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    METHOD OF COOLING TEXTURED WORKPIECES WITH AN ELECTROSTATIC CHUCK
    1.
    发明申请
    METHOD OF COOLING TEXTURED WORKPIECES WITH AN ELECTROSTATIC CHUCK 有权
    用静电切片冷却纹理工件的方法

    公开(公告)号：US20110291344A1

    公开(公告)日：2011-12-01

    申请号：US12791278

    申请日：2010-06-01

    申请人： Dale K. Stone ,  Julian G. Blake ,  D. Jeffrey Lischer

    发明人： Dale K. Stone ,  Julian G. Blake ,  D. Jeffrey Lischer

    IPC分类号： B23Q3/00

    CPC分类号： H01L21/67109 ,  H01L21/6831 ,  H01L21/68742

    摘要： A workpiece support, which more effectively cools a textured workpiece is disclosed. A layer is added on top of a workpiece support. This layer is sufficiently soft so as to conform to the textured workpiece. Furthermore, the layer has a dielectric constant such that it does not alter the normal operation of the underlying electrostatic clamp. In some embodiments, the locations of the ground and lift pins are moved to further reduce the leakage of backside gas.

    摘要翻译： 公开了一种更有效地冷却纹理工件的工件支撑件。 在工件支架的顶部添加一层。 该层足够柔软以符合纹理化的工件。 此外，该层具有介电常数，使得其不会改变下面的静电夹的正常操作。 在一些实施例中，移动地面和升降销的位置以进一步减少背侧气体的泄漏。

    Contaminant deposition control baffle for a capacitive pressure transducer
    2.
    发明授权
    Contaminant deposition control baffle for a capacitive pressure transducer 有权
    用于电容式压力传感器的污染物沉积控制挡板

    公开(公告)号：US06993973B2

    公开(公告)日：2006-02-07

    申请号：US10440391

    申请日：2003-05-16

    申请人： D. Jeffrey Lischer ,  Robert Traverso

    发明人： D. Jeffrey Lischer ,  Robert Traverso

    IPC分类号： G01L9/12

    CPC分类号： G01L9/0075 ,  G01L19/0636

    摘要： The disclosed transducer includes a housing, a diaphragm, an inner conductor, an outer conductor, and a first baffle. The housing defines an interior volume. The diaphragm is disposed in the housing and divides the interior volume into a first chamber and a second chamber. The diaphragm flexes in response to pressure differentials in the first and second chambers. The inner conductor is disposed in the first chamber. The outer conductor is disposed in the first chamber around the inner conductor. The first baffle is disposed in the second chamber and defines an inner region, a middle region, and an outer region. The inner region underlies the inner conductor. The middle region underlies the outer conductor. The outer region underlies neither the inner conductor nor the outer conductor. The first baffle defines apertures in at least two of the inner, middle, and outer regions.

    摘要翻译： 所公开的换能器包括壳体，隔膜，内导体，外导体和第一挡板。 壳体限定内部容积。 隔膜设置在壳体中并将内部容积分成第一室和第二室。 隔膜响应于第一和第二腔室中的压差而弯曲。 内部导体设置在第一室中。 外部导体围绕内部导体设置在第一腔室中。 第一挡板设置在第二室中并且限定内部区域，中间区域和外部区域。 内部区域在内部导体之下。 中间区域位于外部导体之下。 外部区域既不是内部导体也不是外部导体。 第一挡板限定内部，中部和外部区域中的至少两个中的孔。

    Method of cooling textured workpieces with an electrostatic chuck
    3.
    发明授权
    Method of cooling textured workpieces with an electrostatic chuck 有权
    用静电卡盘冷却纹理工件的方法

    公开(公告)号：US08672311B2

    公开(公告)日：2014-03-18

    申请号：US12791278

    申请日：2010-06-01

    申请人： Dale K. Stone ,  Julian G. Blake ,  D. Jeffrey Lischer

    发明人： Dale K. Stone ,  Julian G. Blake ,  D. Jeffrey Lischer

    IPC分类号： B23Q3/00

    CPC分类号： H01L21/67109 ,  H01L21/6831 ,  H01L21/68742

    摘要： A workpiece support, which more effectively cools a textured workpiece is disclosed. A layer is added on top of a workpiece support. This layer is sufficiently soft so as to conform to the textured workpiece. Furthermore, the layer has a dielectric constant such that it does not alter the normal operation of the underlying electrostatic clamp. In some embodiments, the locations of the ground and lift pins are moved to further reduce the leakage of backside gas.

    摘要翻译： 公开了一种更有效地冷却纹理工件的工件支撑件。 在工件支架的顶部添加一层。 该层足够柔软以符合纹理化的工件。 此外，该层具有介电常数，使得其不会改变下面的静电夹的正常操作。 在一些实施例中，移动地面和升降销的位置以进一步减少背侧气体的泄漏。