公开(公告)号：US08650660B2

公开(公告)日：2014-02-11

申请号：US13306867

申请日：2011-11-29

申请人： Jian Shi ,  Yan Hu ,  Shuiqing Hu ,  Ji Ma ,  Chanmin Su

发明人： Jian Shi ,  Yan Hu ,  Shuiqing Hu ,  Ji Ma ,  Chanmin Su

IPC分类号： G01Q20/00

CPC分类号： G01Q20/04 ,  G01Q10/065 ,  G01Q20/00 ,  G01Q60/32

摘要： An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.

摘要翻译： AFM成像（峰值力攻丝（PFT）模式）的改进模式使用力作为反馈变量来减少尖端 - 样本相互作用力，同时保持所有现有AFM操作模式可实现的扫描速度。 通过改进的分辨率和高的样品通量实现样品成像和机械性能测绘，该模式可在不同的环境中工作，包括气态，流体和真空。 通过消除专家用户监控成像的需要，便于使用。

公开(公告)号：US08646109B2

公开(公告)日：2014-02-04

申请号：US12958323

申请日：2010-12-01

申请人： Yan Hu ,  Shuiqing Hu ,  Chanmin Su ,  Jian Shi ,  Ji Ma

发明人： Yan Hu ,  Shuiqing Hu ,  Chanmin Su ,  Jian Shi ,  Ji Ma

IPC分类号： G01Q10/00

CPC分类号： G01Q20/00 ,  G01Q10/065 ,  G01Q60/32

摘要： An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.

摘要翻译： AFM成像（峰值力攻丝（PFT）模式）的改进模式使用力作为反馈变量来减少尖端 - 样本相互作用力，同时保持所有现有AFM操作模式可实现的扫描速度。 通过改进的分辨率和高的样品通量实现样品成像和机械性能测绘，该模式可在不同的环境中工作，包括气态，流体和真空。 通过消除专家用户监控成像的需要，便于使用。

公开(公告)号：US20090222958A1

公开(公告)日：2009-09-03

申请号：US12398011

申请日：2009-03-04

申请人： Chanmin Su ,  Nghi Phan ,  Craig Prater

发明人： Chanmin Su ,  Nghi Phan ,  Craig Prater

IPC分类号： G12B21/08

CPC分类号： G01Q10/065 ,  G01Q60/366

摘要： A method includes determining the point at which a tip of a probe based instrument contacts a sample and/or the area of that contact by dynamically oscillating a cantilever of the instrument in flexural and/or torsional modes. The method additionally includes using oscillation characteristics, such as amplitude, phase, and resonant frequency, to determine the status of the contact and to provide quantitative data. Static and quasi-static measurements, including contact stiffness and elastic modulus, can be obtained from the thus obtained data. Quasistatic measurements, such as creep and viscoelastic modulus, can be obtained by repeating the static measurements for a number of force profiles at different force application rates and correlating the resultant data using known theories.

摘要翻译： 一种方法包括通过在弯曲和/或扭转模式中动态地振动器械的悬臂来确定基于探针的器械的尖端接触样品和/或接触区域的点。 该方法还包括使用诸如振幅，相位和谐振频率的振荡特性来确定触点的状态并提供定量数据。 从这样获得的数据可以获得静态和准静态测量，包括接触刚度和弹性模量。 通过在不同的施加力下重复对多个力分布的静态测量，可以获得诸如蠕变和粘弹性模量的准静态测量，并使用已知理论对所得数据进行相关。

公开(公告)号：US20090032706A1

公开(公告)日：2009-02-05

申请号：US11832881

申请日：2007-08-02

申请人： Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

发明人： Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

IPC分类号： G01N23/00

CPC分类号： G01Q10/04 ,  G01Q10/065 ,  G01Q20/02 ,  G01Q60/38

摘要： A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.

