公开(公告)号：US09255801B2

公开(公告)日：2016-02-09

申请号：US13922801

申请日：2013-06-20

申请人： Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

发明人： Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

IPC分类号： G01P3/44 ,  G01C19/56 ,  G01C19/5747

CPC分类号： G01C19/56 ,  G01C19/5747

摘要： A yaw rate sensor, including a substrate and a main extension plane, for detecting a yaw rate around a first direction in parallel to the main extension plane, a first Coriolis mass, and a second Coriolis mass, and a drive device configured to drive the first and second Coriolis masses in parallel to a drive direction perpendicular to the first direction, the first and second Coriolis masses, for a yaw rate around the first direction, experiencing a Coriolis acceleration in parallel to a detection direction, which is perpendicular to the drive and first directions, the first and second Coriolis masses having first/second partial areas and third/fourth partial areas, respectively. The first and third partial areas are farther from the axis of symmetry in parallel to the first direction, and the second and fourth partial areas are closer to the axis of symmetry in parallel to the first direction.

摘要翻译： 包括基板和主延伸平面的横摆角速度传感器，用于检测平行于主延伸平面的第一方向的横摆率，第一科里奥利质量和第二科里奥利质量，驱动装置被配置为驱动 第一和第二科里奥利质量平行于垂直于第一方向的驱动方向，第一和第二科里奥利质量，对于围绕第一方向的横摆率，经历与垂直于驱动器的检测方向平行的科里奥利加速度 和第一方向，分别具有第一/第二部分区域和第三/第四部分区域的第一和第二科里奥利群体。 第一和第三部分区域平行于第一方向距离对称轴更远，并且第二和第四部分区域平行于第一方向更靠近对称轴。

公开(公告)号：US09212048B2

公开(公告)日：2015-12-15

申请号：US13890363

申请日：2013-05-09

申请人： Johannes Classen ,  Heribert Weber ,  Mirko Hattass ,  Daniel Christoph Meisel

发明人： Johannes Classen ,  Heribert Weber ,  Mirko Hattass ,  Daniel Christoph Meisel

IPC分类号： B81B3/00 ,  B81C1/00

CPC分类号： B81B3/0075 ,  B81B2207/07 ,  B81B2207/096 ,  B81C1/00238 ,  B81C1/00674 ,  B81C2203/0109 ,  H01L2224/16225 ,  H01L2924/19105

摘要： A hybridly integrated component includes an ASIC element having a processed front side, a first MEMS element having a micromechanical structure extending over the entire thickness of the first MEMS substrate, and a first cap wafer mounted over the micromechanical structure of the first MEMS element. At least one structural element of the micromechanical structure of the first MEMS element is deflectable, and the first MEMS element is mounted on the processed front side of the ASIC element such that a gap exists between the micromechanical structure and the ASIC element. A second MEMS element is mounted on the rear side of the ASIC element. The micromechanical structure of the second MEMS element extends over the entire thickness of the second MEMS substrate and includes at least one deflectable structural element.

摘要翻译： 混合集成部件包括具有经处理的前侧的ASIC元件，具有在第一MEMS基板的整个厚度上延伸的微机械结构的第一MEMS元件和安装在第一MEMS元件的微机械结构上的第一盖晶片。 第一MEMS元件的微机械结构的至少一个结构元件是可偏转的，并且第一MEMS元件安装在ASIC元件的经处理的正面上，使得在微机械结构和ASIC元件之间存在间隙。 第二个MEMS元件安装在ASIC元件的后侧。 第二MEMS元件的微机械结构在第二MEMS基板的整个厚度上延伸，并且包括至少一个可偏转的结构元件。

公开(公告)号：US20140326070A1

公开(公告)日：2014-11-06

申请号：US14334407

申请日：2014-07-17

申请人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

发明人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC分类号： G01P3/44 ,  F16F1/02 ,  G01C19/574

CPC分类号： G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

摘要翻译： 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

公开(公告)号：US08875575B2

公开(公告)日：2014-11-04

申请号：US13134024

申请日：2011-05-25

申请人： Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

发明人： Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

IPC分类号： G01C19/56 ,  G01C19/5755

CPC分类号： G01C19/5755

摘要： A yaw rate sensor includes: at least one Coriolis element; a drive device connected to the Coriolis element and configured to drive a vibration of the Coriolis element; a detection device having at least one rotor; and a coupling device connected to the detection device and to the Coriolis element. The coupling device is configured to couple a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration, so that when the Coriolis element is deflected a torque for driving the at least one rotor is transmitted from the Coriolis element to the at least one rotor.

