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    Semiconductor device
    1.
    发明授权
    Semiconductor device 有权
    半导体器件

    公开(公告)号：US08809939B2

    公开(公告)日：2014-08-19

    申请号：US12532302

    申请日：2008-03-27

    申请人： Akihito Tanabe

    发明人： Akihito Tanabe

    IPC分类号： H01L29/78

    CPC分类号： H01L29/7833 ,  H01L29/1054 ,  H01L29/66545 ,  H01L29/66613

    摘要： To suppress short channel effects and obtain a high driving current by means of a semiconductor device having an MISFET wherein a material having high mobility and high dielectric constant, such as germanium, is used for a channel. A p-type well is formed on a surface of a p-type silicon substrate. A silicon germanium layer having a dielectric constant higher than that of the p-type silicon substrate is formed to have a thickness of 30 nm or less on the p-type well. Then, on the silicon germanium layer, a germanium layer having a dielectric constant higher than that of the silicon germanium layer is formed to have a thickness of 3-40 nm by epitaxial growing. The germanium layer is permitted to be a channel region; and a gate insulating film, a gate electrode, a side wall insulating film, an n-type impurity diffusion region and a silicide layer are formed.

    摘要翻译： 通过具有MISFET的半导体器件抑制短沟道效应并获得高驱动电流，其中具有高迁移率和高介电常数的材料（例如锗）被用于沟道。 在p型硅衬底的表面上形成p型阱。 在p型阱上形成介电常数高于p型硅衬底的硅锗层的厚度为30nm以下。 然后，在硅锗层上，通过外延生长，形成具有高于硅锗层的介电常数的锗层，其厚度为3-40nm。 锗层被允许为通道区域; 形成栅绝缘膜，栅电极，侧壁绝缘膜，n型杂质扩散区和硅化物层。

    Charge transfer device and method of driving the same
    3.
    发明授权
    Charge transfer device and method of driving the same 失效
    电荷转移装置及其驱动方法

    公开(公告)号：US6157053A

    公开(公告)日：2000-12-05

    申请号：US84460

    申请日：1998-05-26

    申请人： Akihito Tanabe

    发明人： Akihito Tanabe

    IPC分类号： H01L29/762 ,  H01L21/339 ,  H01L27/148 ,  H01L29/768

    CPC分类号： H01L27/148 ,  H01L29/76808 ,  H01L29/76816

    摘要： There is provided a charge transfer device including (a) a charge transfer channel for transferring signal charges therethrough, (b) a floating diffusion region for accumulating therein charges transferred from the charge transfer channel, (c) a field effect transistor for resetting the floating diffusion region so that the floating diffusion region is at a predetermined potential and (d) a bias charge input section through which a bias charge is supplied and which is connected to either the charge transfer channel or the floating diffusion region. The field effect transistor includes a reset gate electrode and a reset drain. The charge transfer channel located below the reset gate electrode is designed to receive either a potential lower than a potential of the reset drain when the floating diffusion region is reset in the case that charges to be transferred are electrons, or a potential higher than a potential of the reset drain when the floating diffusion region is reset in the case that charges to be transferred are holes. The above-mentioned charge transfer device ensures to reset the floating diffusion region regardless of whether a potential in the reset drain is greater or smaller than a potential in a channel located below the reset gate electrode.

    摘要翻译： 提供了一种电荷转移装置，包括：（a）用于传送信号电荷的电荷转移通道，（b）用于在其中累积从电荷转移通道转移的电荷的浮动扩散区，（c）用于复位浮动的场效应晶体管 扩散区域，使得浮动扩散区域处于预定电位;以及（d）偏置电荷输入部分，通过该偏置电荷输入部分提供偏置电荷并连接到电荷转移通道或浮动扩散区域。 场效应晶体管包括复位栅电极和复位漏极。 位于复位栅电极下方的电荷传输通道被设计成在浮置电荷被移动的电荷为电子时，或在高于电位的电位时，在浮置扩散区被复位时接收低于复位漏极的电位的电位 当在要传送的电荷的情况下浮置扩散区域被复位时，复位漏极的位置是空穴。 无论复位漏极中的电位是否大于或小于位于复位栅极电极下方的沟道中的电位，上述电荷转移器件确保复位浮动扩散区域。

    Method of driving photoelectric conversion device
    4.
    发明授权
    Method of driving photoelectric conversion device 失效
    光电转换装置的驱动方法

