公开(公告)号：US08841155B2

公开(公告)日：2014-09-23

申请号：US13882337

申请日：2011-05-19

Applicant: Jianhong Mao ,  Deming Tang

Inventor： Jianhong Mao ,  Deming Tang

IPC: H01L21/00 ,  B81C1/00 ,  G01P15/08 ,  H03H3/007

Abstract: A method for manufacturing a micro-electro-mechanical system (MEMS) device is provided. The method comprises: providing a semiconductor substrate, the semiconductor substrate having a metal interconnection structure (100) formed therein; forming a first sacrificial layer (201) on the surface of the semiconductor substrate, the material of the first sacrificial layer is amorphous carbon; etching the first sacrificial layer to form a first recess (301); covering and forming a first dielectric layer (401) on the surface of the first sacrificial layer; thinning the first dielectric layer by a chemical mechanical polishing (CMP) process, until exposing the first sacrificial layer; forming a micromechanical structure layer (500) on the surface of the first sacrificial layer and exposing the first sacrificial layer, wherein a part of the micromechanical structure layer is connected to the first dielectric layer. The method avoids polishing the amorphous carbon, shortens the period of production, and improves the production efficiency.

公开(公告)号：US08134109B2

公开(公告)日：2012-03-13

申请号：US12613209

申请日：2009-11-05

Applicant: Deming Tang

Inventor： Deming Tang

IPC: H01L27/00

CPC classification number: G03B35/26 ,  G02B5/3058 ,  G02B27/26 ,  G02B27/283 ,  H04N9/3167 ,  H04N13/363 ,  H04N13/365

Abstract: An optical projection engine device uses a symmetrical wire grid polarizing beam splitter (PBS) that splits incident illumination to a symmetrical pair of polarized light beams in two orthogonal polarization states, one by reflection and the other by transmission, for illuminating a pair of reflective modulation imagers respectively. In identical geometric configuration, the two synchronized reflective modulation imagers polarization modulate polarized light beams as received, and reflect them back towards the PBS, which through transmission and reflection respectively, combines and projects two modulated light beams through a projection lens system to form a pair of spatially overlapped illumination images of aligned pixels with the same image in two orthogonal polarization states on a projection screen. The device jointly provides improvement optical efficiency and expanded function to three dimensional stereoscopic displays.

Abstract translation: 光学投影引擎装置使用对称的线栅偏振分束器（PBS），其将入射照明分成两对正交偏振状态的对称偏振光束，一个通过反射而另一个通过透射来照射一对反射调制 成像仪分别。 在相同的几何结构中，两个同步的反射调制成像器极化地调制收到的偏振光束，并将其反射回PBS，通过透射和反射分别通过投影透镜系统组合投影两个调制光束，形成一对 在投影屏幕上的两个正交偏振状态下具有相同图像的对准像素的空间重叠照明图像。 该设备联合为三维立体显示提供光学效率和扩展功能。

公开(公告)号：US07880953B2

公开(公告)日：2011-02-01

申请号：US12613227

申请日：2009-11-05

Applicant: Deming Tang

Inventor： Deming Tang

IPC: G02B26/00

CPC classification number: G02B26/0841

Abstract: A spatial optical modulation array device includes regularly packed micro optical-electrical-mechanical pixels in a planner configuration on a semiconductor substrate, each pixel electrically actuated independently and thus operated optically in the binary modes, reflection and diffraction to incident illumination. Subject to the electrostatic contraction or compulsion driven by a pixel circuitry, the top metal reflector is placed accurately at the minimum or maximum spacing from the static bottom metal reflector in an odd or even integral multiple of a quarter wavelength within visual light spectrum, so that diffraction or reflection in destructive or constructive interference is achieved respectively and thus incident illumination modulated independently in closely binary modes at each micro optical-electrical-mechanical pixel.

Abstract translation: 空间光调制阵列器件包括在半导体衬底上的规划器配置中的规则包装的微光电机械像素，每个像素独立电驱动，从而以二进制模式光学操作，对入射照明进行反射和衍射。 受到由像素电路驱动的静电收缩或强制的影响，顶部金属反射器被精确地放置在距离静态底部金属反射器的最小或最大间距处，在视觉光谱内的四分之一波长的奇数或偶数整数倍，使得 分别实现了破坏性或建设性干扰的衍射或反射，从而在每个微光电机械像素处以独立的二进制模式独立地进行入射照明。

