Acoustic wave filter and manufacturing method of the same
    2.
    发明授权
    Acoustic wave filter and manufacturing method of the same 失效
    声波滤波器及其制造方法相同

    公开(公告)号:US07583163B2

    公开(公告)日:2009-09-01

    申请号:US11891368

    申请日:2007-08-10

    IPC分类号: H03H9/00 H03H9/205 H01L41/08

    摘要: A technique capable of integrally forming SMR type acoustic wave filters corresponding to multiple bands on the same chip at low cost is provided. In SMR type acoustic wave filters including multiple bandpass filters corresponding to multiple bands formed over the same die (substrate), acoustic multilayer films are formed without or with a minimum number of masks and piezoelectric thin films having different thicknesses for respective bands are collectively formed. For example, after the acoustic multilayer films (low acoustic impedance layers and high acoustic impedance layers) are formed in a deep groove in a terrace paddy field shape over the die in a maskless manner, the piezoelectric thin films are c-axis-oriented and grown, and are polished by CMP method or the like to be adjusted in a thickness for respective bands, and therefore, the SMR type acoustic wave filters for multiple bands are formed over the same chip.

    摘要翻译: 提供了能够以低成本一体地形成对应于同一芯片上的多个频带的SMR型声波滤波器的技术。 在包括对应于形成在同一芯片(基板)上的多个带的多个带通滤波器的SMR型声波滤波器中,形成声学多层膜,而不需要最少数量的掩模,并且共同形成具有不同厚度的压电薄膜。 例如,在以无掩模的方式在模具上形成在平台水田的深槽中的声学多层膜(低声阻抗层和高声阻抗层)之后,压电薄膜是c轴取向的, 并通过CMP方法等进行抛光,以对各个带的厚度进行调整,因此,在同一芯片上形成多个带的SMR型声波滤波器。

    Semiconductor radioactive ray detector, radioactive ray detection module, and nuclear medicine diagnosis apparatus
    5.
    发明授权
    Semiconductor radioactive ray detector, radioactive ray detection module, and nuclear medicine diagnosis apparatus 失效
    半导体放射线检测器,放射线检测模块和核医学诊断仪器

    公开(公告)号:US07750310B2

    公开(公告)日:2010-07-06

    申请号:US11501779

    申请日:2006-08-10

    IPC分类号: G01T1/24

    摘要: The present invention provides a semiconductor radioactive ray detector having the excellent energy resolution or time precision, a radioactive detection module, and a nuclear medicine diagnosis apparatus. The semiconductor radioactive ray detector has a structure in which plate-like elements made of cadmium telluride and conductive members are alternately laminated and the plate-like element made of cadmium telluride and the conductive member are adhered to each other with a conductive adhesive agent, and the Young's modulus of the conductive adhesive agent is in the range from 350 MPa to 1000 MPa, while the conductive members are made from a material with the linear expansion coefficient of the conductive members in the range from 5×10−6/° C. to 7×10−6/° C.

    摘要翻译: 本发明提供了具有优异的能量分辨率或时间精度的半导体放射线检测器,放射性检测模块和核医学诊断装置。 半导体放射线检测器具有由碲化镉和导电构件制成的板状元件交替层叠的结构,并且由碲化镉构成的板状元件和导电元件用导电粘合剂彼此粘合,并且 导电性粘合剂的杨氏模量在350MPa〜1000MPa的范围内,导电性部件由导电性部件的线膨胀系数为5×10 -6 /℃的材料制成。 至7×10-6 /℃