公开(公告)号：US09024708B2

公开(公告)日：2015-05-05

申请号：US13615609

申请日：2012-09-14

申请人： Sheng-Shian Li ,  Li-Jen Hou ,  Cheng-Syun Li

发明人： Sheng-Shian Li ,  Li-Jen Hou ,  Cheng-Syun Li

IPC分类号： H03B5/30 ,  H03H9/24 ,  H03B5/36 ,  H03H9/02

CPC分类号： H03B5/36 ,  H03H9/02259 ,  H03H9/02393 ,  H03H9/2436 ,  H03H9/2463 ,  H03H2009/02511 ,  H03H2009/2442

摘要： This invention provides a micromechanical resonator oscillator structure and a driving method thereof. As power handling ability of a resonator is proportional to its equivalent stiffness, a better power handling capability is obtained by driving a micromechanical resonator oscillator at its high equivalent stiffness area. One of the embodiments of this invention is demonstrated by using a beam resonator. A 9.7-MHZ beam resonator via the high-equivalent stiffness area driven method shows better power handling capability and having lower phase noise.

摘要翻译： 本发明提供一种微机械谐振器结构及其驱动方法。 由于谐振器的功率处理能力与其等效刚度成比例，通过在其高等效刚度区域驱动微机械谐振器振荡器可以获得更好的功率处理能力。 通过使用光束谐振器来证明本发明的一个实施例。 通过高等效刚度区域驱动的方法，9.7-MHZ光束谐振器显示出更好的功率处理能力并具有较低的相位噪声。

公开(公告)号：US08854149B2

公开(公告)日：2014-10-07

申请号：US13615656

申请日：2012-09-14

申请人： Sheng-Shian Li ,  Cheng-Syun Li

发明人： Sheng-Shian Li ,  Cheng-Syun Li

IPC分类号： H03B5/30 ,  H03H9/05 ,  H03H9/24

CPC分类号： H03H3/0073 ,  H03H9/2452 ,  H03H2009/2442

摘要： A capacitively-driven Micro-Electro-Mechanical System (MEMS) resonator is provided, in which a piezoresistively differential measurement is used to enable the MEMS resonator to transfer a signal. The MEMS resonator uses a Complementary Metal-Oxide-Semiconductor (CMOS) manufacturing process to make its oscillator and piezoresistor to achieve electrical insulation, thereby lowering the level of feedthrough signal.

摘要翻译： 提供了一种电容驱动的微机电系统（MEMS）谐振器，其中使用压阻差分测量来使MEMS谐振器传输信号。 MEMS谐振器采用互补金属氧化物半导体（CMOS）制造工艺，使其振荡器和压敏电阻实现电绝缘，从而降低馈通信号的电平。

公开(公告)号：US20140002201A1

公开(公告)日：2014-01-02

申请号：US13615656

申请日：2012-09-14

申请人： Sheng-Shian LI ,  Cheng-Syun LI

发明人： Sheng-Shian LI ,  Cheng-Syun LI

IPC分类号： H03B28/00 ,  H03H3/02

CPC分类号： H03H3/0073 ,  H03H9/2452 ,  H03H2009/2442

摘要： A capacitively-driven Micro-Electro-Mechanical System (MEMS) resonator is provided, in which a piezoresistively differential measurement is used to enable the MEMS resonator to transfer a signal. The MEMS resonator uses a Complementary Metal-Oxide-Semiconductor (CMOS) manufacturing process to make its oscillator and piezoresistor to achieve electrical insulation, thereby lowering the level of feedthrough signal.

摘要翻译： 提供了一种电容驱动的微机电系统（MEMS）谐振器，其中使用压阻差分测量来使MEMS谐振器传输信号。 MEMS谐振器采用互补金属氧化物半导体（CMOS）制造工艺，使其振荡器和压阻电阻实现电绝缘，从而降低馈通信号的电平。

公开(公告)号：US20140002200A1

公开(公告)日：2014-01-02

申请号：US13615609

申请日：2012-09-14

申请人： Sheng-Shian LI ,  Li-Jen HOU ,  Cheng-Syun LI

发明人： Sheng-Shian LI ,  Li-Jen HOU ,  Cheng-Syun LI

IPC分类号： H03B5/30

CPC分类号： H03B5/36 ,  H03H9/02259 ,  H03H9/02393 ,  H03H9/2436 ,  H03H9/2463 ,  H03H2009/02511 ,  H03H2009/2442

摘要： This invention provides a micromechanical resonator oscillator structure and a driving method thereof. As power handling ability of a resonator is proportional to its equivalent stiffness, a better power handling capability is obtained by driving a micromechanical resonator oscillator at its high equivalent stiffness area. One of the embodiments of this invention is demonstrated by using a beam resonator. A 9.7-MHZ beam resonator via the high-equivalent stiffness area driven method shows better power handling capability and having lower phase noise.

摘要翻译： 本发明提供一种微机械谐振器结构及其驱动方法。 由于谐振器的功率处理能力与其等效刚度成比例，通过在其高等效刚度区域驱动微机械谐振器振荡器可以获得更好的功率处理能力。 通过使用光束谐振器来证明本发明的一个实施例。 通过高等效刚度区域驱动的方法，9.7-MHZ光束谐振器显示出更好的功率处理能力并具有较低的相位噪声。