公开(公告)号：US20100110528A1

公开(公告)日：2010-05-06

申请号：US12613227

申请日：2009-11-05

Applicant: Deming Tang

Inventor： Deming Tang

IPC: G02B26/00 ,  H01L21/44

CPC classification number: G02B26/0841

Abstract: A spatial optical modulation array device includes regularly packed micro optical-electrical-mechanical pixels in a planner configuration on a semiconductor substrate, each pixel electrically actuated independently and thus operated optically in the binary modes, reflection and diffraction to incident illumination. Subject to the electrostatic contraction or compulsion driven by a pixel circuitry, the top metal reflector is placed accurately at the minimum or maximum spacing from the static bottom metal reflector in an odd or even integral multiple of a quarter wavelength within visual light spectrum, so that diffraction or reflection in destructive or constructive interference is achieved respectively and thus incident illumination modulated independently in closely binary modes at each micro optical-electrical-mechanical pixel.

Abstract translation: 空间光调制阵列器件包括在半导体衬底上的规划器配置中的规则包装的微光电机械像素，每个像素独立电驱动，从而以二进制模式光学操作，对入射照明进行反射和衍射。 受到由像素电路驱动的静电收缩或强制的影响，顶部金属反射器被精确地放置在距离静态底部金属反射器的最小或最大间距处，在视觉光谱内的四分之一波长的奇数或偶数整数倍，使得 分别实现了破坏性或建设性干扰的衍射或反射，从而在每个微光电机械像素处以独立的二进制模式独立地进行入射照明。

公开(公告)号：US20130155487A1

公开(公告)日：2013-06-20

申请号：US13816031

申请日：2011-01-26

Applicant: Jianhong Mao ,  Deming Tang ,  Fengqin Han

Inventor： Jianhong Mao ,  Deming Tang ,  Fengqin Han

IPC: G02B26/00

CPC classification number: G02B26/001 ,  G02B26/02 ,  G02B26/0808

Abstract: A light modulator pixel unit and the manufacturing method thereof are provided. The pixel unit includes a top electrode formed on a substrate, a movable electrode and a bottom electrode. Under the control of a control circuit, the position of the movable electrode would deflect. When the movable electrode is positioned in a first position, a first light is diffracted on the top electrode; when the movable electrode is positioned in a second position, a second light is diffracted on the top electrode; when the movable electrode is positioned in a third position, a third light is diffracted on the top electrode. The said first light, second light and third light are lights of three primary colors. The light modulator pixel unit of the present invention can modulate lights of three colors and is applicable in the field of micro-display system.

Abstract translation: 提供了光调制器像素单元及其制造方法。 像素单元包括形成在基板上的顶部电极，可动电极和底部电极。 在控制电路的控制下，可动电极的位置将会偏转。 当可动电极位于第一位置时，第一光在顶部电极上衍射; 当可动电极位于第二位置时，第二光在顶部电极上衍射; 当可动电极位于第三位置时，第三光在顶部电极上衍射。 所述第一光，第二光和第三​​光是三原色的光。 本发明的光调制器像素单元可以调制三种颜色的光，并且可应用于微显示系统领域。

公开(公告)号：US20130107349A1

公开(公告)日：2013-05-02

申请号：US13810107

申请日：2011-01-26

Applicant: Jianhong Mao ,  Deming Tang ,  Fengqin Han

Inventor： Jianhong Mao ,  Deming Tang ,  Fengqin Han

IPC: G02B26/00

CPC classification number: G02B26/001 ,  G02B26/02 ,  G02B26/0808 ,  Y10T29/49117

Abstract: A light modulator pixel unit and a method for manufacturing the same are provided. The light modulator pixel unit includes top, movable and bottom electrodes. Under control of a control circuit, the movable electrode may shift to first, second and third positions corresponding to modulations of first, second and third monochromatic lights, respectively. When the movable electrode is at a certain position, the incident light corresponding to the position may be divided into two parts, one is reflected by the top electrode, and the other one may bypass the top electrode and be reflected by the movable electrode. The two parts may interfere destructively. The light modulator pixel unit of the present invention can control monochromatic lights of three special wavelengths by time division, and enable color control and gray control. The unit is applicable in the field of projection display and panel system.

