公开(公告)号：US20140306301A1

公开(公告)日：2014-10-16

申请号：US13860560

申请日：2013-04-11

申请人： Yonglin Xie ,  Carolyn R. Ellinger ,  Mark D. Evans ,  Joseph Jech, JR.

发明人： Yonglin Xie ,  Carolyn R. Ellinger ,  Mark D. Evans ,  Joseph Jech, JR.

IPC分类号： B81B3/00

CPC分类号： B81B3/0021 ,  B41J2/1433 ,  B41J2/162 ,  B41J2/1626

摘要： A MEMS device includes a silicon substrate. The silicon substrate includes a plurality of dielectric material grooves spaced apart from each other. The silicon substrate also includes a through hole with a portion of the through hole being located between the plurality of dielectric material grooves when viewed from a direction perpendicular to a surface of the silicon substrate.

摘要翻译： MEMS器件包括硅衬底。 硅衬底包括彼此间隔开的多个电介质材料槽。 硅衬底还包括通孔，当从垂直于硅衬底的表面的方向观察时，通孔的一部分位于多个电介质材料沟槽之间。

公开(公告)号：US08770722B2

公开(公告)日：2014-07-08

申请号：US13432017

申请日：2012-03-28

申请人： Hrishikesh V. Panchawagh ,  Yonglin Xie ,  Carolyn R. Ellinger ,  Michael A. Marcus ,  Thomas W. Palone

发明人： Hrishikesh V. Panchawagh ,  Yonglin Xie ,  Carolyn R. Ellinger ,  Michael A. Marcus ,  Thomas W. Palone

IPC分类号： B41J2/05

CPC分类号： B41J2/14016 ,  B41J2/14201 ,  B41J2/18 ,  B41J2/211 ,  B41J2202/12

摘要： A liquid dispenser includes a first liquid supply that provides a carrier liquid under pressure that flows from the first liquid supply through a first liquid supply channel through a liquid dispensing channel through a liquid return channel and back to the first liquid supply continuously during a drop dispensing operation. A second liquid supply provides a functional liquid to the liquid dispensing channel through a second liquid supply channel. A drop formation device, associated with an interface of the second liquid supply channel and the liquid dispensing channel, is selectively actuated to form a discrete drop of the functional liquid in the carrier liquid flowing through the liquid dispensing channel. The functional liquid is immiscible in the carrier liquid. A drop ejection device is selectively actuated to divert the discrete drop of the functional liquid and a portion of the carrier liquid flowing through the liquid dispensing channel toward the outlet opening of the liquid dispensing channel.

摘要翻译： 液体分配器包括第一液体供应装置，其提供压力下的载体液体，所述载体液体在第一液体供应通过第一液体供应通道通过液体分配通道通过液体返回通道流动并且在滴液分配期间连续返回到第一液体供应 操作。 第二液体供应通过第二液体供应通道向液体分配通道提供功能液体。 选择性地致动与第二液体供应通道和液体分配通道的界面相关联的液滴形成装置，以在流过液体分配通道的载体液体中形成离散的功能液滴。 功能液体在载液中是不混溶的。 液滴喷射装置被选择性地致动以将功能液体的离散液滴和流过液体分配通道的载液的一部分转向液体分配通道的出口。

公开(公告)号：US08715894B2

公开(公告)日：2014-05-06

申请号：US13474757

申请日：2012-05-18

申请人： Lyn M. Irving ,  David H. Levy ,  Mark E. Irving ,  Carolyn R. Ellinger

发明人： Lyn M. Irving ,  David H. Levy ,  Mark E. Irving ,  Carolyn R. Ellinger

IPC分类号： G03F1/00

CPC分类号： H01L27/1288 ,  G03F7/2016 ,  G03F7/2018 ,  G03F7/40 ,  H01L27/1214 ,  H01L27/1225 ,  H01L29/66765 ,  H01L29/7869 ,  Y10T428/24851

摘要： The invention relates to a process for forming a structure comprising providing a support, coating one side of said support with a colored mask, coating a layer photopatternable by visible light, and exposing the layer through the colored mask with visible light to photopattern the layer.

摘要翻译： 本发明涉及一种用于形成结构的方法，包括提供支撑体，用彩色掩模涂覆所述支撑体的一侧，涂覆可见光的可见光层，以及通过可见光将层暴露于彩色掩模以对该层进行光图案化。

公开(公告)号：US20140065838A1

公开(公告)日：2014-03-06

申请号：US13600264

申请日：2012-08-31

申请人： Carolyn R. Ellinger ,  David H. Levy ,  Shelby F. Nelson

发明人： Carolyn R. Ellinger ,  David H. Levy ,  Shelby F. Nelson

IPC分类号： H01L21/3105 ,  H01L21/318 ,  H01L21/316

CPC分类号： H01L21/02178 ,  C23C16/04 ,  C23C16/45525 ,  H01L21/022 ,  H01L21/0228 ,  H01L21/02299 ,  H01L21/02334 ,  H01L21/0234 ,  H01L21/02348 ,  H01L29/4908 ,  H01L29/66765

摘要： A method of producing an inorganic thin film dielectric material layer includes providing a substrate. A first inorganic thin film dielectric material layer is deposited on the substrate using an atomic layer deposition process. The first inorganic thin film dielectric material layer is treated after its deposition. A second inorganic thin film dielectric material layer is deposited on the treated surface of the first inorganic thin film dielectric material layer using an atomic layer deposition process.

