公开(公告)号：US06520315B1

公开(公告)日：2003-02-18

申请号：US09698821

申请日：2000-10-26

申请人： Michael Sugarman ,  Boris I. Govzman

发明人： Michael Sugarman ,  Boris I. Govzman

IPC分类号： B65G4724

CPC分类号： H01L21/68728 ,  B25J15/08 ,  B65G47/92 ,  H01L21/68707 ,  Y10S414/139

摘要： The invention provides a gripper assembly comprising a mounting base having a first magnet coupled thereto and having a moveable gripper coupled to the mounting base. The moveable gripper has a second magnet coupled thereto and comprises an end effector adapted to contact a wafer. The first and second magnets are adapted so that the magnetic force therebetween biases the end effector away from the mounting base. An inventive method of gripping a substrate comprises coupling a moveable gripper to a mounting base and magnetically biasing the moveable gripper in a closed position.

摘要翻译： 本发明提供了一种夹持器组件，其包括安装基座，该安装基座具有耦合到其上的第一磁体并具有联接到安装基座的可移动夹具。 可移动的夹持器具有耦合到其上的第二磁体并且包括适于接触晶片的端部执行器。 第一和第二磁体适于使得它们之间的磁力使端部执行器偏离安装基座。 夹持基底的创造性方法包括将可移动的夹持器联接到安装基座并将可移动的夹持器磁力偏置在闭合位置。

公开(公告)号：US06474712B1

公开(公告)日：2002-11-05

申请号：US09559889

申请日：2000-04-26

申请人： Boris I. Govzman ,  Manoocher Birang ,  Michael Sugarman ,  Anwar Husain

发明人： Boris I. Govzman ,  Manoocher Birang ,  Michael Sugarman ,  Anwar Husain

IPC分类号： B66C100

CPC分类号： H01L21/68707 ,  Y10S414/141

摘要： A gripper assembly is provided which supports a substrate in a vertical orientation. The gripper assembly's end effectors contact only the edge of the substrate. In a first aspect the end effectors each comprise a first pair of opposed surfaces and an second pair of opposed surfaces, all of which simultaneously contact the substrate, holding the substrate in a clamp-type manner. In a second aspect the end effectors each comprise a lower pair of opposed surfaces which simultaneously contact the substrate, and an upper pair of opposed surfaces, larger than the thickness of the substrate, which limit the substrate from horizontal tilting. In the second aspect the end effectors can close at a first elevation where they do not contact the substrate, and can then elevate to gently contact and support the substrate in a pocket-like manner. In a third aspect one of the end effectors has two pairs of opposed surfaces which simultaneously contact the substrate, and the other end effector has two pairs of opposed surfaces which limit the substrate from horizontal tilting. In any aspect no moving parts are required to limit the substrate's vertical and horizontal movement. In a further aspect, fingers to which the end effectors are coupled, are bent so that the gripper is not positioned above the substrate.

摘要翻译： 提供了一种夹持器组件，其以垂直取向支撑衬底。 夹持器组件的端部执行器仅接触基板的边缘。 在第一方面，端部执行器各自包括第一对相对表面和第二对相对表面，所述第二对相对表面同时接触基板，以夹紧方式保持基板。 在第二方面，端部执行器各自包括同时接触基板的下一对相对表面，以及大于基板厚度的上对对相对表面，其将基板限制为水平倾斜。 在第二方面，末端效应器可以在它们不接触衬底的第一高度处关闭，然后可以以袋状方式轻轻地接触和支撑衬底。 在第三方面中，一个端部执行器具有两对同时接触基板的相对表面，而另一端部执行器具有两对相对的表面，这些对面限制了基板的水平倾斜。 在任何方面，无需移动部件来限制基板的垂直和水平运动。 在另一方面，端部执行器耦合到的手指被弯曲，使得夹持器不位于衬底上方。

公开(公告)号：US20090241996A1

公开(公告)日：2009-10-01

申请号：US12345642

申请日：2008-12-29

申请人： Younes Achkire ,  Alexander N. Lerner ,  Boris I. Govzman ,  Boris Fishkin ,  Michael N. Sugarman ,  Rashid A. Mavliev ,  Haoquan Fang ,  Shijian Li ,  Guy E. Shirazi ,  Jianshe Tang

发明人： Younes Achkire ,  Alexander N. Lerner ,  Boris I. Govzman ,  Boris Fishkin ,  Michael N. Sugarman ,  Rashid A. Mavliev ,  Haoquan Fang ,  Shijian Li ,  Guy E. Shirazi ,  Jianshe Tang

