公开(公告)号：US09267205B1

公开(公告)日：2016-02-23

申请号：US13483779

申请日：2012-05-30

申请人： David Ishikawa ,  Abril Cabreros ,  Brian Burrows

发明人： David Ishikawa ,  Abril Cabreros ,  Brian Burrows

IPC分类号： C23C16/455 ,  C23C16/18

CPC分类号： C23C16/45572 ,  C23C16/18 ,  C23C16/45563 ,  C23C16/45565

摘要： A fastener system and method for supporting and retaining modular insulating quartz liners with gas apertures in close proximity to corresponding apertures in diffusers of gas showerheads. Tubular fasteners have a head, a tubular shank and a foot that extend through a liner plate nozzle into a diffuser plate. A keyway in the gas diffuser, aligned and coaxial with a diffuser nozzle, allows the foot to reach an arcuate concourse through a keyway where it can be locked by bayonet turning. The keyway is machined into the diffuser by EDM and is an inversion of the fastener tip geometry rotated about the axis of the tubular shank. Each fastener and nozzle set form a coaxial path for distributing processing gas to substrates through liner and diffuser plates from a plenum in showerheads of a MOCVD reactor.

摘要翻译： 一种紧固件系统和方法，用于支撑和保持具有气孔的模块化绝缘石英衬垫，其紧邻气体喷头的扩散器中的相应孔。 管状紧固件具有头部，管状柄和脚，其延伸穿过衬板喷嘴进入扩散板。 与扩散喷嘴对准并同轴的气体扩散器中的键槽允许脚通过键槽到达弧形大厅，在该位置处可通过卡口旋转锁定。 键槽通过EDM加工成扩散器，并且是围绕管状柄的轴线旋转的紧固件尖端几何形状的反转。 每个紧固件和喷嘴组形成同轴路径，用于通过衬套和扩散板将处理气体分配到MOCVD反应器的喷头中的增压室。

公开(公告)号：US20120247685A1

公开(公告)日：2012-10-04

申请号：US13078722

申请日：2011-04-01

申请人： Brian BURROWS ,  Brian BROWN ,  Thomas GMITTER ,  Gang HE

发明人： Brian BURROWS ,  Brian BROWN ,  Thomas GMITTER ,  Gang HE

IPC分类号： B32B38/10

CPC分类号： H01L31/18 ,  B32B43/006 ,  B32B2457/00 ,  H01L21/67086 ,  H01L21/67303 ,  H01L21/67346 ,  H01L21/67757 ,  H01L21/7813 ,  H01L31/1892 ,  H01L33/005 ,  Y02E10/50 ,  Y10T29/49824 ,  Y10T156/1111 ,  Y10T156/1168 ,  Y10T156/1978

摘要： An apparatus, system and method for performing ELO are disclosed. Device assemblies are contemporaneously etched in a stacked arrangement. Each device assembly may be placed in a respective tray, where the trays are overlapped and spaced apart from one another. In this manner, more device assemblies can be etched per unit area compared to conventional systems. Further, by stacking device assemblies during etching, the yield can be improved and/or the cost of the etch tank and associated hardware can be reduced.

摘要翻译： 公开了一种用于执行ELO的装置，系统和方法。 器件组件以堆叠的方式同时蚀刻。 每个设备组件可以放置在相应的托盘中，其中托盘重叠并且彼此间隔开。 以这种方式，与常规系统相比，每单位面积可以蚀刻更多的器件组件。 此外，通过在蚀刻期间堆叠器件组件，可以提高成品率和/或可以降低蚀刻槽和相关硬件的成本。

公开(公告)号：US20110214805A1

公开(公告)日：2011-09-08

申请号：US13039307

申请日：2011-03-02

申请人： Brian BROWN ,  Brian BURROWS ,  David BERKSTRESSER ,  Gang HE ,  Thomas J. GMITTER

发明人： Brian BROWN ,  Brian BURROWS ,  David BERKSTRESSER ,  Gang HE ,  Thomas J. GMITTER

IPC分类号： B32B38/10 ,  B32B37/14

CPC分类号： B32B43/006 ,  H01L21/67086 ,  H01L21/67092 ,  H01L21/67132 ,  H01L21/67706 ,  H01L21/67721 ,  H01L21/6776 ,  H01L21/7813 ,  H01L31/1896 ,  Y02E10/50 ,  Y10T156/1111 ,  Y10T156/15

摘要： Epitaxial lift off systems and methods are presented. In one embodiment a tape is disposed on the opposite side of the epitaxial material than the substrate is used to hold the epitaxial material during the etching and removal steps of the ELO process. In various embodiments, the apparatus for removing the ELO film from the substrates without damaging the ELO film may include an etchant reservoir, substrate handling and tape handling mechanisms, including mechanisms to manipulate (e.g., cause tension, peel, widen the etch gap, etc.) the lift off component during the lift off process.