    公开(公告)号：US5565676A

    公开(公告)日：1996-10-15

    申请号：US467305

    申请日：1995-06-06

    申请人： Akihito Tanabe ,  Shigeru Tohyama

    发明人： Akihito Tanabe ,  Shigeru Tohyama

    IPC分类号： H01L27/14 ,  H01L27/148 ,  H01L31/0232 ,  H01L31/10 ,  H01L31/108 ,  G01J5/02 ,  G01J5/20

    CPC分类号： H01L31/0232 ,  H01L27/14806 ,  H01L31/108

    摘要： Disclosed is a photoelectric conversion device in which a photodiode capacitance is increased. A transparent electrode is formed between a reflecting plate and a photodiode constituting a unitary picture element of a CCD image sensor. It is so formed that light is incident from the rear surface and the loop of the standing wave of the light comes on a platinum silicide film, thereby achieving the effective absorption of the incident light. The transparent electrode is formed between the reflecting plate and the photodiode in opposition to the platinum silicide film. The capacitance between the transparent electrode and the platinum silicide film can be utilized as photodiode capacitance. Optically optimum thickness is assured by individually forming the reflecting plate which optimizes optical properties represented by the absorption of the incident light, and the transparent electrode used for increasing the photodiode capacitance, and also applying a pulse voltage to the transparent electrode at a given timing in such a manner that the potential at the time of resetting of the photodiode potential is lower than that obtained when the charge is accumulated.

    摘要翻译： 公开了一种光电二极管电容增加的光电转换装置。 在反射板和构成CCD图像传感器的整体像素的光电二极管之间形成透明电极。 它形成为光从后表面入射，并且光的驻波的环到达铂硅化物膜，从而实现入射光的有效吸收。 透明电极形成在与铂硅化物膜相反的反射板和光电二极管之间。 透明电极和硅化铂膜之间的电容可用作光电二极管电容。 通过分别形成优化由入射光的吸收表示的光学特性的反射板和用于增加光电二极管电容的透明电极，并且在给定的定时向透明电极施加脉冲电压来确保光学最佳厚度 使得光电二极管电位复位时的电位低于电荷累积时的电位。

    SiGe PHOTODIODE
    6.
    发明申请
    SiGe PHOTODIODE 有权
    SiGe光电

    公开(公告)号：US20110012221A1

    公开(公告)日：2011-01-20

    申请号：US12919638

    申请日：2009-03-09

    申请人： Junichi Fujikata ,  Toru Tatsumi ,  Akihito Tanabe ,  Jun Ushida ,  Daisuke Okamoto ,  Kenichi Nishi

    发明人： Junichi Fujikata ,  Toru Tatsumi ,  Akihito Tanabe ,  Jun Ushida ,  Daisuke Okamoto ,  Kenichi Nishi

    IPC分类号： H01L31/105

    CPC分类号： H01L31/105 ,  G02B6/12004 ,  G02B6/4204 ,  G02B6/4214 ,  H01L31/022408 ,  H01L31/028 ,  H01L31/03529 ,  Y02E10/547

    摘要： The lattice mismatching between a Ge layer and a Si layer is as large as about 4%. Thus, when the Ge layer is grown on the Si layer, penetration dislocation is introduced to cause leakage current at the p-i-n junction. Thereby, the photo-detection sensitivity is reduced, and the reliability of the element is also lowered. Further, in the connection with a Si waveguide, there are also problems of the reflection loss due to the difference in refractive index between Si and Ge, and of the absorption loss caused by a metal electrode. In order to solve said problems, according to the present invention, there is provided a vertical type pin-SiGe photodiode having a structure which is embedded in a groove formed in a part of a Si layer, in which a p-type or n-type doped layer is formed in a lower section of the groove, and in which a i-SiGe layer having a rectangular shape or a reverse tapered shape is formed on a layered structure formed by laminating a i-Si layer and a SiGe buffer layer on the lower section and the side wall of the groove. Further, in an optical connection section with a Si waveguide, impedance matching is effected by the layered structure composed of the i-Si layer and the SiGe buffer layer, and an upper metal layer is separated therefrom so that a poly-Si bridge structure is employed to electrically connect the upper metal layer therewith.

