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公开(公告)号:US06876442B2
公开(公告)日:2005-04-05
申请号:US10078071
申请日:2002-02-13
申请人: Jean R. Vatus , David K. Carlson , Arkadii V. Samoilov , Lance A. Scudder , Paul B. Comita , Annie A. Karpati
发明人: Jean R. Vatus , David K. Carlson , Arkadii V. Samoilov , Lance A. Scudder , Paul B. Comita , Annie A. Karpati
IPC分类号: C23C16/52 , H01L21/205 , H01L21/66 , G01J5/48 , G01R31/26
CPC分类号: H01L22/20
摘要: A method is provided wherein a temperature reading error of a pyrometer is avoided. An upper pyrometer is used to detect infrared radiation from a test layer formed on a test substrate under standard processing conditions. The infrared radiation from the test layer has a period having a length which is indicative of growth rate of the layer. The period is generally inversely proportional to the growth rate. The growth rate is directly related to the temperature.
摘要翻译: 提供了避免高温计的温度读数误差的方法。 在标准处理条件下,使用上高温计来检测在测试基板上形成的测试层的红外辐射。 来自测试层的红外辐射具有指示层的生长速率的长度的周期。 这个时期通常与增长率成反比。 生长速度与温度直接相关。