B2

公开(公告)日：2022-04-26

申请号：US16572131

申请日：2019-09-16

申请人： ASML Netherlands B.V.

发明人： Georgiy Vaschenko ,  Peter Baumgart ,  Chirag Rajyaguru ,  Benjamin Sams ,  Armin Ridinger ,  Janine Kardokus

IPC分类号： H05G2/00 ,  C22B9/04 ,  F27B17/02 ,  C22B25/08 ,  F27B17/00

摘要： A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.