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1.发明申请METHODS FOR ENHANCING TANTALUM FILAMENT LIFE IN HOT WIRE CHEMICAL VAPOR DEPOSITION PROCESSES 有权热线化学气相沉积工艺中增强钛酸盐寿命的方法公开(公告)号：US20120100312A1
公开(公告)日：2012-04-26
申请号：US13267309
申请日：2011-10-06
CPC分类号： C23C16/24 , C23C16/4488 , C23C16/52
摘要： Methods for depositing films using hot wire chemical vapor deposition (HWCVD) processes are provided herein. In some embodiments, a method of operating an HWCVD tool may include providing hydrogen gas (H2) to a filament disposed in a process chamber of the HWCVD tool for a first period of time; and flowing current through the filament to raise the temperature of the filament to a first temperature after the first period of time.
摘要翻译： 本文提供了使用热线化学气相沉积（HWCVD）工艺沉积薄膜的方法。 在一些实施例中，操作HWCVD工具的方法可以包括向布置在HWCVD工具的处理室中的细丝提供氢气（H2），持续第一时间段; 并且流过电流通过灯丝将灯丝的温度升高到第一时间段之后的第一温度。
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2.发明申请APPARATUS AND METHODS FOR FORMING ENERGY STORAGE AND PHOTOVOLTAIC DEVICES IN A LINEAR SYSTEM 失效在线性系统中形成能量储存和光伏器件的装置和方法公开(公告)号：US20110100955A1
公开(公告)日：2011-05-05
申请号：US12885139
申请日：2010-09-17
申请人： VICTOR L. PUSHPARAJ , Pravin K. Narwankar , Dieter Haas , Bipin Thakur , Mahesh Arcot , Vikas Gujar , Omkaram Nalamasu
发明人： VICTOR L. PUSHPARAJ , Pravin K. Narwankar , Dieter Haas , Bipin Thakur , Mahesh Arcot , Vikas Gujar , Omkaram Nalamasu
CPC分类号： C23C16/545 , B82Y10/00 , B82Y40/00 , H01L31/035227 , H01L31/075 , H01L31/1876 , H01L31/206 , H01L51/0048 , H01L51/4213 , Y02E10/548 , Y02E10/549 , Y02P70/521
摘要： A method and apparatus are provided for formation of a composite material on a substrate. The composite material includes carbon nanotubes and/or nanofibers, and composite intrinsic and doped silicon structures. In one embodiment, the substrates are in the form of an elongated sheet or web of material, and the apparatus includes supply and take-up rolls to support the web prior to and after formation of the composite materials. The web is guided through various processing chambers to form the composite materials. In another embodiment, the large scale substrates comprise discrete substrates. The discrete substrates are supported on a conveyor system or, alternatively, are handled by robots that route the substrates through the processing chambers to form the composite materials on the substrates. The composite materials are useful in the formation of energy storage devices and/or photovoltaic devices.
摘要翻译： 提供了一种用于在基底上形成复合材料的方法和装置。 复合材料包括碳纳米管和/或纳米纤维，以及复合本征和掺杂硅结构。 在一个实施方案中，基材为细长片或材料网的形式，并且该装置包括在形成复合材料之前和之后的供应和卷取辊以支撑幅材。 纤维网被引导通过各种处理室以形成复合材料。 在另一个实施例中，大规模衬底包括离散衬底。 离散的衬底被支撑在输送系统上，或者由机器人来处理，该机器人将衬底通过处理室，以在衬底上形成复合材料。 复合材料可用于形成储能装置和/或光伏器件。
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3.发明授权Apparatus and methods for forming energy storage and photovoltaic devices in a linear system 失效用于在线性系统中形成储能和光伏器件的装置和方法公开(公告)号：US08334017B2
公开(公告)日：2012-12-18
申请号：US12885139
申请日：2010-09-17
申请人： Victor L. Pushparaj , Pravin K. Narwankar , Dieter Haas , Bipin Thakur , Mahesh Arcot , Vikas Gujar , Omkaram Nalamasu
发明人： Victor L. Pushparaj , Pravin K. Narwankar , Dieter Haas , Bipin Thakur , Mahesh Arcot , Vikas Gujar , Omkaram Nalamasu
IPC分类号： C23C16/00
CPC分类号： C23C16/545 , B82Y10/00 , B82Y40/00 , H01L31/035227 , H01L31/075 , H01L31/1876 , H01L31/206 , H01L51/0048 , H01L51/4213 , Y02E10/548 , Y02E10/549 , Y02P70/521
摘要： A method and apparatus are provided for formation of a composite material on a substrate. The composite material includes carbon nanotubes and/or nanofibers, and composite intrinsic and doped silicon structures. In one embodiment, the substrates are in the form of an elongated sheet or web of material, and the apparatus includes supply and take-up rolls to support the web prior to and after formation of the composite materials. The web is guided through various processing chambers to form the composite materials. In another embodiment, the large scale substrates comprise discrete substrates. The discrete substrates are supported on a conveyor system or, alternatively, are handled by robots that route the substrates through the processing chambers to form the composite materials on the substrates. The composite materials are useful in the formation of energy storage devices and/or photovoltaic devices.