摘要翻译： 提出了外延提升系统和方法。 在一个实施例中，在ELO工艺的蚀刻和去除步骤期间，将带设置在外延材料的相对侧上，而不是衬底用于保持外延材料。 在各种实施例中，用于从衬底上移除ELO膜而不损坏ELO膜的设备可以包括蚀刻剂储存器，衬底处理和带处理机构，包括操作机构（例如引起张力，剥离，加宽蚀刻间隙等） ）在剥离过程中脱离组件。

公开(公告)号：US10259206B2

公开(公告)日：2019-04-16

申请号：US13039307

申请日：2011-03-02

申请人： Brian Brown ,  Brian Burrows ,  David Berkstressor ,  Gang He ,  Thomas J Gmitter

发明人： Brian Brown ,  Brian Burrows ,  David Berkstressor ,  Gang He ,  Thomas J Gmitter

IPC分类号： B32B38/10 ,  B32B37/14 ,  B32B43/00 ,  H01L21/67 ,  H01L21/677 ,  H01L21/78 ,  H01L31/18

摘要： Epitaxial lift off systems and methods are presented. In one embodiment a tape is disposed on the opposite side of the epitaxial material than the substrate is used to hold the epitaxial material during the etching and removal steps of the ELO process. In various embodiments, the apparatus for removing the ELO film from the substrates without damaging the ELO film may include an etchant reservoir, substrate handling and tape handling mechanisms, including mechanisms to manipulate (e.g., cause tension, peel, widen the etch gap, etc.) the lift off component during the lift off process.

公开(公告)号：US20090031037A1

公开(公告)日：2009-01-29

申请号：US12112023

申请日：2008-04-30

申请人： Jordan Mendell ,  Timothy Shay ,  Brian Burrows

发明人： Jordan Mendell ,  Timothy Shay ,  Brian Burrows

IPC分类号： G06F15/16

CPC分类号： H04N21/44016 ,  H04N21/2187 ,  H04N21/23406 ,  H04N21/23424 ,  H04N21/8106

摘要： A method and system of streaming media content is disclosed. The method and system includes a process step and structures for inputting the live feed into a first audio card having an output. Another process step and structures are provided for inputting the output of the first audio card into a FIFO buffer having an output. Another process step and structures are provided for inputting the output of the FIFO buffer into a virtual audio card having an output. Another process step and structures are provided for inserting additional content into a second audio card by replacing content to be substituted where the additional content and the content to be replaced do not have to be of the same duration. Another process step and structures are provided for mixing the output from the first audio card and the additional content by the second audio card to provide a mixed output. Another process step and structures are provided for inputting the mixed output of the second audio card into an encoder having an output. Another process step and structures are provided for streaming the output of the encoder over a network.

摘要翻译： 公开了流媒体内容的方法和系统。 该方法和系统包括用于将实况馈送输入到具有输出的第一音频卡的处理步骤和结构。 提供另一个处理步骤和结构，用于将第一音频卡的输出输入到具有输出的FIFO缓冲器中。 提供另一个处理步骤和结构，用于将FIFO缓冲器的输出输入具有输出的虚拟音频卡。 提供了另一个处理步骤和结构，用于通过将附加内容和要替换的内容不必具有相同持续时间来替换待替换的内容来将附加内容插入第二音频卡。 提供了另一个处理步骤和结构，用于混合来自第一声卡的输出和第二声卡的附加内容以提供混合输出。 提供了另一个处理步骤和结构，用于将第二音频卡的混合输出输入到具有输出的编码器中。 提供了另一个处理步骤和结构，用于通过网络流式传输编码器的输出。

