摘要:
A planarization method of manufacturing a semiconductor component is provided. A dielectric layer is formed above a substrate and defines a trench therein. A barrier layer and a metal layer are formed in sequence in the trench. A first planarization process is applied to the metal layer by using a first reactant so that a portion of the metal layer is removed. An etching rate of the first reactant to the metal layer is greater than that of the first reactant to the barrier layer. A second planarization process is applied to the barrier layer and the metal layer by using a second reactant so that a portion of the barrier layer and the metal layer are removed to expose the dielectric layer. An etching rate of the second reactant to the barrier layer is greater than that of the second reactant to the metal layer.
摘要:
A connector mechanism for connecting a board card is disclosed. The connector mechanism includes a circuit board, and a connector installed on the circuit board. An end of the board card is for inserting into the connector. The connector mechanism further includes a socket installed on the circuit board and located on a side of the connector, a rotating component pivoted to the socket, and at least one connecting component slidably installed on the rotating component and coupled to the circuit board for contacting with the other end of the board card so as to electrically connect to the board card as the end of the board card is inserted into the connector and the rotating component rotates to a connection position.
摘要:
A planarization method of manufacturing a semiconductor component is provided. A dielectric layer is formed above a substrate and defines a trench therein. A barrier layer and a metal layer are formed in sequence in the trench. A first planarization process is applied to the metal layer by using a first reactant so that a portion of the metal layer is removed. An etching rate of the first reactant to the metal layer is greater than that of the first reactant to the barrier layer. A second planarization process is applied to the barrier layer and the metal layer by using a second reactant so that a portion of the barrier layer and the metal layer are removed to expose the dielectric layer. An etching rate of the second reactant to the barrier layer is greater than that of the second reactant to the metal layer.
摘要:
A storage device with automatic-switching function is disclosed. When the storage device is coupled to a USB interface, the power provided by the USB interface turns the USB/SATA converter on to convert data from the USB interface into SATA format and transmit to a hard disk. When the storage device is coupled to a SATA interface instead of the USB interface, the power provided by the USB interface does not turn the USB/SATA converter on to convert data. In this way, the data from the SATA interface directly transmit to the hard disk.
摘要:
A retaining ring for CMP is disclosed. The retaining ring has a plurality of grooves. The grooves have rounded sidewalls. Because the sidewalls of the grooves of the retaining ring are rounded, the slurry is not apt to accumulate around them and the pad is less scratched. Accordingly, the micro-scratches on the wafer surface are reduced and the yield of the CMP step is increased. Its operational method and application system are also disclosed in this invention.
摘要:
An alarm system for indicating vehicle running state comprises a main frame enclosed with a housing installed in a proper location of the vehicle body, and an accommodation space is formed between the main frame and its housing. A red, green and yellow light sources are installed on the main frame in the accommodation space. When the brake system is actuated, the red light source turns on. When the accelerator system is actuated the green light source turns on. In both brake system and accelerator system are not actuated, yellow light source turns on. With such variation of the light colors, the driver of the following rear vehicle may identify the instant driving condition of the preceding vehicle.
摘要:
An external storage device includes a hard-drive, a flash memory, and a memory arrangement unit. The memory arrangement determines if the tag of the data accessed by a computer stored in the tag list of the memory arrangement unit and controls the hard-drive and the flash memory according to the result of the determination.
摘要:
A chemical mechanical polishing (CMP) process at least includes a polishing step and an ex-situ conditioning step, and the ex-situ conditioning step must be immediately performed after the polishing step. Therefore, it can save the process time. Furthermore, when applying to a CMP apparatus with several polishing regions, it can integrate these polishing regions having different polishing time in order to shorten total manufacturing time, thereby improving throughput.
摘要:
A server system and method is proposed for use with an automatic storage and retrieval system (AS/RS) to allow a user to perform AS/RS controls and access related inventory management data. The proposed AS/RS server system and method is characterized by the use of a point-to-point multiplex communication interface, such as a TCP/IP communication interface, instead of SQL server as in the case of the prior art, for performing data transmission between the control platform and the main server. The SQL server is only used for storing the history of user-issued commands and related AS/RS operating status data. Compared to the prior art, the proposed AS/RS server system and method allows the utilization of DCOM (Distributed Component Object Model) modules for control of the data exchange among the main server, the SQL server, and the control platform, so that it can be implemented without the use of QEODBC drivers, thereby eliminating the problems caused by the use of QEODBC driver in the prior art. In addition, the proposed AS/RS server system and method allows real-time synchronization in the data transmission between the control platform and the automatic storage and retrieval system, thereby making the AS/RS operation more efficient than the prior art.
摘要:
A connector mechanism for connecting a board card is disclosed. The connector mechanism includes a circuit board, and a connector installed on the circuit board. An end of the board card is for inserting into the connector. The connector mechanism further includes a socket installed on the circuit board and located on a side of the connector, a rotating component pivoted to the socket, and at least one connecting component sliably installed on the rotating component and coupled to the circuit board for contacting with the other end of the board card so as to electrically connect to the board card as the end of the board card is inserted into the connector and the rotating component rotates to a connection position.