摘要翻译： 横摆率传感器包括：至少一个科里奥利元件; 连接到科里奥利元件并被配置为驱动科里奥利元件的振动的驱动装置; 具有至少一个转子的检测装置; 以及连接到检测装置和科里奥利元件的耦合装置。 联接装置被配置成将Coriolis元件的振动平面中的偏转与垂直于振动的方向耦合到检测装置，使得当科里奥利元件偏转时，用于驱动至少一个转子的转矩从 科里奥利元件至少一个转子。

公开(公告)号：US08844357B2

公开(公告)日：2014-09-30

申请号：US13294752

申请日：2011-11-11

申请人： Rolf Scheben ,  Burkhard Kuhlmann ,  Thorsten Balslink ,  Daniel Christoph Meisel ,  Benjamin Schmidt

发明人： Rolf Scheben ,  Burkhard Kuhlmann ,  Thorsten Balslink ,  Daniel Christoph Meisel ,  Benjamin Schmidt

IPC分类号： G01C19/56 ,  G01C19/5747

CPC分类号： G01C19/5747

摘要： A yaw-rate sensor includes: a substrate having a main extension plane for detecting a yaw rate about a first axis extending parallel to the main extension plane; a first Coriolis element; a second Coriolis element; a third Coriolis element; and a fourth Coriolis element. The first Coriolis element and the fourth Coriolis element are drivable in the same direction parallel to a second axis extending parallel to the main extension plane and perpendicularly to the first axis. The first Coriolis element and the second Coriolis element are drivable in opposite directions parallel to the second axis. The first Coriolis element and the third Coriolis element are drivable in opposite directions parallel to the second axis.

摘要翻译： 偏航率传感器包括：具有用于检测围绕平行于主延伸平面延伸的第一轴线的横摆率的主延伸面的基板; 第一个科里奥利元素; 第二个科里奥利元素; 第三科里奥利元素; 和第四个科里奥利元素。 第一科里奥利元件和第四科里奥利元件可以在平行于平行于主延伸平面并垂直于第一轴线延伸的第二轴线的相同方向上驱动。 第一科里奥利元件和第二科里奥利元件可以在平行于第二轴线的相反方向上驱动。 第一科里奥利元件和第三科里奥利元件可以在平行于第二轴线的相反方向上驱动。

公开(公告)号：US08746065B2

公开(公告)日：2014-06-10

申请号：US13293874

申请日：2011-11-10

申请人： Torsten Ohms ,  Daniel Christoph Meisel

发明人： Torsten Ohms ,  Daniel Christoph Meisel

IPC分类号： G01C19/56

CPC分类号： G01C19/574

摘要： A rotational rate sensor includes: a substrate having a main plane of extension; a first Coriolis element; and a second Coriolis element. The first Coriolis element and the second Coriolis element have a first and a second center of gravity, respectively, and the elements are drivable along a drive direction. In the idle state of the rotational rate sensor, (i) the distance between the first center of gravity and the second center of gravity along the detection direction is less than a first value, and (ii) the distance between the first center of gravity and the second center of gravity along the third direction is less than a second value.

摘要翻译： 旋转速率传感器包括：具有主平面延伸的基板; 第一个科里奥利元素; 和第二个科里奥利元素。 第一科里奥利元件和第二科里奥利元件分别具有第一和第二重心，元件沿驱动方向可驱动。 在转速传感器的空闲状态下，（i）第一重心与第二重心之间的距离沿检测方向小于第一值，（ii）第一重心之间的距离 并且所述第二重心沿着所述第三方向小于第二值。

公开(公告)号：US08683863B2

公开(公告)日：2014-04-01

申请号：US12987732

申请日：2011-01-10

申请人： Johannes Classen ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel

发明人： Johannes Classen ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel

IPC分类号： G01C19/56

CPC分类号： G01C19/5747

摘要： In a yaw rate sensor with a substrate having a main extent plane and with a first and second partial structure disposed parallel to the main extent plane, the first partial structure includes a first driving structure and the second partial structure includes a second driving structure, the first and second partial structure being excitable by a driving device, via the first and second driving structure, into oscillation parallel to a first axis parallel to the main extent plane, the first partial structure having a first Coriolis element and the second partial structure having a second Coriolis element, the yaw rate sensor being characterized in that the first and second Coriolis elements are displaceable by a Coriolis force parallel to a second axis, which is perpendicular to the first axis, and parallel to a third axis, which is perpendicular to the first and second axis, the second axis extending parallel to the main extent plane, and the first Coriolis element being connected to the second Coriolis element via a coupling element.

