Laser-induced metallic plasma for non-contact inspection
    2.
    发明授权
    Laser-induced metallic plasma for non-contact inspection 失效
    激光诱导金属等离子体进行非接触检查

    公开(公告)号:US5587664A

    公开(公告)日:1996-12-24

    申请号:US501685

    申请日:1995-07-12

    CPC classification number: G01R31/308

    Abstract: An apparatus for testing an electrical part having a number of conductive paths. The apparatus includes a mechanism for directing a laser pulse to impinge upon a conductor of the part under test so as to form a metallic plasma and one or more pairs of probes which, along with the conductor and the plasma, form a part of an electrical circuit. Finally, the apparatus includes a detector which is responsive to the amount of conduction via the plasma between the conductor and the probes.

    Abstract translation: 一种用于测试具有多个导电路径的电气部件的装置。 该装置包括用于引导激光脉冲撞击被测试部件的导体以便形成金属等离子体和一对或多对探针的机构,该对探针与导体和等离子体一起形成电气的一部分 电路。 最后,该装置包括一个检测器,该检测器响应于导体和探针之间的等离子体的导电量。

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