公开(公告)号：US09086623B2

公开(公告)日：2015-07-21

申请号：US13598087

申请日：2012-08-29

申请人： Keita Kato ,  Atsushi Nakamura

发明人： Keita Kato ,  Atsushi Nakamura

IPC分类号： G03F7/004 ,  G03F7/20 ,  G03F7/32 ,  C08F220/10 ,  C08F212/08 ,  H01L21/027 ,  H01L21/308 ,  G03F7/039

CPC分类号： G03F7/0045 ,  C07C2602/14 ,  C07C2603/56 ,  C07C2603/74 ,  C08F212/08 ,  C08F220/10 ,  G03F7/0046 ,  G03F7/0392 ,  G03F7/0397 ,  G03F7/325 ,  H01L21/0274 ,  H01L21/3081 ,  Y10S430/114

摘要： Provided is a method of forming a pattern, including forming an actinic-ray- or radiation-sensitive resin composition into a film, the actinic-ray- or radiation-sensitive resin composition including a resin (A) including a repeating unit containing a group that when acted on by an acid, is decomposed to thereby produce a polar group and including an aromatic group, which resin when acted on by an acid, decreases its solubility in an organic solvent, a nonionic compound (B) that when exposed to actinic rays or radiation, generates an acid and a solvent (C), exposing the film to actinic rays or radiation, and developing the exposed film with a developer including an organic solvent to thereby form a negative pattern.

摘要翻译： 提供一种形成图案的方法，包括将光敏射线或辐射敏感性树脂组合物形成在膜中，所述光化学射线或辐射敏感性树脂组合物包括含有包含基团的重复单元的树脂（A） 当被酸作用时，其被分解，从而产生极性基团并且包括芳族基团，该树脂在被酸作用时降低其在有机溶剂中的溶解度，当暴露于光化反应时的非离子化合物（B） 产生酸和溶剂（C），将膜暴露于光化射线或辐射，并用包含有机溶剂的显影剂显影曝光的膜，从而形成负图案。

公开(公告)号：US20130192310A1

公开(公告)日：2013-08-01

申请号：US13747831

申请日：2013-01-23

申请人： Atsushi NAKAMURA

发明人： Atsushi NAKAMURA

IPC分类号： H01L21/02

CPC分类号： H01L21/02686 ,  B23K26/0006 ,  B23K26/064 ,  B23K26/123 ,  B23K26/127 ,  B23K26/128 ,  B23K26/354 ,  B23K2103/56

摘要： According to one embodiment, a laser annealing apparatus includes a laser device, an anneal chamber including a stage, a first housing, and an incidence window which is attached to the first housing, an optical module including a second housing and an emission window which is attached to the second housing, and a seal member which surrounds an optical path which connects a position where the emission window is attached and a position where the incidence window is attached, and effects sealing between the optical module and the anneal chamber, an inside of the seal member being an atmosphere of an inert gas.

摘要翻译： 根据一个实施例，一种激光退火装置包括激光装置，包括台的退火室，第一壳体和附接到第一壳体的入射窗，包括第二壳体和发射窗的光学模块， 附接到第二壳体的密封构件，以及密封构件，其围绕连接安装有发射窗的位置的光路和安装入射窗的位置，并且在光学模块和退火室之间进行密封， 密封构件是惰性气体的气氛。

公开(公告)号：US08435718B2

公开(公告)日：2013-05-07

申请号：US13272501

申请日：2011-10-13

申请人： Atsushi Nakamura ,  Hiroki Nakagawa ,  Hiromitsu Nakashima ,  Takayuki Tsuji ,  Hiroshi Dougauchi ,  Daita Kouno ,  Yukio Nishimura

发明人： Atsushi Nakamura ,  Hiroki Nakagawa ,  Hiromitsu Nakashima ,  Takayuki Tsuji ,  Hiroshi Dougauchi ,  Daita Kouno ,  Yukio Nishimura

