Abstract:
A thin film transistor (TFT) array substrate and a method of manufacturing the same that is capable of decreasing the number of usage of exposure masks to reduce the process time and the process costs and excessively etching a passivation film below a photoresist pattern to easily perform a lift-off process of the photoresist pattern are disclosed. The TFT array substrate includes a gate line layer including a gate line formed on a substrate, a gate electrode diverging from the gate line, and a gate pad formed at the end of the gate line, a gate insulation film formed on the gate line layer, a semiconductor layer formed on the gate insulation film above the gate electrode, a data line layer including a data line intersecting the gate line, source and drain electrodes formed at opposite sides of the semiconductor layer, and a data pad formed at the end of the data line, a pixel electrode contacting the drain electrode, first and second oxidation preventing films contacting the gate pad and the data pad, and an at least two-layered passivation film deposited on the data line layer. The uppermost layer of the at least two-layered passivation film is formed at the remaining region excluding a region where the pixel electrode and the first and second oxidation preventing films are formed.
Abstract:
A liquid crystal display (LCD) includes: a first substrate divided into a pixel part and first and second pad parts; a gate electrode and a gate line formed at the pixel part of the first substrate; an active pattern formed as an island on the gate electrode and having a width smaller than the gate electrode; an insulation film formed on the first substrate and having first and second contact holes exposing source and drain regions of the active pattern, respectively; source and drain electrodes formed at the pixel part of the first substrate and electrically connected with the source and drain regions of the active pattern via the first and second contact holes; a data line formed at the pixel part of the first substrate and crossing the gate line to define a pixel region; an etch stopper positioned between the source and drain electrodes and formed as an insulation film; a pixel electrode electrically connected with the drain electrode; and a second substrate attached with the first substrate in a facing manner.
Abstract:
An array substrate for an in-plane switching mode liquid crystal display device includes: a gate line on a substrate; a data line crossing the gate line to define a pixel region on the substrate; a common line parallel to and spaced apart from the gate line; a gate electrode connected to the gate line; a semiconductor layer disposed over the gate electrode, wherein an area of the semiconductor layer is less than an area of the gate electrode; a source electrode connected to the data line, and a drain electrode spaced apart from the source electrode, the source and drain electrodes disposed on the semiconductor layer; a plurality of pixel electrodes integrated with the drain electrode and extending from the drain electrode in the pixel region; and a plurality of common electrodes connected to the common line and alternately arranged with the plurality of pixel electrodes, wherein each of the source electrode, the drain electrode, the data line and the plurality of pixel electrodes are comprised from a first conductive material layer and a second conductive material layer, wherein the second conductive material layer is disposed on the first conductive material layer.
Abstract:
A method of manufacturing an array substrate for a liquid crystal display device includes forming a gate electrode and a gate line on a substrate through a first mask process, forming a first insulating layer, an active layer, an ohmic contact layer, a buffer metallic layer, and a data line on the substrate including the gate electrode and the gate line through a second mask process, and forming a source electrode, a drain electrode, and a pixel electrode through a third mask process, the pixel electrode extending from the drain electrode, wherein the active layer is disposed over and within the gate electrode.
Abstract:
An array substrate for a liquid crystal display device includes a substrate, a gate line on the substrate, a data line crossing the gate line to define a pixel region, a thin film transistor including a gate electrode, an active layer, an ohmic contact layer, a buffer metallic layer, a source electrode and a drain electrode, the thin film transistor being electrically connected to the gate line and the data line and a pixel electrode in the pixel region and connected to the thin film transistor, wherein the active layer is disposed over and within the gate electrode.
Abstract:
An array substrate for a liquid crystal display device includes a gate and a data lines on a substrate intersecting each other, the data line includes a first layer formed of a transparent conductive material and a second layer under the first layer; a thin film transistor including a gate electrode connected to the gate line formed at respective intersection of the gate and data lines, an insulating layer on the gate electrode, an active layer on the insulating layer disposed within the gate electrode, an etch stopper on the active layer, an ohmic contact layer on the etch stopper, a source electrode on the ohmic contact layer and connected to the first layer, a drain electrode spaced apart from the source electrode; a pixel electrode connected to the drain electrode, wherein the source, drain and pixel electrodes are formed of the same layer and material as the first layer.
Abstract:
A liquid crystal display device according to the present invention includes a gate line on a substrate; a data line crossing the gate line with a gate insulating film to define a pixel area; a thin film transistor connected to the gate line and the data line; a semiconductor pattern overlapped along the data line; a double layer passivation film covering the data line and the thin film transistor, wherein layers of the passivation film have different etching rates; and a pixel electrode formed in a pixel hole penetrating an upper passivation film of the double layer passivation film and connected to a drain electrode of the thin film transistor exposed through a drain contact hole, the pixel electrode forming a border with the upper passivation film surrounding the pixel hole.
Abstract:
An array substrate for an in-plane switching mode liquid crystal display device includes: a gate line on a substrate; a data line crossing the gate line to define a pixel region on the substrate; a common line parallel to and spaced apart from the gate line; a gate electrode connected to the gate line; a semiconductor layer disposed over the gate electrode, wherein an area of the semiconductor layer is less than an area of the gate electrode; a source electrode connected to the data line, and a drain electrode spaced apart from the source electrode, the source and drain electrodes disposed on the semiconductor layer; a plurality of pixel electrodes integrated with the drain electrode and extending from the drain electrode in the pixel region; and a plurality of common electrodes connected to the common line and alternately arranged with the plurality of pixel electrodes, wherein each of the source electrode, the drain electrode, the data line and the plurality of pixel electrodes are comprised from a first conductive material layer and a second conductive material layer, wherein the second conductive material layer is disposed on the first conductive material layer.
Abstract:
An array substrate for a liquid crystal display device includes a gate and a data lines on a substrate intersecting each other, the data line includes a first layer formed of a transparent conductive material and a second layer under the first layer; a thin film transistor including a gate electrode connected to the gate line formed at respective intersection of the gate and data lines, an insulating layer on the gate electrode, an active layer on the insulating layer disposed within the gate electrode, an etch stopper on the active layer, an ohmic contact layer on the etch stopper, a source electrode on the ohmic contact layer and connected to the first layer, a drain electrode spaced apart from the source electrode; a pixel electrode connected to the drain electrode, wherein the source, drain and pixel electrodes are formed of the same layer and material as the first layer.
Abstract:
A liquid crystal display (LCD) includes: a first substrate divided into a pixel part and first and second pad parts; a gate electrode and a gate line formed at the pixel part of the first substrate; an active pattern formed as an island on the gate electrode and having a width smaller than the gate electrode; an insulation film formed on the first substrate and having first and second contact holes exposing source and drain regions of the active pattern, respectively; source and drain electrodes formed at the pixel part of the first substrate and electrically connected with the source and drain regions of the active pattern via the first and second contact holes; a data line formed at the pixel part of the first substrate and crossing the gate line to define a pixel region; an etch stopper positioned between the source and drain electrodes and formed as an insulation film; a pixel electrode electrically connected with the drain electrode; and a second substrate attached with the first substrate in a facing manner.