摘要翻译： 无机薄膜电介质材料层的制造方法包括提供基板。 使用原子层沉积工艺在衬底上沉积第一无机薄膜电介质材料层。 第一种无机薄膜介电材料层在沉积后进行处理。 使用原子层沉积工艺在第一无机薄膜电介质材料层的处理表面上沉积第二无机薄膜电介质材料层。

公开(公告)号：US20140065803A1

公开(公告)日：2014-03-06

申请号：US13600292

申请日：2012-08-31

申请人： Carolyn R. Ellinger ,  David H. Levy ,  Shelby F. Nelson

发明人： Carolyn R. Ellinger ,  David H. Levy ,  Shelby F. Nelson

IPC分类号： C23C16/04 ,  H01L21/20

CPC分类号： C23C16/042 ,  H01L21/02178 ,  H01L21/022 ,  H01L21/0228 ,  H01L21/02304 ,  H01L21/02422 ,  H01L21/02488 ,  H01L21/02521 ,  H01L21/02642 ,  H01L29/4908 ,  H01L29/66765

摘要： A method of producing an inorganic multi-layered thin film structure includes providing a substrate. A patterned deposition inhibiting material layer is provided on the substrate. A first inorganic thin film material layer is selectively deposited on a region of the substrate where the deposition inhibiting material layer is not present using an atomic layer deposition process. A second inorganic thin film material layer is selectively deposited on the region of the substrate where the thin film deposition inhibiting material layer is not present using an atomic layer deposition process.

摘要翻译： 无机多层薄膜结构体的制造方法包括提供基板。 在衬底上设置有图案化的沉积抑制材料层。 使用原子层沉积工艺，在不存在沉积抑制材料层的基板的区域上选择性地沉积第一无机薄膜材料层。 使用原子层沉积工艺，在不存在薄膜沉积抑制材料层的基板的区域上选择性地沉积第二无机薄膜材料层。

公开(公告)号：US20130257996A1

公开(公告)日：2013-10-03

申请号：US13432044

申请日：2012-03-28

申请人： Hrishikesh V. Panchawagh ,  Thomas W. Palone ,  Jeremy M. Grace ,  Michael A. Marcus ,  Carolyn R. Ellinger ,  Kathleen M. Vaeth

发明人： Hrishikesh V. Panchawagh ,  Thomas W. Palone ,  Jeremy M. Grace ,  Michael A. Marcus ,  Carolyn R. Ellinger ,  Kathleen M. Vaeth

IPC分类号： B41J2/05

CPC分类号： B41J2/0057 ,  B05B7/0408 ,  B05C5/00 ,  B41J2/14 ,  B41J2/175 ,  B41J2/2107 ,  B41J2002/022

摘要： A liquid dispenser array structure includes a liquid dispensing channel. A first liquid supply provides a carrier liquid that flows continuously through an outlet of the liquid dispensing channel during a drop dispensing operation. A plurality of liquid dispensers, located on a common substrate, includes a liquid supply channel and a second liquid supply that provides a functional liquid, immiscible in the carrier liquid, to the liquid dispensing channel through the liquid supply channel. A drop formation device, associated with an interface of the liquid supply channel and the liquid dispensing channel, is selectively actuated to form a discrete drop of the functional liquid in the carrier liquid flowing through the liquid dispensing channel.

摘要翻译： 液体分配器阵列结构包括液体分配通道。 第一液体供应提供在液滴分配操作期间连续流过液体分配通道的出口的载液。 位于公共基板上的多个液体分配器包括液体供应通道和第二液体供应源，其通过液体供应通道向液体分配通道提供在载体液体中不混溶的功能液体。 选择性地致动与液体供应通道和液体分配通道的界面相关联的液滴形成装置，以在流过液体分配通道的载液中形成离散的功能液滴。

公开(公告)号：US08328335B2

公开(公告)日：2012-12-11

申请号：US12911758

申请日：2010-10-26

申请人： Yonglin Xie ,  Joseph Jech, Jr. ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Ali G. Lopez ,  Qing Yang

发明人： Yonglin Xie ,  Joseph Jech, Jr. ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Ali G. Lopez ,  Qing Yang

IPC分类号： B41J2/04

CPC分类号： B41J2/14016 ,  B41J2002/14403 ,  B41J2002/14475 ,  B41J2202/12

摘要： A liquid dispenser is provided that includes a liquid supply channel, a liquid dispensing channel, and a liquid return channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening that includes a downstream edge relative to a direction of liquid flow through the liquid dispensing channel. The downstream edge is sloped relative to the surface of the wall of the liquid dispensing channel. A liquid is provided that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A liquid drop is caused to be ejected from the outlet opening of the liquid dispensing channel by selectively actuating a diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.