IPC分类号： G03F7/00 ,  G03F7/004 ,  G03F7/11 ,  G03F7/40

CPC分类号： G03F7/11 ,  C08F220/18 ,  C08F220/30 ,  G03F7/0046 ,  G03F7/2041

摘要： An upper layer-forming composition includes a resin, and a solvent. The resin is dissolvable in a developer for a photoresist film which is to be covered by the upper layer-forming composition to form a pattern by exposure to radiation. The solvent dissolves the resin in the solvent. The solvent includes a compound shown by a formula (1). Each of R1 and R2 independently represents a hydrocarbon group having 1 to 8 carbon atoms or a halogenated hydrocarbon group. R1—O—R2  (1)

摘要翻译： 上层形成组合物包括树脂和溶剂。 该树脂可溶于用于由上层形成组合物覆盖以形成通过辐射照射的图案的光致抗蚀剂膜的显影剂。 溶剂溶解在溶剂中的树脂。 溶剂包括由式（1）表示的化合物。 R 1和R 2各自独立地表示碳原子数1〜8的烃基或卤代烃基。 R1-O-R2（1）

公开(公告)号：US08430978B2

公开(公告)日：2013-04-30

申请号：US10566116

申请日：2004-07-14

申请人： Akihisa Inoue ,  Hisamichi Kimura ,  Kenichiro Sasamori ,  Masataka Yahagi ,  Atsushi Nakamura ,  Hideyuki Takahashi

发明人： Akihisa Inoue ,  Hisamichi Kimura ,  Kenichiro Sasamori ,  Masataka Yahagi ,  Atsushi Nakamura ,  Hideyuki Takahashi

IPC分类号： C22C45/00

CPC分类号： C23C14/3414 ,  C22C5/00 ,  C22C9/00 ,  C22C16/00 ,  C22C19/07 ,  C22C21/10 ,  C22C45/02 ,  C22C45/10 ,  C22F1/053

摘要： A sintered sputtering target having a structure where the average crystallize size is 1 nm to 50 nm and preferably comprises an alloy having a three-component system or greater containing, as its primary component, at least one element selected from among Zr, Pd, Cu, Co, Fe, Ti, Mg, Sr, Y, Nb, Mo, Tc, Ru, Rh, Ag, Cd, In, Sn, Sb, Te and a rare earth metal. This target is manufactured by sintering atomized powder. Thereby provided is a high density target having an extremely fine and uniform structure manufactured with the sintering method, in place of a conventional bulk metal glass produced by the quenching of a molten metal, which has a coarse crystal structure and requires a high cost for its production.

摘要翻译： 具有平均结晶尺寸为1nm〜50nm的结构的烧结溅射靶，优选包含含有选自Zr，Pd，Cu中的至少一种元素作为其主要成分的具有三成分以上的三成分体系以上的合金 ，Co，Fe，Ti，Mg，Sr，Y，Nb，Mo，Tc，Ru，Rh，Ag，Cd，In，Sn，Sb，Te和稀土金属。 该目标通过烧结雾化粉末制造。 由此提供了通过烧结方法制造的具有非常细小而均匀结构的高密度靶材，代替了通过熔融金属淬火制备的常规体积金属玻璃，该熔融金属具有粗晶体结构并且需要高成本 生产。

