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    Spectroscopic ellipsometer and polarimeter systems
    3.
    发明授权
    Spectroscopic ellipsometer and polarimeter systems 有权
    光谱椭偏仪和偏光计系统

    公开(公告)号：US07616319B1

    公开(公告)日：2009-11-10

    申请号：US11890354

    申请日：2007-08-05

    申请人： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

    发明人： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

    IPC分类号： G01B9/02 ,  G01J3/45 ,  G01J4/00

    CPC分类号： G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0243 ,  G01J4/00 ,  G01N21/21 ,  G01N21/211 ,  G01N2021/213 ,  G02B17/008 ,  G02B27/286

    摘要： A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

    摘要翻译： 具有电磁辐射的多色光束源的旋转补偿器光谱椭偏仪或偏振计系统，偏振器，用于支撑材料系统的分级器，分析器，分散光学器件和检测器系统，其包括多个检测器元件，该系统 功能上存在于环境控制室中，因此适用于宽光谱范围（例如，130-1700nm）。 优选的补偿器设计包括基本上消色差的多元件补偿器系统，其中多个全内反射进入到输入的电磁辐射束的延迟，并且其元件被定向为使净延迟相对于由于 元素系统的位置和/或旋转。

    Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters
    7.
    发明授权
    Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters 有权
    光谱椭偏仪在多层交替高/低折射率滤波器的原位实时制造中的应用

    公开(公告)号：US06940595B1

    公开(公告)日：2005-09-06

    申请号：US10194881

    申请日：2002-07-15

    申请人： Blaine D. Johs ,  Jeffrey S. Hale ,  John A. Woollam ,  Craig M. Herzinger

    发明人： Blaine D. Johs ,  Jeffrey S. Hale ,  John A. Woollam ,  Craig M. Herzinger

    IPC分类号： G01J4/00

    CPC分类号： G01J4/00

    摘要： Disclosed is application of oblique angle of incidence, reflection and/or transmission mode spectroscopic ellipsometry PSI and/or DELTA, (including combinations thereof and/or mathematical equivalents), vs. wavelength data to monitor and/or control fabrication of multiple layer high/low refractive index band-pass, band-reject and varied attenuation vs. wavelength filters, either alone or in combination with transmissive non-ellipsometric electromagnetic beam turning point vs. layer data obtained at an essentially normal angle of incidence.

    摘要翻译： 公开了倾斜入射角，反射和/或透射模式分光椭偏仪PSI和/或DELTA（包括其组合和/或数学等价物）与波长数据的应用以监测和/或控制多层高/ 低折射率带通，带阻和变化的衰减相对于波长滤波器，单独地或与透射非椭圆电磁波转折点相比，在基本上正常的入射角获得的层数据。

    Combined polychromatic electromagnetic beam source system with application to ellipsometers, spectrophotometers and polarimeters
    9.
    发明授权
    Combined polychromatic electromagnetic beam source system with application to ellipsometers, spectrophotometers and polarimeters 有权
    组合多色电磁束源系统应用于椭偏仪，分光光度计和偏光仪

    公开(公告)号：US06268917B1

    公开(公告)日：2001-07-31

    申请号：US09479091

    申请日：2000-01-07

    申请人： Blaine D. Johs

    发明人： Blaine D. Johs

    IPC分类号： G01J400

    CPC分类号： G01J3/447 ,  G01J4/00 ,  G01J2003/2866 ,  G01N21/211

    摘要： Disclosed is a source of polychromatic electromagnetic radiation which, utilizing a beam combiner system, combines beams of polychromatic electromagnetic radiation from a plurality of sources to provide a relatively broad and flattened intensity characteristic vs. wavelength output spectrum, and its application in material system investigation systems, such as ellipsometers, spectrophotometers and polarimeters which comprise a polychromatic source of electromagnetic radiation.

    摘要翻译： 公开了多色的电磁辐射的源，其中，利用光束组合系统，结合了多色电磁辐射束从多个源，以提供相对宽广的和扁平强度特性与波长的输出频谱，其在材料体系调查系统中的应用 ，例如包括电磁辐射的多色源的椭圆计，分光光度计和偏振计。

    Single trianglular shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems
    10.
    发明授权
    Single trianglular shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems 有权
    用于光谱椭偏仪和偏光计系统的单三角形光学延迟器元件

    公开(公告)号：US6141102A

    公开(公告)日：2000-10-31

    申请号：US232257

    申请日：1999-01-19

    申请人： Blaine D. Johs ,  Craig M. Herzinger ,  Steven E. Green

    发明人： Blaine D. Johs ,  Craig M. Herzinger ,  Steven E. Green

    IPC分类号： G01J3/28 ,  G01J4/00

    CPC分类号： G01J4/00 ,  G01J2003/2866

    摘要： Disclosed is a triangular shaped retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation. The triangular shaped element, as viewed in side elevation, has first and second sides which project to the left and right and downward from an upper point. A third side is oriented essentially horizontally and is continuous with, and present below, the first and second sides. During use in a spectroscopic ellipsometer/polarimeter system, an entered beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of its incidence, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation.

    摘要翻译： 公开了一种用于在电磁辐射束的正交分量之间输入延迟的三角形延迟器系统。 从侧视图看，三角形元件具有从上部向左和向右突出的第一和第二侧面。 第三面基本上水平地定向并且与第一和第二面连​​续并存在于第一和第二面之下。 在分光椭偏仪/偏振计系统中使用时，输入的电磁辐射束在传播方向上离开，即传播方向基本上未发生变化，并且从其入射方向未脱离，即使延迟器系统围绕光束 电磁辐射。