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    Quality monitor and monitoring technique employing optically stimulated electron emmission
    9.
    发明授权
    Quality monitor and monitoring technique employing optically stimulated electron emmission 失效
    使用光学激发电子发射的质量监测和监测技术

    公开(公告)号：US5393980A

    公开(公告)日：1995-02-28

    申请号：US60617

    申请日：1993-05-11

    申请人： William T. Yost ,  Christopher S. Welch ,  Edmond J. Joe ,  Bill B. Hefner, Jr.

    发明人： William T. Yost ,  Christopher S. Welch ,  Edmond J. Joe ,  Bill B. Hefner, Jr.

    IPC分类号： G01N21/33 ,  G01N23/227 ,  G01Q30/02

    CPC分类号： G01N23/2276 ,  G01N21/33

    摘要： A light source directs ultraviolet light onto a test surface and a detector detects a current of photoelectrons generated by the light. The detector includes a collector which is positively biased with respect to the test surface. Quality is indicated based on the photoelectron current. The collector is then negatively biased to replace charges removed by the measurement of a nonconducting substrate to permit subsequent measurements. Also, the intensity of the ultraviolet light at a particular wavelength is monitored and the voltage of the light source varied to maintain the light a constant desired intensity. The light source is also cooled via a gas circulation system. If the test surface is an insulator, the surface is bombarded with ultraviolet light in the presence of an electron field to remove the majority of negative charges from the surface. The test surface is then exposed to an ion field until it possesses no net charge. The technique described above is then performed to assess quality.

    摘要翻译： 光源将紫外光引导到测试表面上，并且检测器检测由光产生的光电子的电流。 检测器包括相对于测试表面被正偏置的收集器。 质量基于光电子电流指示。 然后，收集器被负偏压以替换通过测量非导电衬底去除的电荷以允许随后的测量。 此外，监测特定波长处的紫外线的强度，并且光源的电压变化以保持光线恒定的期望强度。 光源也通过气体循环系统进行冷却。 如果测试表面是绝缘体，则在存在电子场的情况下用紫外光轰击该表面以从表面去除大部分负电荷。 然后将测试表面暴露于离子场，直到其不具有净电荷。 然后执行上述技术以评估质量。