公开(公告)号：USRE44148E1

公开(公告)日：2013-04-16

申请号：US12805447

申请日：2010-07-30

申请人： Atsushi Nakamura ,  Kunihiko Nishi

发明人： Atsushi Nakamura ,  Kunihiko Nishi

IPC分类号： H01L23/13 ,  H01L23/48 ,  H01L23/31 ,  H01L23/12 ,  H01L23/498 ,  H01L23/28

CPC分类号： H01L24/49 ,  B29C45/0046 ,  B29C45/14655 ,  B29C45/14836 ,  H01L23/13 ,  H01L23/3128 ,  H01L23/49816 ,  H01L23/49827 ,  H01L24/05 ,  H01L24/06 ,  H01L24/29 ,  H01L24/32 ,  H01L24/45 ,  H01L24/48 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05556 ,  H01L2224/06135 ,  H01L2224/06136 ,  H01L2224/16 ,  H01L2224/32014 ,  H01L2224/32225 ,  H01L2224/45124 ,  H01L2224/45144 ,  H01L2224/45147 ,  H01L2224/45565 ,  H01L2224/4569 ,  H01L2224/48091 ,  H01L2224/48221 ,  H01L2224/48227 ,  H01L2224/48235 ,  H01L2224/4824 ,  H01L2224/48465 ,  H01L2224/48599 ,  H01L2224/48699 ,  H01L2224/48799 ,  H01L2224/49175 ,  H01L2224/73215 ,  H01L2224/73265 ,  H01L2224/85206 ,  H01L2224/85207 ,  H01L2224/92247 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01023 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/0105 ,  H01L2924/01075 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/18161 ,  H01L2924/18165 ,  H01L2924/30107 ,  H01L2924/351 ,  H01L2924/00

摘要： A semiconductor device comprising a semiconductor pellet mounted on a pellet mounting area of the main surface of a base substrate, in which first electrode pads arranged on the back of the base substrate are electrically connected to bonding pads arranged on the main surface of the semiconductor pellet. The base substrate is formed of a rigid substrate, and its first electrode pads are electrically connected to the second electrode pads arranged on its reverse side. The semiconductor pellet is mounted on the pellet mounting area of the main surface of the base substrate, with its main surface downward, and its bonding pads are connected electrically with the second electrode pads of the base substrate through bonding wires passing through slits formed in the base substrate.

摘要翻译： 一种半导体器件，包括安装在基底基板的主表面的芯片安装区域上的半导体芯片，其中布置在基底衬底背面的第一电极焊盘电连接到布置在半导体芯片的主表面上的焊盘 。 基底由刚性基板形成，其第一电极焊盘电连接到布置在其背面的第二电极焊盘。 半导体芯片安装在基板的主表面的芯片安装区域上，其主表面向下，并且其焊盘通过穿过形成在其中的狭缝的接合线与基底衬底的第二电极焊盘电连接 基底。

公开(公告)号：US20130050419A1

公开(公告)日：2013-02-28

申请号：US13406103

申请日：2012-02-27

申请人： Atsushi Nakamura ,  Shinzo Matsubara ,  Yutaka Irie

发明人： Atsushi Nakamura ,  Shinzo Matsubara ,  Yutaka Irie

IPC分类号： H04N13/04

CPC分类号： H04N13/373 ,  H04N13/302 ,  H04N13/366 ,  H04N13/376

摘要： According to one embodiment, a video processing apparatus includes a viewer position detector, a viewing area information calculator, and a viewing area controller. The viewer position detector is configured to detect a position of a viewer using an image taken by a camera. The viewing area information calculator is configured to calculate a control parameter so as to set a viewing area, in which a plurality of parallax images displayed on a display are viewed as a stereoscopic image, at an area depending on the position of the viewer. The viewing area controller is configured to set the viewing area according to the control parameter in synchronization with a start of displaying a stereoscopic image, and then, keep the set viewing area until receiving an indication for adjusting the viewing area.

