ENHANCED STATIC-DYNAMIC PRESSURE TRANSDUCER SUITABLE FOR USE IN GAS TURBINES AND OTHER COMPRESSOR APPLICATIONS
    1.
    发明申请
    ENHANCED STATIC-DYNAMIC PRESSURE TRANSDUCER SUITABLE FOR USE IN GAS TURBINES AND OTHER COMPRESSOR APPLICATIONS 失效
    适用于气体涡轮和其他压缩机应用的增强静态动态压力传感器

    公开(公告)号:US20120073377A1

    公开(公告)日:2012-03-29

    申请号:US13312381

    申请日:2011-12-06

    IPC分类号: G01L23/00

    摘要: A transducer comprising a filter assembly that measures low amplitude, dynamic pressure perturbations superimposed on top of a high static pressure through the implementation of a low-pass mechanical filter assembly. The filter assembly may comprise a dual lumen reference tube and a removable filter subassembly further comprising a porous metal filter and narrow diameter tube. The transducer, which may be capable of operating at ultra-high temperatures and in harsh environments, may comprise of a static piezoresistive pressure sensor, which measures the large pressures on the order of 200 psi and greater, and an ultrasensitive, dynamic piezoresistive pressure sensor which may capture small, high frequency pressure oscillations on the order of a few psi. The filter assembly may transmit static pressure to the back of the dynamic pressure sensor to cancel out the static pressure present at the front of the sensor while removing dynamic pressure.

    摘要翻译: 一种换能器,其包括通过实施低通机械过滤器组件来测量叠加在高静态压力之上的低振幅动态压力扰动的过滤器组件。 过滤器组件可以包括双腔参考管和可移除的过滤器子组件,其还包括多孔金属过滤器和窄直径管。 可以在超高温和恶劣环境下工作的换能器可以包括静压压力传感器,该压力传感器测量大约200psi和更大的压力,以及超灵敏的压阻压力传感器 这可以捕获几psi的数量级的小的高频压力振荡。 过滤器组件可以将静压传递到动态压力传感器的背面,以消除传感器前部存在的静压,同时消除动态压力。

    Quantum dot based pressure switch
    2.
    发明申请
    Quantum dot based pressure switch 失效
    基于量子点的压力开关

    公开(公告)号:US20070108434A1

    公开(公告)日:2007-05-17

    申请号:US11281093

    申请日:2005-11-17

    IPC分类号: H01L29/06 H01L31/00

    摘要: A semiconductor heterostructure based pressure switch comprising: first and second small bandgap material regions separated by a larger bandgap material region; a third small bandgap material region within the region of larger bandgap material, the third material region and larger bandgap material region defining at least one quantum dot; and, first and second electrodes electrically coupled to the first and second small bandgap material regions, respectively, wherein the electrodes are sufficiently proximate to said quantum dot to facilitate electron tunneling there between when a pressure is applied to the bandgap material defining the quantum dot.

    摘要翻译: 一种基于半导体异质结构的压力开关,包括:由较大带隙材料区域分隔的第一和第二小带隙材料区域; 在较大带隙材料的区域内的第三小带隙材料区域,第三材料区域和限定至少一个量子点的较大带隙材料区域; 以及分别电耦合到第一和第二小带隙材料区域的第一和第二电极,其中当将压力施加到限定量子点的带隙材料时,电极足够靠近所述量子点以促进电子隧穿。

    Low pass filter semiconductor structures for use in transducers for measuring low dynamic pressures in the presence of high static pressures
    3.
    发明申请
    Low pass filter semiconductor structures for use in transducers for measuring low dynamic pressures in the presence of high static pressures 有权
    用于传感器的低通滤波器半导体结构,用于在存在高静压的情况下测量低动态压力

