Silicon on insulator resonator sensors and modulators and method of operating the same
    2.
    发明授权
    Silicon on insulator resonator sensors and modulators and method of operating the same 有权
    绝缘体上的绝缘体传感器和调制器及其操作方法

    公开(公告)号:US07095010B2

    公开(公告)日:2006-08-22

    申请号:US10729242

    申请日:2003-12-04

    IPC分类号: G01J1/04 G02B6/00

    CPC分类号: G01N21/7746 G01N2021/7783

    摘要: A microsensor for sensing a substance comprises a substrate, a source of light, an optical microresonator or semiconductor optical ring microresonator fabricated in the substrate exposed to the substance to allow an interaction between the microresonator and substance, a waveguide coupling the source of light to the optical microresonator, and a detector coupled to the microresonator to measure the resonant frequency of the microresonator, the absorption loss of whispering gallery modes in the microresonator or the quality factor of the microresonator, which are sensitive to interaction of the substance with the optical microresonator. A polymer coating disposed on the microresonator is reactive with the substance. The microsensor may comprise a plurality of microresonators corresponding to a plurality of different resonant frequencies to generate an absorption spectrum of the substance.

    摘要翻译: 用于感测物质的微传感器包括衬底,光源,在暴露于物质的衬底中制造的光学微谐振器或半导体光环微谐振器,以允许微谐振器和物质之间的相互作用,将光源耦合到 光学微谐振器和耦合到微谐振器的检测器,以测量微谐振器的谐振频率,微谐振器中的语音库模式的吸收损失或微谐振器的质量因子,其对物质与光学微谐振器的相互作用敏感。 设置在微谐振器上的聚合物涂层与物质反应。 微传感器可以包括对应于多个不同谐振频率的多个微谐振器以产生该物质的吸收光谱。