摘要翻译： 根据一个实施例，视频处理设备包括观看者位置检测器，观看区域信息计算器和观看区域控制器。 观看者位置检测器被配置为使用由照相机拍摄的图像来检测观看者的位置。 观看区域信息计算器被配置为计算控制参数，以便在根据观看者的位置的区域处将显示在显示器上的多个视差图像视为立体图像的观看区域设置。 观看区域控制器被配置为与显示立体图像的开始同步地根据控制参数设置观看区域，然后保持设置的观看区域直到接收到用于调整观看区域的指示。

公开(公告)号：US08355307B2

公开(公告)日：2013-01-15

申请号：US13404684

申请日：2012-02-24

申请人： Atsushi Nakamura ,  Isao Kobayashi ,  Shigeru Furumiya

发明人： Atsushi Nakamura ,  Isao Kobayashi ,  Shigeru Furumiya

IPC分类号： G11B7/0045

CPC分类号： G11B7/0062 ,  G11B7/261 ,  G11B20/10009 ,  G11B20/10046 ,  G11B20/10055 ,  G11B2007/0013

摘要： An optical recording method includes the steps of: encoding record data to generate encoded data which is a combination of marks and spaces; classifying the encoded data according to a combination of a mark length of the mark, a space length of a first space that immediately precedes the mark, and a space length of a second space that immediately succeeds the mark; generating a write pulse train for forming the mark, in which at least one of a leading end edge position, a trailing end edge position and a pulse width of the write pulse train is changed according to a classification result; and irradiating the optical disc medium with the write pulse train generated to form the plurality of marks on the optical disc medium.

摘要翻译： 光记录方法包括以下步骤：对记录数据进行编码，生成作为标记和空格的组合的编码数据; 根据标记的标记长度，紧接在标记之前的第一空格的空格长度和紧接着标记的第二空格的间隔长度的组合对编码数据进行分类; 产生用于形成标记的写脉冲串，其中根据分类结果改变写入脉冲串的前端边缘位置，后端边缘位置和脉冲宽度中的至少一个; 以及在光盘介质上照射生成的写入脉冲串，以在光盘介质上形成多个标记。

公开(公告)号：US08295139B2

公开(公告)日：2012-10-23

申请号：US13094220

申请日：2011-04-26

申请人： Atsushi Nakamura ,  Naoyasu Miyagawa

发明人： Atsushi Nakamura ,  Naoyasu Miyagawa

IPC分类号： G11B7/00

CPC分类号： G11B7/126 ,  G11B7/00456 ,  G11B7/0062

摘要： There is provided an optical recording method for directing a recording pulse train to an optical disc medium to form marks thereon and for recording information as information about the edge positions of said marks and the spaces between marks, the recording pulse train having been created by modulating laser light into plural power levels. The method includes: coding to-be-recorded data into coded data consisting of the combination of marks and spaces; classifying said marks within said coded data on the basis of the mark length and the preceding or succeeding space lengths of the marks; shifting the position of the second pulse edge counted from the end portion of the recording pulse train for forming said marks, depending on the result of said classification, to adjust said recording pulse train; and directing said recording pulse train to the optical disc medium to form said marks thereon.

摘要翻译： 提供了一种用于将记录脉冲序列引导到光盘介质以在其上形成标记的光学记录方法，并且用于记录关于所述标记的边缘位置和标记之间的空间的信息，记录脉冲串是通过调制产生的 激光成多个功率级。 该方法包括：将要记录的数据编码成由标记和空格的组合组成的编码数据; 基于标记长度和标记的前一或后续间隔长度，对所述编码数据内的所述标记进行分类; 根据所述分类的结果，从用于形成所述标记的记录脉冲序列的端部计数的第二脉冲边缘的位置移位，以调整所述记录脉冲串; 并将所述记录脉冲序列引导到光盘介质上以在其上形成所述标记。

公开(公告)号：US08270268B2

公开(公告)日：2012-09-18

申请号：US13159600

申请日：2011-06-14

申请人： Toyoji Gushima ,  Shigeru Furumiya ,  Takashi Ishida ,  Hiromichi Ishibashi ,  Hironori Deguchi ,  Atsushi Nakamura ,  Junichi Minamino ,  Makoto Usui ,  Takeshi Nakajima