    摘要翻译： Ge层与Si层之间的晶格失配大至4％左右。 因此，当Ge层在Si层上生长时，引入穿透位错以在p-i-n结处引起漏电流。 因此，光检测灵敏度降低，并且元件的可靠性也降低。 此外，在与Si波导的连接中，还存在由于Si和Ge之间的折射率的差异以及由金属电极引起的吸收损耗的反射损耗的问题。 为了解决所述问题，根据本发明，提供了一种垂直型pin-SiGe光电二极管，其具有嵌入到形成在Si层的一部分中的凹槽中的结构，其中p型或n- 在沟槽的下部形成有型掺杂层，其中在通过层叠i-Si层和SiGe缓冲层而形成的层叠结构上形成具有矩形或倒锥形的i-SiGe层 凹槽的下部和侧壁。 此外，在具有Si波导的光学连接部中，通过由i-Si层和SiGe缓冲层构成的层叠结构实现阻抗匹配，并且将上部金属层与其分离，使得多Si桥结构 用于将上部金属层电连接到其上。

    SEMICONDUCTOR DEVICE
    7.
    发明申请
    SEMICONDUCTOR DEVICE 有权
    半导体器件

    公开(公告)号：US20100044781A1

    公开(公告)日：2010-02-25

    申请号：US12532302

    申请日：2008-03-27

    申请人： Akihito Tanabe

    发明人： Akihito Tanabe

    IPC分类号： H01L29/78

    CPC分类号： H01L29/7833 ,  H01L29/1054 ,  H01L29/66545 ,  H01L29/66613

    摘要： To suppress short channel effects and obtain a high driving current by means of a semiconductor device having an MISFET wherein a material having high mobility and high dielectric constant, such as germanium, is used for a channel. A p-type well is formed on a surface of a p-type silicon substrate. A silicon germanium layer having a dielectric constant higher than that of the p-type silicon substrate is formed to have a thickness of 30 nm or less on the p-type well. Then, on the silicon germanium layer, a germanium layer having a dielectric constant higher than that of the silicon germanium layer is formed to have a thickness of 3-40 nm by epitaxial growing. The germanium layer is permitted to be a channel region; and a gate insulating film, a gate electrode, a side wall insulating film, an n-type impurity diffusion region and a silicide layer are formed.

    摘要翻译： 通过具有MISFET的半导体器件抑制短沟道效应并获得高驱动电流，其中具有高迁移率和高介电常数的材料（例如锗）被用于沟道。 在p型硅衬底的表面上形成p型阱。 在p型阱上形成介电常数高于p型硅衬底的硅锗层的厚度为30nm以下。 然后，在硅锗层上，通过外延生长，形成具有高于硅锗层的介电常数的锗层，其厚度为3-40nm。 锗层被允许为通道区域; 形成栅绝缘膜，栅电极，侧壁绝缘膜，n型杂质扩散区和硅化物层。

    Solid-state image pickup device having vertical overflow drain and resistive gate charge transfer device and method of controlling thereof
    8.
    发明授权
    Solid-state image pickup device having vertical overflow drain and resistive gate charge transfer device and method of controlling thereof 失效
    具有垂直溢出漏极和电阻栅极电荷转移装置的固态图像拾取装置及其控制方法

    公开(公告)号：US06445414B1

    公开(公告)日：2002-09-03

    申请号：US08989075

    申请日：1997-12-11

    申请人： Akihito Tanabe

    发明人： Akihito Tanabe

    IPC分类号： H04N314

    CPC分类号： H01L27/14887 ,  H01L27/14812 ,  H01L27/14818 ,  H01L27/14843 ,  H04N5/3592

    摘要： A solid state image pickup device has a photo diodes for producing charge packets from image-carrying light, a vertical overflow drain formed under the photo diodes, charge transfer channel regions selectively connected to the photo diodes through transfer gate transistors, resistive gate electrodes capacitively coupled to said charge transfer channel regions, respectively, and a pulse signal source connected to far ends of the resistive gate electrodes and near ends of the resistive gate electrodes closer to a horizontal charge transfer unit, and the pulse signal source produces a potential gradient in the charge transfer channel regions after transfer of the charge packets to the charge transfer channel regions so that the charge packets are conveyed through the horizontal charge transfer unit without a large horizontal charge transfer signal.