    公开(公告)号:US20050235754A1

    公开(公告)日:2005-10-27

    申请号:US11100652

    申请日:2005-04-07

    IPC分类号: G01L7/08 G01L13/02 G01L19/06

    摘要: A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

    摘要翻译: 提供半导体滤波器以与差压传感器一起操作。 过滤器在一端接收高频,低频静压泵,其一端具有高频低动态压力,滤波器用于过滤所述高频动态压力,仅提供另一滤芯端的静压力。 差分换能器在一个输入端口处接收动态和静态压力,并且在另一端口处接收所述过滤的静态压力,其中所述换能器提供仅指示动态压力的输出。 一个实施例中的滤波器具有从输入端指向输出端的一系列蚀刻通道。 通道是非常小直径的蚀刻孔,用于衰减或过滤动态压力。 在另一个实施例中,在硅晶片和玻璃盖晶片之间发现螺旋管状沟槽,槽的输入端口接收静态压力和动态压力,而槽的输出端口仅提供静态压力。 沟槽滤波器衰减动态压力,使得差分换能器仅通过消除静压来提供仅指示动态压力的输出。

    TORQUE INSENSITIVE HEADER ASSEMBLY
    4.
    发明申请
    TORQUE INSENSITIVE HEADER ASSEMBLY 有权
    扭矩敏感头组件

    公开(公告)号:US20120318068A1

    公开(公告)日:2012-12-20

    申请号:US13595057

    申请日:2012-08-27

    IPC分类号: G01L9/06 G01L7/08

    摘要: There is disclosed a high pressure sensing header which is relatively insensitive to mounting torque. The header comprises an outer torque isolating shell which surrounds an inner “H” section header. The inner “H” section header has a thick diaphragm and is surrounded by the torque isolating shell which is secured to the “H” section header at a peripheral flange of the “H” section header. In this manner when the header is installed, the installation force is absorbed by the outer shell and there is no installation force or torque exhibited by the inner “H” section which will respond only to stress due to pressure. The torque isolating shell also contains a top surface which has a counterbore that accommodates a crush ring. When the unit is installed, the crush ring is crushed against an installation wall to enable the inner header to receive pressure without experiencing significant installation force.

    摘要翻译: 公开了一种对安装扭矩相对不敏感的高压感测头。 头部包括围绕内部H部分头部的外部扭矩隔离壳体。 内部H部分头部具有厚的隔膜,并被扭矩隔离壳围绕,该扭矩隔离壳体在H部分头部的周边凸缘处固定到H部分头部。 以这种方式,当安装头部时,安装力被外壳吸收,并且没有由内部H部分表现出的安装力或扭矩,其仅响应于由于压力引起的应力。 扭矩隔离壳体还包括具有容纳压溃环的沉孔的顶表面。 当装置安装时,挤压环被压在安装壁上,以使内部集管接收压力,而不会受到显着的安装力。

    Low pass filter semiconductor structures for use in transducers for measuring low dynamic pressures in the presence of high static pressures
    5.
    发明授权
    Low pass filter semiconductor structures for use in transducers for measuring low dynamic pressures in the presence of high static pressures 有权
    用于传感器的低通滤波器半导体结构,用于在存在高静压的情况下测量低动态压力

    公开(公告)号:US08307713B2

    公开(公告)日:2012-11-13

    申请号:US12938141

    申请日:2010-11-02

    IPC分类号: G01L7/08

    摘要: A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

    摘要翻译: 提供半导体滤波器以与差压传感器一起操作。 过滤器在一端接收高频,低频静压泵,其一端具有高频低动态压力,滤波器用于过滤所述高频动态压力,仅提供另一过滤端的静压力。 差分换能器在一个输入端口处接收动态和静态压力,并且在另一端口处接收所述过滤的静态压力,其中所述换能器提供仅指示动态压力的输出。 一个实施例中的滤波器具有从输入端指向输出端的一系列蚀刻通道。 通道是非常小直径的蚀刻孔,用于衰减或过滤动态压力。 在另一个实施例中,在硅晶片和玻璃盖晶片之间发现螺旋管状沟槽,槽的输入端口接收静态压力和动态压力,而槽的输出端口仅提供静态压力。 沟槽滤波器衰减动态压力,使得差分换能器仅通过消除静压来提供仅指示动态压力的输出。

    Method for temperature compensation of a piezoresistive gaged metal diaphragm
    6.
    发明授权
    Method for temperature compensation of a piezoresistive gaged metal diaphragm 有权
    压阻式金属膜片的温度补偿方法

