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1.PLASMA REACTOR WITH CENTER-FED MULTIPLE ZONE GAS DISTRIBUTION FOR IMPROVED UNIFORMITY OF CRITICAL DIMENSION BIAS 失效
标题翻译: 具有中心多区域气体分配的等离子体反应器,用于改进关键尺寸偏差的均匀性公开(公告)号:US20090272492A1
公开(公告)日:2009-11-05
申请号:US12143092
申请日:2008-06-20
申请人: Dan Katz , David Palagashvili , Brain K. Hatcher , Theodoros Panagopoulos , Valentin N. Todorow , Edward P. Hammond, IV , Alexander M. Paterson , Rodolfo P. Belen
发明人: Dan Katz , David Palagashvili , Brain K. Hatcher , Theodoros Panagopoulos , Valentin N. Todorow , Edward P. Hammond, IV , Alexander M. Paterson , Rodolfo P. Belen
IPC分类号: H01L21/3065
CPC分类号: H01L21/31116 , H01J37/3244 , H01J37/32449
摘要: A gas distribution assembly for the ceiling of a plasma reactor includes a center fed hub and an equal path length distribution gas manifold underlying the center fed hub.
摘要翻译: 用于等离子体反应器的天花板的气体分配组件包括中心供给的轮毂和位于中心供给轮毂下方的相等路径长度的分配气体歧管。