公开(公告)号：US20080072820A1

公开(公告)日：2008-03-27

申请号：US11767619

申请日：2007-06-25

申请人： Brian Burrows ,  Craig Metzner ,  Dennis Demars ,  Roger Anderson ,  Juan Chacin ,  David Carlson ,  David Ishikawa ,  Jeffrey Campbell ,  Richard Collins ,  Keith Magill ,  Imran Afzal

发明人： Brian Burrows ,  Craig Metzner ,  Dennis Demars ,  Roger Anderson ,  Juan Chacin ,  David Carlson ,  David Ishikawa ,  Jeffrey Campbell ,  Richard Collins ,  Keith Magill ,  Imran Afzal

IPC分类号： B05C11/00

CPC分类号： H01L21/67115 ,  H01L21/67017 ,  H01L21/6719

摘要： The present invention provides methods and apparatus for processing semiconductor substrates. Particularly, the present invention provides a modular processing cell to be used in a cluster tool. The modular semiconductor processing cell of the present invention comprises a chamber having an inject cap, a gas panel module configured to supply one or more processing gas to the chamber through the inject cap, wherein the gas panel module is position adjacent the inject cap. The processing cell further comprises a lamp module positioned below the chamber. The lamp module comprises a plurality of vertically oriented lamps.

摘要翻译： 本发明提供了半导体衬底的处理方法和装置。 特别地，本发明提供了一种在群集工具中使用的模块化处理单元。 本发明的模块化半导体处理单元包括具有注入盖的腔室，配置成通过喷射盖向腔室供应一种或多种处理气体的气体面板模块，其中气体面板模块位于与喷射盖相邻的位置。 处理室还包括位于室下方的灯模块。 灯模块包括多个垂直取向的灯。

公开(公告)号：US4092462A

公开(公告)日：1978-05-30

申请号：US786259

申请日：1977-04-11

申请人： Herbert Giess ,  Brian Burrows ,  Marie-Michelle Janssoone

发明人： Herbert Giess ,  Brian Burrows ,  Marie-Michelle Janssoone

IPC分类号： C22C11/06 ,  H01M4/68 ,  H01M10/44

CPC分类号： C22C11/06 ,  H01M4/685

摘要： An electrode grid for lead accumulators, said grid being formed from a lead alloy free from antimony and consisting of tellurium, arsenic and silver in a total concentration of at most 0.1% by weight, at least 0.1% tin by weight of the alloy, and the balance pure lead.

摘要翻译： 一种用于铅蓄电池的电极栅格，所述栅极由不含锑，由碲，砷和银组成的铅合金形成，其总浓度为0.1重量％以下，合金重量的至少0.1重量％，以及 平衡纯铅。

公开(公告)号：US08657994B2

公开(公告)日：2014-02-25

申请号：US13078722

申请日：2011-04-01

申请人： Brian Burrows ,  Brian Brown ,  Thomas Gmitter ,  Gang He

发明人： Brian Burrows ,  Brian Brown ,  Thomas Gmitter ,  Gang He

IPC分类号： B32B38/10

CPC分类号： H01L31/18 ,  B32B43/006 ,  B32B2457/00 ,  H01L21/67086 ,  H01L21/67303 ,  H01L21/67346 ,  H01L21/67757 ,  H01L21/7813 ,  H01L31/1892 ,  H01L33/005 ,  Y02E10/50 ,  Y10T29/49824 ,  Y10T156/1111 ,  Y10T156/1168 ,  Y10T156/1978

摘要： An apparatus, system and method for performing ELO are disclosed. Device assemblies are contemporaneously etched in a stacked arrangement. Each device assembly may be placed in a respective tray, where the trays are overlapped and spaced apart from one another. In this manner, more device assemblies can be etched per unit area compared to conventional systems. Further, by stacking device assemblies during etching, the yield can be improved and/or the cost of the etch tank and associated hardware can be reduced.

摘要翻译： 公开了一种用于执行ELO的装置，系统和方法。 器件组件以堆叠的方式同时蚀刻。 每个设备组件可以放置在相应的托盘中，其中托盘重叠并且彼此间隔开。 以这种方式，与常规系统相比，每单位面积可以蚀刻更多的器件组件。 此外，通过在蚀刻期间堆叠器件组件，可以提高成品率和/或可以降低蚀刻槽和相关硬件的成本。