摘要翻译： 提供了一种用于在基底上形成复合材料的方法和装置。 复合材料包括碳纳米管和/或纳米纤维，以及复合本征和掺杂硅结构。 在一个实施方案中，基材为细长片或材料网的形式，并且该装置包括在形成复合材料之前和之后的供应和卷取辊以支撑幅材。 纤维网被引导通过各种处理室以形成复合材料。 在另一个实施例中，大规模衬底包括离散衬底。 离散的衬底被支撑在输送系统上，或者由机器人来处理，该机器人将衬底通过处理室，以在衬底上形成复合材料。 复合材料可用于形成储能装置和/或光伏器件。
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4.发明授权Methods for enhancing tantalum filament life in hot wire chemical vapor deposition processes 有权在热丝化学气相沉积工艺中提高钽丝寿命的方法公开(公告)号：US08709537B2
公开(公告)日：2014-04-29
申请号：US13267309
申请日：2011-10-06
IPC分类号： C23C16/00
CPC分类号： C23C16/24 , C23C16/4488 , C23C16/52
摘要： Methods for depositing films using hot wire chemical vapor deposition (HWCVD) processes are provided herein. In some embodiments, a method of operating an HWCVD tool may include providing hydrogen gas (H2) to a filament disposed in a process chamber of the HWCVD tool for a first period of time; and flowing current through the filament to raise the temperature of the filament to a first temperature after the first period of time.
摘要翻译： 本文提供了使用热线化学气相沉积（HWCVD）工艺沉积薄膜的方法。 在一些实施例中，操作HWCVD工具的方法可以包括向布置在HWCVD工具的处理室中的细丝提供氢气（H2），持续第一时间段; 并且流过电流通过灯丝将灯丝的温度升高到第一时间段之后的第一温度。
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5.发明申请APPARATUS FOR FORMING ENERGY STORAGE AND PHOTOVOLTAIC DEVICES IN A LINEAR SYSTEM 审中-公开在线性系统中形成能量储存和光伏器件的设备公开(公告)号：US20130074771A1
公开(公告)日：2013-03-28
申请号：US13682479
申请日：2012-11-20
申请人： VICTOR L. PUSHPARAJ , Pravin K. Narwankar , Dieter Haas , Bipin Thakur , Mahesh Arcot , Vikas Gujar , Omkaram Nalamasu
发明人： VICTOR L. PUSHPARAJ , Pravin K. Narwankar , Dieter Haas , Bipin Thakur , Mahesh Arcot , Vikas Gujar , Omkaram Nalamasu
IPC分类号： C23C16/54
CPC分类号： C23C16/545 , B82Y10/00 , B82Y40/00 , H01L31/035227 , H01L31/075 , H01L31/1876 , H01L31/206 , H01L51/0048 , H01L51/4213 , Y02E10/548 , Y02E10/549 , Y02P70/521
摘要： A method and apparatus are provided for formation of a composite material on a substrate. The composite material includes carbon nanotubes and/or nanofibers, and composite intrinsic and doped silicon structures. In one embodiment, the substrates are in the form of an elongated sheet or web of material, and the apparatus includes supply and take-up rolls to support the web prior to and after formation of the composite materials. The web is guided through various processing chambers to form the composite materials. In another embodiment, the large scale substrates comprise discrete substrates. The discrete substrates are supported on a conveyor system or, alternatively, are handled by robots that route the substrates through the processing chambers to form the composite materials on the substrates. The composite materials are useful in the formation of energy storage devices and/or photovoltaic devices.
摘要翻译： 提供了一种用于在基底上形成复合材料的方法和装置。 复合材料包括碳纳米管和/或纳米纤维，以及复合本征和掺杂硅结构。 在一个实施方案中，基材为细长片或材料网的形式，并且该装置包括在形成复合材料之前和之后的供应和卷取辊以支撑幅材。 纤维网被引导通过各种处理室以形成复合材料。 在另一个实施例中，大规模衬底包括离散衬底。 离散的衬底被支撑在输送系统上，或者由机器人来处理，该机器人将衬底通过处理室，以在衬底上形成复合材料。 复合材料可用于形成储能装置和/或光伏器件。
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