摘要翻译： 在具有主范围平面并具有平行于主范围平面布置的第一和第二部分结构的基板的偏航率传感器中，第一部分结构包括第一驱动结构，第二部分结构包括第二驱动结构， 第一和第二部分结构可被驱动装置通过第一和第二驱动结构激发成与平行于主范围平面的第一轴平行的振荡，第一部分结构具有第一科里奥利元件，第二部分结构具有 第二科里奥利元件，所述横摆率传感器的特征在于，所述第一和第二科里奥利元件可通过平行于垂直于所述第一轴线的第二轴线的科里奥利力移动，并且平行于垂直于所述第一轴线的第三轴线 第一和第二轴，第二轴平行于主范围平面延伸，第一科里奥利元件连接到t 他通过耦合元件第二个科里奥利元件。

公开(公告)号：US08561465B2

公开(公告)日：2013-10-22

申请号：US12587487

申请日：2009-10-06

申请人： Johannes Classen ,  Torsten Ohms ,  Daniel Christoph Meisel ,  Joerg Hauer

发明人： Johannes Classen ,  Torsten Ohms ,  Daniel Christoph Meisel ,  Joerg Hauer

IPC分类号： G01C19/00

CPC分类号： G01C19/5755 ,  G01C19/574 ,  G01C19/5747 ,  G01C19/5762

摘要： A rotation rate sensor includes: a mounting device; a first drive frame having a drive, which is designed to set the first drive frame into a first oscillatory motion along an axis of oscillation relative to the mounting device; a first stator electrode; a first actuator electrode coupled to the first drive frame in such a way that in a rotary motion of the rotation rate sensor due to a Coriolis force, the first actuator electrode being displaceable in a first deflection direction relative to the first stator electrode; and an evaluation device configured to determine a voltage applied between the first stator electrode and the first actuator electrode, and to specify information regarding the rotary motion of the rotation rate sensor while taking the determined voltage value into account.

摘要翻译： 旋转速率传感器包括：安装装置; 具有驱动器的第一驱动框架，其被设计成将第一驱动框架相对于安装装置沿着振荡轴线设置为第一振荡运动; 第一定子电极; 第一致动器电极，其以这样的方式联接到第一驱动框架，使得在旋转速度传感器由于科里奥利力的旋转运动中，第一致动器电极可相对于第一定子电极在第一偏转方向上移位; 以及评估装置，被配置为确定施加在第一定子电极和第一致动器电极之间的电压，并且在考虑所确定的电压值的同时指定关于旋转速率传感器的旋转运动的信息。

公开(公告)号：US08490483B2

公开(公告)日：2013-07-23

申请号：US12834953

申请日：2010-07-13

申请人： Martin Wrede ,  Johannes Classen ,  Torsten Ohms ,  Carsten Geckeler ,  Burkhard Kuhlmann ,  Jens Frey ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Thorsten Balslink

发明人： Martin Wrede ,  Johannes Classen ,  Torsten Ohms ,  Carsten Geckeler ,  Burkhard Kuhlmann ,  Jens Frey ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Thorsten Balslink

IPC分类号： G01C19/56

CPC分类号： G01C19/5712 ,  G01C19/5747

摘要： A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.

摘要翻译： 一种微机械摆动速率传感器，包括第一偏转速率传感器元件，该第一偏转速率传感器元件输出包含关于围绕第一旋转轴线的旋转的信息的第一传感器信号，输出第二传感器信号的第二偏转速度传感器元件， 包含关于围绕垂直于第一旋转轴线的第二旋转轴线的旋转的信息，驱动第一偏转速率传感器元件的驱动器和耦合连杆，其将第一横摆速率传感器元件和 第二偏转速率传感器元件彼此之间，使得第一偏转速率传感器元件的驱动也引起第二偏转速率传感器元件的驱动。

公开(公告)号：US20120152019A1

公开(公告)日：2012-06-21

申请号：US13305292

申请日：2011-11-28

申请人： Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

发明人： Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

IPC分类号： G01C19/56

CPC分类号： G01C19/5712

摘要： A yaw-rate sensor is described as having a substrate which has a main plane of extension for detecting a yaw rate about a first axis extending parallel to the main plane of extension is provided, the yaw-rate sensor having a first rotation element and a second rotation element, the first rotation element being drivable about a first axis of rotation, the second rotation element being drivable about a second axis of rotation, the first axis of rotation being situated perpendicularly to the main plane of extension, the second axis of rotation being situated perpendicularly to the main plane of extension, the first rotation element and the second rotation element being drivable in opposite directions.

摘要翻译： 横摆率传感器被描述为设置有具有用于检测围绕平行于主平面延伸的第一轴延伸的横摆率的主扩展平面的基板，该偏航率传感器具有第一旋转元件和 第二旋转元件，第一旋转元件围绕第一旋转轴线驱动，第二旋转元件围绕第二旋转轴线驱动，第一旋转轴线垂直于主平面延伸，第二旋转轴线 垂直于延伸主平面定位，第一旋转元件和第二旋转元件可沿相反方向驱动。