    摘要翻译： 固态图像拾取装置具有用于从图像携带光产生电荷包的光电二极管，在二极管下形成的垂直溢流漏极，通过传输栅极晶体管选择性地连接到光电二极管的电荷传输沟道区，电容性耦合 分别连接到所述电荷转移通道区域的脉冲信号源和连接到电阻栅电极的远端的脉冲信号源和靠近水平电荷​​转移单元的电阻栅电极的近端，并且脉冲信号源产生电位梯度 在将电荷分组转移到电荷传送通道区域之后的电荷转移通道区域，使得电荷包被传送通过水平电荷转移单元而没有大的水平电荷转移信号。

    Charge transfer device and a manufacturing process therefor
    9.
    发明授权
    Charge transfer device and a manufacturing process therefor 有权
    电荷转移装置及其制造方法

    公开(公告)号：US06333526B1

    公开(公告)日：2001-12-25

    申请号：US09198361

    申请日：1998-11-24

    申请人： Akihito Tanabe

    发明人： Akihito Tanabe

    IPC分类号： H01L27148

    CPC分类号： H01L27/14683 ,  H01L27/14806 ,  H01L27/14843

    摘要： This invention provides a manufacturing process for a charge transfer device comprising an N-type well formed in a P-type well on a semiconductor substrate for transferring a signal charge, an N+region formed on both sides along the charge transfer direction of the N-type well and containing a dopant in a higher concentration than that in the N-type well, a P-type region formed around the N+ region, and a gate electrode covering the N+ region and the N-type well and formed via a gate insulator, comprising ion-implanting an N-type dopant into the region to be the N-type well and the N+ region using the first mask and ion-implanting a P-type dopant into the region to be the N-type well using the second mask. Thus, there can be provided a charge transfer device which has a structure where there is an N+ region on both sides of the N-type well, a large maximum transferable charge and a compact CCD with a width up to 3 times the minimum design dimension.

    摘要翻译： 本发明提供了一种电荷转移装置的制造方法，该装置包括形成在用于传送信号电荷的半导体衬底上的P型阱中的N型阱，沿着N的电荷转移方向形成在两侧的N +区 型，并且含有比N型阱中更高的浓度的掺杂剂，形成在N +区周围的P型区域和覆盖N +区域和N型阱并经由栅极形成的栅电极 绝缘体，包括使用第一掩模将N型掺杂剂离子注入到N型阱区域和N +区域中，并使用P型掺杂剂将P型掺杂剂离子注入到该N区域中，使用 第二个面具 因此，可以提供一种电荷转移装置，其具有在N型阱的两侧具有N +区域的结构，大的最大可转移电荷和紧凑的CCD，其宽度可达最小设计尺寸的3倍 。

    Back-illuminated type photoelectric conversion device
    10.
    发明授权
    Back-illuminated type photoelectric conversion device 失效
    背照式光电转换装置

    公开(公告)号：US5598016A

    公开(公告)日：1997-01-28

    申请号：US358015

    申请日：1994-12-16

    申请人： Akihito Tanabe ,  Shigeru Tohyama

    发明人： Akihito Tanabe ,  Shigeru Tohyama

    IPC分类号： H01L27/14 ,  H01L27/148 ,  H01L31/0232 ,  H01L31/10 ,  H01L31/108

    CPC分类号： H01L31/0232 ,  H01L27/14806 ,  H01L31/108

    摘要： Disclosed is a photoelectric conversion device in which a photodiode capacitance is increased. A transparent electrode is formed between a reflecting plate and a photodiode constituting a unitary picture element of a CCD image sensor. It is so formed that light is incident from the rear surface and the loop of the standing wave of the light comes on a platinum silicide film, thereby achieving the effective absorption of the incident light. The transparent electrode is formed between the reflecting plate and the photodiode in opposition to the platinum silicide film. The capacitance between the transparent electrode and the platinum silicide film can be utilized as photodiode capacitance. Optically optimum thickness is assured by individually forming the reflecting plate which optimizes optical properties represented by the absorption of the incident light, and the transparent electrode used for increasing the photodiode capacitance, and also applying a pulse voltage to the transparent electrode at a given timing in such a manner that the potential at the time of resetting of the photodiode potential is lower than that obtained when the charge is accumulated.

    摘要翻译： 公开了一种光电二极管电容增加的光电转换装置。 在反射板和构成CCD图像传感器的整体像素的光电二极管之间形成透明电极。 它形成为光从后表面入射，并且光的驻波的环到达铂硅化物膜，从而实现入射光的有效吸收。 透明电极形成在与铂硅化物膜相反的反射板和光电二极管之间。 透明电极和硅化铂膜之间的电容可用作光电二极管电容。 通过分别形成优化由入射光的吸收表示的光学特性的反射板和用于增加光电二极管电容的透明电极，并且在给定的定时向透明电极施加脉冲电压来确保光学最佳厚度 使得光电二极管电位复位时的电位低于电荷累积时的电位。