摘要翻译： 提供一种具有在力控制反馈下快速扫描任意特征的大样本的能力的方法和装置，因此必须获得高分辨率图像。 该方法包括在SPM的探针和样品之间产生相对扫描运动，以至少以30线/秒的速率扫描探针至少4微米的扫描范围，并且控制与力控制回转的探针 - 样品相互作用 速率至少为1毫米/秒。 能够实现这些结果的优选SPM具有力控制器，其具有至少10kHz的至少闭环带宽的力控制带宽。

公开(公告)号：US20070089498A1

公开(公告)日：2007-04-26

申请号：US11537535

申请日：2006-09-29

申请人： Chanmin Su ,  Peter Lombrozo

发明人： Chanmin Su ,  Peter Lombrozo

IPC分类号： G01B5/28

CPC分类号： G01Q10/045 ,  G01Q10/04

摘要： A probe instrument having a probe that interacts with a sample surface to perform a mechanical property measurement at high speed includes a scanner producing relative motion between the sample and the probe. In addition, a probe actuator produces relative motion between the sample and the probe, in a generally vertical direction, and a controller that generates a scanner drive signal and an actuator drive signal. The probe actuator is responsive to the actuator drive signal and has an operable bandwidth of at least about 50-80 kHz to perform the fast force curve measurements. The probe actuator is preferably located at least partially on the cantilever. Moreover, feedback during normal operation may be interrupted to perform a force curve measurement with the integrated actuator.

摘要翻译： 具有与样品表面相互作用以便高速进行机械性能测量的探针的探针仪器包括产生样品和探针之间的相对运动的扫描器。 此外，探针致动器在大致垂直的方向上产生样品和探针之间的相对运动，以及产生扫描仪驱动信号和致动器驱动信号的控制器。 探头致动器响应于致动器驱动信号，并且具有至少约50-80kHz的可操作带宽以执行快速力曲线测量。 探针致动器优选地至少部分地位于悬臂上。 此外，正常操作期间的反馈可能被中断，以使用集成执行器执行力曲线测量。

公开(公告)号：US20160018437A1

公开(公告)日：2016-01-21

申请号：US14773135

申请日：2014-03-14

申请人： Gregory ANDREEV ,  Sergey OSECHINSKIY ,  Stephen MINNE ,  Chanmin SU ,  Bruker Nano, Inc.

发明人： Gregory Andreev ,  Sergey Osechinskiy ,  Stephen Minne ,  Chanmin Su

IPC分类号： G01Q60/18

CPC分类号： G01Q30/04 ,  G01Q20/02 ,  G01Q60/18 ,  G01Q60/22

摘要： Apparatus and method for nano-identification a sample by measuring, with the use of evanescent waves, optical spectra of near-field interaction between the sample and optical nanoantenna oscillating at nano-distance above the sample and discriminating background backscattered radiation not sensitive to such near-field interaction. Discrimination may be effectuated by optical data acquisition at periodically repeated moments of nanoantenna oscillation without knowledge of distance separating nanoantenna and sample. Measurement includes chemical identification of sample on nano-scale, during which absolute value of phase corresponding to near-field radiation representing said interaction is measured directly, without offset. Calibration of apparatus and measurement is provided by performing, prior to sample measurement, a reference measurement of reference sample having known index of refraction. Nano-identification is realized with sub-50 nm resolution and optionally, in the mid-infrared portion of the spectrum.

摘要翻译： 用于纳米识别样品的装置和方法通过使用ev逝波测量在样品和在样品之上的纳米距离处振荡的样品和光学纳米天线之间的近场相互作用的光谱，并且鉴别背景散射辐射对这种近似不敏感 场相互作用。 通过在纳秒天线振荡的周期性重复时刻的光学数据采集可以实现歧视，而不知道距离分离纳米天线和样品。 测量包括纳米尺度上的样品的化学鉴定，其中直接测量相应于表示所述相互作用的近场辐射的相位的绝对值，而没有偏移。 仪器和测量的校准通过在样品测量之前执行具有已知折射率的参考样品的参考测量来提供。 纳米识别实现了低于50nm的分辨率，并且可选地在光谱的中红外部分中实现。

公开(公告)号：US20110167524A1

公开(公告)日：2011-07-07

申请号：US12958323

申请日：2010-12-01

申请人： Yan Hu ,  Shuiqing Hu ,  Chanmin Su ,  Jian Shi ,  Ji Ma

发明人： Yan Hu ,  Shuiqing Hu ,  Chanmin Su ,  Jian Shi ,  Ji Ma

IPC分类号： G01Q10/00

CPC分类号： G01Q20/00 ,  G01Q10/065 ,  G01Q60/32

摘要： An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.