Abstract translation: 提供了一种光调制器像素单元及其制造方法。 光调制器像素单元包括顶部，可移动和底部电极。 在控制电路的控制下，可移动电极可分别转换到对应于第一，第二和第三单色光的调制的第一，第二和第三位置。 当可动电极处于一定位置时，对应于该位置的入射光可分为两部分，一部分被顶部电极反射，另一部分可能旁路顶部电极并被可动电极反射。 这两个部分可能会破坏性地干扰。 本发明的光调制器像素单元可以通过时分控制三种特殊波长的单色光，并且能够进行颜色控制和灰度控制。 该单元适用于投影显示和面板系统领域。

公开(公告)号：US20110241766A1

公开(公告)日：2011-10-06

申请号：US12846415

申请日：2010-07-29

Applicant: Lei Zhang ,  Deming Tang

Inventor： Lei Zhang ,  Deming Tang

IPC: G05F3/02

CPC classification number: H02M3/07

Abstract: A charge pump includes a first voltage input node, a second voltage input node, a voltage output node, at least a flying capacitor, an energy reserve capacitor, a first MEMS switches group controlled by a controlling signal, a second MEMS switches group controlled by the controlling signal, a third MEMS switches group controlled by the controlling signal and a forth MEMS switches group controlled by the controlling signal. The flying capacitor is connected with the first voltage input node and the second voltage input node via the first MEMS switches group. The flying capacitor is connected with the first voltage input node or the second voltage input node via the second MEMS switches group. The energy reserve capacitor is connected with the flying capacitor via the third MEMS switches group. The energy reserve capacitor is connected with the voltage output node and the second voltage input node. When a clock controls the first MEMS switches group to turn on, and the second MEMS switches group and the third MEMS switches group to turn off, the flying capacitor is charged up through the first voltage input node and the second voltage input node. When the clock controls the first MEMS switches group to turn off, and the second MEMS switches group and the third MEMS switches group to turn on, the energy reserve capacitor is charged up through the flying capacitor and the second voltage input node. Through MEMS technology, miniaturization and integration of the charge pump are achieved, and power consumption is reduced, and energy conversion efficiency is improved.

Abstract translation: 电荷泵包括第一电压输入节点，第二电压输入节点，电压输出节点，至少飞跨电容器，能量储备电容器，由控制信号控制的第一MEMS开关组，第二MEMS开关组由第 控制信号，由控制信号控制的第三MEMS开关组和由控制信号控制的第四MEMS开关组。 飞跨电容器经由第一MEMS开关组与第一电压输入节点和第二电压输入节点连接。 飞跨电容器经由第二MEMS开关组与第一电压输入节点或第二电压输入节点连接。 储能电容器通过第三个MEMS开关组与飞跨电容器连接。 储能电容器与电压输出节点和第二电压输入节点相连。 当时钟控制第一MEMS开关组导通时，第二MEMS开关组和第三MEMS开关分组关闭，飞跨电容器通过第一电压输入节点和第二电压输入节点充电。 当时钟控制第一MEMS开关组关闭时，第二个MEMS开关组和第三个MEMS开关组导通，储能电容器通过飞跨电容器和第二电压输入节点充电。 通过MEMS技术，实现了电荷泵的小型化和集成化，降低了功耗，提高了能量转换效率。

公开(公告)号：US06576044B1

公开(公告)日：2003-06-10

申请号：US09722802

申请日：2000-11-27

Applicant: Dustin Wenpin Ho ,  Deming Tang ,  Walter H. Whitlock

Inventor： Dustin Wenpin Ho ,  Deming Tang ,  Walter H. Whitlock

IPC: B01D53047

CPC classification number: B01D53/02 ,  B01D53/0462 ,  B01D53/047 ,  B01D53/0476 ,  B01D53/261 ,  B01D2253/202 ,  B01D2257/302 ,  B01D2257/308 ,  B01D2257/40 ,  B01D2257/404 ,  B01D2257/504 ,  B01D2257/80 ,  B01D2259/40052 ,  B01D2259/4006 ,  B01D2259/40081 ,  B01D2259/40084 ,  B01D2259/4009 ,  B01D2259/4533 ,  B01J20/261 ,  C01B21/24 ,  C01P2006/80 ,  Y02C10/08 ,  Y02C20/10 ,  Y02P20/152 ,  Y02P20/153

Abstract: A gas mixture comprised of nitric oxide and one or more impurities selected from nitrous oxide, nitrogen dioxide, nitrous acid, sulfur dioxide, carbonyl sulfide, water vapor and carbon dioxide is purified by pressure swing adsorption or temperature swing adsorption using a porous, metal-free polymer adsorbent that does not promote the disproportionation of nitric oxide to nitrogen dioxide and nitrogen or nitrous oxide. The adsorption step is preferably carried out at tempereatures in the range of about −120 to about 0° C.