    公开(公告)号:US07918137B2

    公开(公告)日:2011-04-05

    申请号:US12322817

    申请日:2009-02-06

    IPC分类号: G01L9/06

    CPC分类号: G01L9/065

    摘要: There is described a temperature compensation scheme for a pressure sensitive metal diaphragm transducer. The transducer employs a Wheatstone bridge fabricated from p-type piezoresistors. The Wheatstone bridge is glassed directly onto the metal diaphragm. As the temperature of operation increases, the diaphragm exhibits a temperature variation of the Modulus of Elasticity. The Modulus of the metal diaphragm decreases with increasing temperature. Because of this, the same pressure applied to the metal diaphragm causes it to deflect further, which in turns causes increased strain applied to the bridge. Because of this effect, the sensitivity of the transducer increases with increasing temperature. A resistor is now placed in series with the Wheatstone bridge. The resistor is in series with the biasing voltage and because the TCS of the diaphragm is of an opposite sign, the series resistor has an even higher TCR in series with the bridge. In this manner, the bridge voltage is made to decrease with increasing temperature. Due to the fact that the bridge voltage decreases with increasing temperature the change in voltage compensates for the change in the Modulus of the metal diaphragm and therefore provides an accurate output at all temperatures.

    摘要翻译: 描述了压敏金属隔膜换能器的温度补偿方案。 传感器采用由p型压阻电阻制造的惠斯通电桥。 惠斯通电桥直接在金属隔膜上玻璃化。 随着操作温度的升高,隔膜呈现弹性模量的温度变化。 金属隔膜的模量随着温度的升高而降低。 因此,施加到金属隔膜上的相同的压力导致其进一步偏转,这又导致施加到桥的应变增加。 由于这种影响,传感器的灵敏度随着温度的升高而增加。 电阻器现在与惠斯通电桥串联放置。 电阻与偏置电压串联,并且由于隔膜的TCS具有相反的符号,所以串联电阻具有与桥连接的更高的TCR。 以这种方式,使电桥电压随着温度的升高而降低。 由于桥接电压随着温度升高而降低,所以电压的变化补偿了金属隔膜的模量的变化,因此在所有的温度下提供了精确的输出。

    Micromachined optical pressure sensor
    7.
    发明授权
    Micromachined optical pressure sensor 有权
    微加工光学压力传感器

    公开(公告)号:US07889955B2

    公开(公告)日:2011-02-15

    申请号:US12075922

    申请日:2008-03-14

    IPC分类号: G02B6/00

    摘要: A pressure sensor including: a deflectable diaphragm including a substantially central boss and channel; and, an optical waveguide having first and second arms, wherein the first arm is substantially aligned with an edge of the boss and the second arm is substantially aligned with an edge of the channel.

    摘要翻译: 一种压力传感器,包括:可偏转隔膜,其包括基本中心的凸台和通道; 以及具有第一和第二臂的光波导,其中所述第一臂基本上与所述凸台的边缘对齐,并且所述第二臂基本上与所述通道的边缘对准。

    Torque insensitive header assembly
    8.
    发明申请
    Torque insensitive header assembly 有权
    扭矩不敏感头部组件

    公开(公告)号:US20100275696A1

    公开(公告)日:2010-11-04

    申请号:US12387548

    申请日:2009-05-04

    IPC分类号: G01L7/08

    摘要: There is disclosed a high pressure sensing header which is relatively insensitive to mounting torque. Essentially the header consists of an outer torque isolating shell which has a “C” shaped cross section with the cylindrical shell surrounding an inner “H” section header. The inner “H” section header has a thick diaphragm and is surrounded by the torque isolating shell which is secured to the “H” section header at a peripheral flange of the “H” section header. In this manner when the header is installed, the installation force is absorbed by the outer shell and there is no installation force or torque exhibited by the inner “H” section which will respond only to stress due to pressure. The torque isolating shell also contains a top surface which has a counterbore which can accommodate a crush ring, and when the unit is installed, the crush ring is forced or crushed against an installation wall to enable the inner header to receive pressure without experiencing any significant installation force.