摘要翻译： AFM成像（峰值力攻丝（PFT）模式）的改进模式使用力作为反馈变量来减少尖端 - 样本相互作用力，同时保持所有现有AFM操作模式可实现的扫描速度。 通过改进的分辨率和高的样品通量实现样品成像和机械性能测绘，该模式可在不同的环境中工作，包括气态，流体和真空。 通过消除专家用户监控成像的需要，便于使用。

公开(公告)号：US07770231B2

公开(公告)日：2010-08-03

申请号：US11832881

申请日：2007-08-02

申请人： Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

发明人： Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

IPC分类号： G01N23/00

CPC分类号： G01Q10/04 ,  G01Q10/065 ,  G01Q20/02 ,  G01Q60/38

摘要： A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.

摘要翻译： 提供一种具有在力控制反馈下快速扫描任意特征的大样本的能力的方法和装置，因此必须获得高分辨率图像。 该方法包括在SPM的探针和样品之间产生相对扫描运动，以至少以30线/秒的速率扫描探针至少4微米的扫描范围，并且控制与力控制回转的探针 - 样品相互作用 速率至少为1毫米/秒。 能够实现这些结果的优选SPM具有力控制器，其具有至少10kHz的至少闭环带宽的力控制带宽。

公开(公告)号：US20090077697A1

公开(公告)日：2009-03-19

申请号：US12210075

申请日：2008-09-12

申请人： Chanmin Su ,  Sergey Belikov

发明人： Chanmin Su ,  Sergey Belikov

IPC分类号： G12B21/02 ,  G01N13/10

CPC分类号： G01Q30/04 ,  G01Q10/06 ,  Y10S977/85

摘要： A method of operating a scanning probe microscope (SPM) includes scanning a sample as a probe of the SPM interacts with a sample, and collecting sample surface data in response to the scanning step. The method identifies a feature of the sample from the sample surface data and automatically performs a zoom-in scan of the feature based on the identifying step. The method operates to quickly identify and confirm the location of features of interest, such as nano-asperities, so as to facilitate performing a directed high resolution image of the feature.

摘要翻译： 操作扫描探针显微镜（SPM）的方法包括扫描样品作为SPM的探针与样品相互作用，并响应于扫描步骤收集样品表面数据。 该方法从样品表面数据识别样品的特征，并基于识别步骤自动执行特征的放大扫描。 该方法用于快速识别和确认感兴趣的特征的位置，例如纳米凹凸，以便于执行特征的定向高分辨率图像。

公开(公告)号：US20080011065A1

公开(公告)日：2008-01-17

申请号：US11457079

申请日：2006-07-12

申请人： Chanmin Su ,  Robert C. Daniels ,  Craig Prater

发明人： Chanmin Su ,  Robert C. Daniels ,  Craig Prater

IPC分类号： G01B5/28

CPC分类号： G01Q10/045

摘要： A drive actuator for a measurement instrument having a probe, the drive actuator including a heating element in a thermally conductive relationship with the probe such that application of electric current to the heating element modifies a characteristic of the probe. The probe device includes a probe including a cantilever having a lever made of a material having a selected thermal expansivity and a drive actuator in operable cooperation with the cantilever lever made of a material having a thermal expansivity different than the thermal expansivity of the material of which the cantilever lever is made.

摘要翻译： 一种用于具有探针的测量仪器的驱动致动器，所述驱动致动器包括与所述探针具有导热关系的加热元件，使得向所述加热元件施加电流以改变所述探针的特性。 探针装置包括探针，其包括具有由具有选定的热膨胀性的材料制成的杆的悬臂，以及与由具有不同于其材料的热膨胀性的热膨胀性的材料制成的悬臂的可操作配合的驱动致动器 制作悬臂。