Abstract translation: 由一氧化氮和一种或多种选自一氧化二氮，二氧化氮，亚硝酸，二氧化硫，硫化碳，水蒸汽和二氧化碳的杂质组成的气体混合物通过变压吸附或变温吸附来纯化，使用多孔金属 - 游离聚合物吸附剂不会促进一氧化氮歧化到二氧化氮和氮或一氧化二氮。 吸附步骤优选在约-120至约0℃范围内的温度下进行。

公开(公告)号：US08955212B2

公开(公告)日：2015-02-17

申请号：US13810698

申请日：2011-01-26

Applicant: Jianhong Mao ,  Deming Tang

Inventor： Jianhong Mao ,  Deming Tang

IPC: H01F3/04 ,  H01F7/06 ,  H04R9/08 ,  H04R19/00 ,  H04R19/04 ,  H04R31/00

CPC classification number: H04R9/08 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/4908

Abstract: A micro-electro-mechanical microphone and manufacturing method thereof are provided. The micro-electro-mechanical microphone includes a diaphragm, which is formed on a surface of one side of a semiconductor substrate, exposed to the outside surroundings, and can vibrate freely under the pressure generated by sound waves; an electrode plate with air holes, which is under the diaphragm; an isolation structure for fixing the diaphragm and the electrode plate; an air gap cavity between the diaphragm and the electrode plate, and a back cavity under the electrode plate and in the semiconductor substrate; and a second cavity formed on the surface of the same side of the semiconductor substrate and in an open manner The air gap cavity is connected with the back cavity through the air holes of the electrode plate The back cavity is connected with the second cavity through an air groove formed in the semiconductor substrate.

Abstract translation: 提供一种微机电麦克风及其制造方法。 微机电麦克风包括：在半导体衬底的一侧的表面上形成的暴露于外部环境的隔膜，并且可以在由声波产生的压力下自由振动; 在隔膜下方具有气孔的电极板; 用于固定隔膜和电极板的隔离结构; 隔膜和电极板之间的气隙腔，以及电极板下方和半导体衬底中的后腔; 以及形成在半导体衬底的同一侧的表面上并以敞开方式形成的第二腔。气隙腔通过电极板的气孔与后腔相连。背腔通过一个第二腔与第二腔连接 形成在半导体衬底中的空气槽。

公开(公告)号：US08877537B2

公开(公告)日：2014-11-04

申请号：US13882337

申请日：2011-05-19

Applicant: Jianhong Mao ,  Deming Tang

Inventor： Jianhong Mao ,  Deming Tang

IPC: H01L21/00 ,  B81C1/00 ,  G01P15/08 ,  H03H3/007

CPC classification number: B81C1/0015 ,  B81B2203/0118 ,  B81B2207/07 ,  B81C1/00293 ,  B81C2201/0109 ,  B81C2201/0125 ,  B81C2203/0145 ,  G01P15/0802 ,  G01P2015/0828 ,  H03H3/0072

Abstract: A method for manufacturing a micro-electro-mechanical system (MEMS) device is provided. The method comprises: providing a semiconductor substrate, the semiconductor substrate having a metal interconnection structure (100) formed therein; forming a first sacrificial layer (201) on the surface of the semiconductor substrate, the material of the first sacrificial layer is amorphous carbon; etching the first sacrificial layer to form a first recess (301); covering and forming a first dielectric layer (401) on the surface of the first sacrificial layer; thinning the first dielectric layer by a chemical mechanical polishing (CMP) process, until exposing the first sacrificial layer; forming a micromechanical structure layer (500) on the surface of the first sacrificial layer and exposing the first sacrificial layer, wherein a part of the micromechanical structure layer is connected to the first dielectric layer. The method avoids polishing the amorphous carbon, shortens the period of production, and improves the production efficiency.

Abstract translation: 提供了一种用于制造微机电系统（MEMS）装置的方法。 该方法包括：提供半导体衬底，其中形成有金属互连结构（100）的半导体衬底; 在所述半导体衬底的表面上形成第一牺牲层（201），所述第一牺牲层的材料是无定形碳; 蚀刻第一牺牲层以形成第一凹部（301）; 在第一牺牲层的表面上覆盖并形成第一介电层（401）; 通过化学机械抛光（CMP）工艺使第一介电层变薄，直到暴露出第一牺牲层; 在所述第一牺牲层的表面上形成微机械结构层（500）并暴露所述第一牺牲层，其中所述微机械结构层的一部分连接到所述第一介电层。 该方法避免抛光无定形碳，缩短生产周期，提高生产效率。