发明人： Toyoji Gushima ,  Shigeru Furumiya ,  Takashi Ishida ,  Hiromichi Ishibashi ,  Hironori Deguchi ,  Atsushi Nakamura ,  Junichi Minamino ,  Makoto Usui ,  Takeshi Nakajima

IPC分类号： G11B7/00

CPC分类号： G11B20/1833 ,  G11B7/00454 ,  G11B7/00456 ,  G11B7/00736 ,  G11B7/00745 ,  G11B20/10 ,  G11B20/10203 ,  G11B20/1217 ,  G11B20/1403 ,  G11B20/1426 ,  G11B27/3027 ,  G11B2007/0006 ,  G11B2020/1222 ,  G11B2020/1225 ,  G11B2020/1232 ,  G11B2020/1277 ,  G11B2020/1287 ,  G11B2220/20 ,  G11B2220/216 ,  G11B2220/2537 ,  G11B2220/2562

摘要： A recording medium comprising a recording area, the recording area includes a first area and a second area, the first area includes a frame area, the frame area includes an area in which a second synchronization code sequence and at least a portion of data are to be recorded, and the second area includes an area of linking frames in which a third synchronization code sequence and a fourth synchronization code sequence are to be recorded.

摘要翻译： 一种包括记录区域的记录介质，所述记录区域包括第一区域和第二区域，所述第一区域包括帧区域，所述帧区域包括第二同步码序列和至少一部分数据到的区域 并且第二区域包括要记录第三同步码序列和第四同步码序列的链接帧的区域。

公开(公告)号：US08247165B2

公开(公告)日：2012-08-21

申请号：US10586187

申请日：2005-01-14

申请人： Toru Kimura ,  Yukio Nishimura ,  Tomohiro Utaka ,  Hiroaki Nemoto ,  Atsushi Nakamura ,  Takashi Chiba ,  Hiroki Nakagawa

发明人： Toru Kimura ,  Yukio Nishimura ,  Tomohiro Utaka ,  Hiroaki Nemoto ,  Atsushi Nakamura ,  Takashi Chiba ,  Hiroki Nakagawa

IPC分类号： G03C1/00 ,  G03F7/00 ,  C08F18/20

CPC分类号： G03F7/2041 ,  C08F214/182 ,  C08F214/186 ,  C08F216/10 ,  C08F220/18 ,  C08F220/24 ,  G03F7/11 ,  C08F220/06 ,  C08F2222/1013

摘要： An immersion upper layer film composition is provided which exhibits sufficient transparency for the exposure wavelength 248 nm(KrF) and 193 nm(ArF), can form a protective film on the photoresist film without being intermixed with the photoresist film, is not eluted into water used during immersion exposure to maintain a stable film, and can be easily dissolved in an alkaline developer. The composition applied to coat on the photoresist film when using an immersion exposure device which is irradiated through water provided between a lens and the photoresist film, the composition comprises a resin forming a water-stable film during irradiation and being dissolved in a subsequent developer, and a solvent containing a monovalent alcohol having 6 or less carbon atoms, and the resin contains a resin component having an alcoholic hydroxyl group on the side chain containing a fluoroalkyl group on at least the carbon atom of α-position.

摘要翻译： 提供了对于曝光波长248nm（KrF）和193nm（ArF）显示足够的透明度的浸没上层膜组合物，可以在光致抗蚀剂膜上形成保护膜而不与光致抗蚀剂膜混合，不会被洗脱到水中 在浸渍曝光期间使用以保持稳定的膜，并且可以容易地溶解在碱性显影剂中。 当使用通过设置在透镜和光致抗蚀剂膜之间的水照射的浸没曝光装置时，该组合物涂覆在光致抗蚀剂膜上，该组合物包含在照射期间形成水稳定膜并溶解在随后的显影剂中的树脂， 和含有6个以下碳原子的一元醇的溶剂，该树脂含有至少在α-位的碳原子上的侧链上含有氟烷基的具有醇羟基的树脂成分。