摘要翻译： 提供了一种液体分配器，其包括液体供应通道，液体分配通道和液体返回通道。 液体分配通道包括壁。 墙壁包括一个表面。 壁的一部分限定出口开口，其包括相对于流过液体分配通道的液体流动方向的下游边缘。 下游边缘相对于液体分配通道的壁的表面倾斜。 提供从液体供应通道通过液体分配通道流到液体返回通道的液体。 通过选择性地致动分流器构件以使流动的液体的一部分通过液体分配通道的出口开口而使液滴从液体分配通道的出口开口排出。

公开(公告)号：US20120268528A1

公开(公告)日：2012-10-25

申请号：US13089582

申请日：2011-04-19

申请人： Carolyn R. Ellinger ,  James A. Katerberg ,  James D. Huffman

发明人： Carolyn R. Ellinger ,  James A. Katerberg ,  James D. Huffman

IPC分类号： B41J2/04

CPC分类号： B41J2/14 ,  B41J2002/14346 ,  B41J2002/14403 ,  B41J2002/14475 ,  B41J2202/12

摘要： A method of ejecting liquid includes providing a liquid dispenser including a substrate and a diverter member. A first portion of the substrate defines a liquid dispensing channel including an outlet opening and a second portion of the substrate defines an outer boundary of a cavity. Other portions of the substrate define a liquid supply channel and a liquid return channel. The diverter member includes a MEMS transducing member. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate such that the compliant membrane forms a portion of a wall of the liquid dispensing channel. The wall is positioned opposite the outlet opening. A continuous flow of liquid is provided from a liquid supply through the liquid supply channel through the liquid dispensing channel through the liquid return channel and back to the liquid supply. The diverter member is selectively actuated to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel when drop ejection is desired.

摘要翻译： 喷射液体的方法包括提供包括基底和转向构件的液体分配器。 衬底的第一部分限定包括出口开口的液体分配通道，并且衬底的第二部分限定空腔的外边界。 衬底的其他部分限定了液体供应通道和液体返回通道。 分流器构件包括MEMS换能构件。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 柔性膜的第二部分锚固到基底上，使得柔顺膜形成液体分配通道的壁的一部分。 墙壁位于出口开口对面。 从液体供应通道通过液体分配通道通过液体返回通道提供连续的液体流并返回到液体供应。 当需要液滴喷射时，分流器构件被选择性地致动以使流过液体分配通道的液体的一部分通过液体分配通道的出口打开。

公开(公告)号：US07938517B2

公开(公告)日：2011-05-10

申请号：US12431826

申请日：2009-04-29

申请人： Yonglin Xie ,  Carolyn R. Ellinger ,  Qing Yang

发明人： Yonglin Xie ,  Carolyn R. Ellinger ,  Qing Yang

IPC分类号： B41J2/09

CPC分类号： B41J2/09

摘要： A method of printing and an apparatus for controlling the directionality of liquid emitted from nozzles of a printhead are provided. Example embodiments of the apparatus include directionality control of liquid jets or liquid drops using a liquid jet directionality control mechanism. Example embodiments of the liquid jet directionality control mechanism include asymmetric energy application device configurations, nozzle geometry configurations, liquid delivery channel geometry configurations, or combinations of these configurations.

摘要翻译： 提供了一种印刷方法和用于控制从打印头的喷嘴排出的液体的方向性的装置。 该装置的示例性实施例包括使用液体喷射方向性控制机构的液体射流或液滴的方向性控制。 液体喷射方向性控制机构的示例性实施例包括不对称的能量施加装置配置，喷嘴几何形状，液体输送通道几何结构或这些构造的组合。

公开(公告)号：US20090081842A1

公开(公告)日：2009-03-26

申请号：US11861491

申请日：2007-09-26

申请人： Shelby F. Nelson ,  David H. Levy ,  Lyn M. Irving ,  Peter J. Cowdery-Corvan ,  Diane C. Freeman ,  Carolyn R. Ellinger

发明人： Shelby F. Nelson ,  David H. Levy ,  Lyn M. Irving ,  Peter J. Cowdery-Corvan ,  Diane C. Freeman ,  Carolyn R. Ellinger

IPC分类号： H01L21/336

CPC分类号： H01L27/1259 ,  B33Y80/00 ,  C23C16/407 ,  C23C16/45551 ,  C23C16/45595 ,  C23C16/545 ,  H01L27/1214 ,  H01L27/1225

摘要： The present invention relates to a process of making thin film electronic components and devices, such as thin film transistors, environmental barrier layers, capacitors, insulators and bus lines, where most or all of the layers are made by an atmospheric atomic layer deposition process.

摘要翻译： 本发明涉及薄膜电子元件和薄膜晶体管，环境屏障层，电容器，绝缘子和总线线路的制造方法，其中大部分或全部层通过大气原子层沉积工艺制成。