IPC分类号： B08B3/00

CPC分类号： H01L21/67034 ,  B08B3/10 ,  H01L21/67751 ,  H01L21/681 ,  H01L21/68764 ,  Y10S414/139

摘要： In a first aspect, a module is provided that is adapted to process a wafer. The module includes a processing portion having one or more features such as (1) a rotatable wafer support for rotating an input wafer from a first orientation wherein the wafer is in line with a load port to a second orientation wherein the wafer is in line with an unload port; (2) a catcher adapted to contact and travel passively with a wafer as it is unloaded from the processing portion; (3) an enclosed output portion adapted to create a laminar air flow from one side thereof to the other; (4) an output portion having a plurality of wafer receivers; (5) submerged fluid nozzles; and/or (6) drying gas flow deflectors, etc. Other aspects include methods of wafer processing.

摘要翻译： 在第一方面，提供一种适于处理晶片的模块。 模块包括具有一个或多个特征的处理部分，例如（1）可旋转晶片支撑件，用于从第一取向旋转输入晶片，其中晶片与负载端口对准至第二取向，其中晶片与 卸货港 （2）捕捉器，其适于在从所述处理部分卸载时与晶片被动接触和行进; （3）适于产生从其一侧到另一侧的层流空气流的封闭输出部分; （4）具有多个晶片接收器的输出部分; （5）浸没式流体喷嘴; 和/或（6）干燥气体导流板等。其它方面包括晶片处理的方法。

公开(公告)号：US06626476B1

公开(公告)日：2003-09-30

申请号：US09618408

申请日：2000-07-18

申请人： Boris I. Govzman ,  Constantin Foxman

发明人： Boris I. Govzman ,  Constantin Foxman

IPC分类号： B66C142

CPC分类号： B25J15/0273

摘要： A robotic gripper is provided. The robotic gripper has a rail, a rotary actuator, and at least one slide component moveably mounted on the rail and operatively coupled to the rotary actuator. A first gripping finger is mounted to the at least one slide component so as to move therewith, and a second gripping finger is positioned so that an object may be selectively gripped and ungripped by the first and the second gripping fingers. In a first aspect a magnet is coupled to the rotary actuator and a magnet is coupled to the at least one slide component so that rotation of the rotary actuator selectively causes attraction or repulsion of the magnet coupled to the at least one slide component, thus causing the gripping fingers selectively to assume open and closed positions. In a further aspect, the rotary actuator comprises a rotatable arm. A first extension arm is coupled to the rotatable arm and to the first slide component so that the first slide component moves in a first and a second direction along the rail as the rotatable arm rotates in a first and a second direction, respectively. An object is gripped by placing the gripping fingers adjacent an object to be gripped and by rotating the actuator such that the gripping fingers grip the object.

摘要翻译： 提供机器人夹具。 机器人夹具具有轨道，旋转致动器以及可移动地安装在轨道上并且可操作地联接到旋转致动器的至少一个滑动部件。 第一夹持指状件被安装到至少一个滑动部件以便与其一起移动，并且第二夹持指状物被定位成使得物体可以被第一和第二夹持爪选择性地夹持并且不被夹持。 在第一方面，磁体联接到旋转致动器，并且磁体联接到至少一个滑动部件，使得旋转致动器的旋转选择性地引起耦合到至少一个滑动部件的磁体的吸引或排斥，从而导致 夹紧手指有选择地呈现打开和关闭位置。 在另一方面，旋转致动器包括可旋转臂。 第一延伸臂联接到可旋转臂和第一滑动部件，使得当可旋转臂分别沿第一和第二方向旋转时，第一滑动部件沿着轨道沿第一和第二方向移动。 通过将夹持爪放置在邻近待夹持的物体并通过使致动器旋转以使得夹持手指夹住物体来夹持物体。

公开(公告)号：US06386609B1

公开(公告)日：2002-05-14

申请号：US09590640

申请日：2000-06-09

申请人： Boris I. Govzman

发明人： Boris I. Govzman

IPC分类号： B66C100

CPC分类号： B25J15/0253

摘要： A gripper assembly is provided. The gripper assembly comprises a pair of moving assemblies. In an exemplary embodiment, the moving assemblies comprise a pair of grippers coupled to a pair of gripper fingers that have end effectors adapted to contact a wafer. A magnet is placed in each of the moving assemblies so that the attractive force between the magnets moves a portion of the moving assemblies toward each other.

摘要翻译： 提供夹具组件。 夹具组件包括一对移动组件。 在示例性实施例中，移动组件包括联接到一对夹持器指状物的一对夹持器，其具有适于接触晶片的端部执行器。 将磁体放置在每个移动组件中，使得磁体之间的吸引力将移动组件的一部分朝向彼此移动。