    摘要翻译: 公开了一种对安装扭矩相对不敏感的高压感测头。 基本上,集管由外部扭矩隔离壳体组成,外壳具有“C”形截面,圆柱形壳体围绕内部“H”部分集管。 内部“H”部分头部具有厚的隔膜,并且被扭矩隔离壳围绕,该扭矩隔离壳体在“H”部分头部的周边凸缘处固定到“H”部分头部。 以这种方式,当安装头部时,安装力被外壳吸收,并且内部“H”部分没有表现出的安装力或扭矩,该内部“H”部分将只响应于压力引起的应力。 扭矩隔离壳体还包括具有可容纳压溃环的沉孔的顶表面,并且当安装该单元时,挤压环被迫或压在安装壁上,以使内部集管容纳压力,而不会经历任何显着的 安装力。

    Low pass filter semiconductor structures for use in transducers for measuring low dynamic pressures in the presence of high static pressures
    9.
    发明申请
    Low pass filter semiconductor structures for use in transducers for measuring low dynamic pressures in the presence of high static pressures 有权
    用于传感器的低通滤波器半导体结构,用于在存在高静压的情况下测量低动态压力

    公开(公告)号:US20100139408A1

    公开(公告)日:2010-06-10

    申请号:US11716138

    申请日:2007-03-09

    IPC分类号: G01L13/02

    摘要: A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

    摘要翻译: 提供半导体滤波器以与差压传感器一起操作。 过滤器在一端接收高频和低频静压泵,其一端具有高频低动态压力,滤波器操作以过滤所述高频动压,仅提供另一过滤端的静压力。 差分换能器在一个输入端口处接收动态和静态压力,并且在另一端口处接收所述过滤的静态压力,其中所述换能器提供仅指示动态压力的输出。 一个实施例中的滤波器具有从输入端指向输出端的一系列蚀刻通道。 通道是非常小直径的蚀刻孔,并且可以衰减或过滤动态压力。 在另一个实施例中,在硅晶片和玻璃盖晶片之间发现螺旋管状沟槽,槽的输入端口接收静态压力和动态压力,而槽的输出端口仅提供静态压力。 沟槽滤波器衰减动态压力,使得差分换能器仅通过消除静压来提供仅指示动态压力的输出。

    Oscillator amplifier with frequency based digital multi-discrete-level
gain control and method of operation
    10.
    发明授权
    Oscillator amplifier with frequency based digital multi-discrete-level gain control and method of operation 失效
    振荡放大器采用基于频率的数字多离散级增益控制和操作方法

    公开(公告)号:US6121849A

    公开(公告)日:2000-09-19

    申请号:US121700

    申请日:1998-07-24

    摘要: An integrated circuit (11) has a frequency detection circuit (22) which provides one or more digital signals (50) to a current source (26) based upon a detected frequency of operation of a generated reference clock (48). The signals (50) allows the current source (26) to change its operational state between two or more discrete current output levels in a digitally-controlled manner. Using signals (50), a high current output level can selected and provided by the current source (26) to the external oscillator circuit (16) during a start up mode to ensure that the integrated circuit (11) can start up in an optimally reduced time period. After a start up operation is complete, the signals (50) can then be used to switch the current source (26) into a lower current operational mode whereby electromagnetic interference (EMI) effects are reduced during the normal modes of operation occurring after start up.

    摘要翻译: 集成电路(11)具有频率检测电路(22),其基于检测到的所生成的参考时钟(48)的操作频率向电流源(26)提供一个或多个数字信号(50)。 信号(50)允许电流源(26)以数字控制的方式在两个或多个离散电流输出电平之间改变其操作状态。 使用信号(50),在启动模式期间,电流源(26)可以选择并提供高电流输出电平到外部振荡电路(16),以确保集成电路(11)能够以最佳方式启动 缩短时间 在启动操作完成之后,信号(50)然后可用于将电流源(26)切换到较低电流操作模式,由此在启动之后发生的正常操作模式期间电磁干扰(EMI)效应降低 。