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1.发明申请公开(公告)号：US20090091758A1
公开(公告)日：2009-04-09
申请号：US12290787
申请日：2008-11-04
IPC分类号： G01J4/00
CPC分类号： G02B5/3083 , G01J4/00
摘要： A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译： 一种配置用于将相位相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中该系统包括用于在宽光谱范围（例如，190-1700nm）旋转的基本上无色多元素延迟器系统 补偿光谱椭偏仪和/或偏振计系统。
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公开(公告)号：US07450231B2
公开(公告)日：2008-11-11
申请号：US11633138
申请日：2006-12-04
CPC分类号： G02B5/3083 , G01J1/0407 , G01N21/211 , G01N2021/213 , G02B26/06
摘要： A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
摘要翻译： 用于宽光谱范围（例如，190-1700nm）旋转补偿光谱椭偏仪和/或偏振计系统的基本上无色多元素补偿器系统。 多个全内反射进入进入的电磁辐射束的延迟，并且这些元件被定向成使得由延迟元件的位置和/或旋转的变化而导致的净延迟与输入光束角的变化最小化。
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3.发明授权公开(公告)号：US07907280B2
公开(公告)日：2011-03-15
申请号：US12290787
申请日：2008-11-04
CPC分类号： G02B5/3083 , G01J4/00
摘要： A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译： 一种配置用于将相位相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中该系统包括用于在宽光谱范围（例如，190-1700nm）旋转的基本上无色多元素延迟器系统 补偿光谱椭偏仪和/或偏振计系统。
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公开(公告)号：US07345762B1
公开(公告)日：2008-03-18
申请号：US11204835
申请日：2005-08-15
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01J3/0208 , G01N21/21
摘要： Disclosed are system for and method of analyzing substantially the exact same spot size on a sample system with at least two wavelengths for which the focal lengths do not vary more than within an acceptable amount.
摘要翻译： 公开了用至少两个波长分析基本上在样品系统上具有相同光斑尺寸的系统和方法，其中焦距不超过可接受量的变化。
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公开(公告)号：US06982789B1
公开(公告)日：2006-01-03
申请号：US10637051
申请日：2003-08-08
申请人： Duane E. Meyer
发明人： Duane E. Meyer
IPC分类号： G01J3/12
CPC分类号： G01N21/211 , G01J3/02 , G01J3/0202 , G01J3/0235 , G01J3/0237 , G01J3/04 , G01J3/12 , G01N2021/213
摘要： A monochromator system applicable in spectrophotometer, polarimeter and ellipsometer systems which operate over a large range of wavelengths, including a stage which enables position adjustment of the location of a source of electromagnetic radiation in lateral (X), longitudinal (Y) and vertical (Z) directions, from a common location outside an enclosure, and including multiple detector systems mounted in a manner which allows easily, sequentially, via mechanical motion, placing a first and then a second thereof so as to receive a beam of electromagnetic radiation.
摘要翻译： 一种适用于分光光度计，偏振计和椭偏仪系统的单色仪系统，其工作在大范围的波长范围，包括一个阶段，可以使位置调整横向（X），纵向（Y）和垂直（Z）的电磁辐射源的位置 ）方向，并且包括以允许容易地，顺序地通过机械运动容易地放置其第一个和第二个以便接收电磁辐射束的方式安装的多个检测器系统。
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公开(公告)号：US07460230B2
公开(公告)日：2008-12-02
申请号：US11590408
申请日：2006-10-31
CPC分类号： G02B27/286
摘要： A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
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公开(公告)号：US20080100842A1
公开(公告)日：2008-05-01
申请号：US11633138
申请日：2006-12-04
IPC分类号： G01J4/00
CPC分类号： G02B5/3083 , G01J1/0407 , G01N21/211 , G01N2021/213 , G02B26/06
摘要： A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
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8.发明授权Mounting for deviation angle self compensating substantially achromatic retarder 有权安装偏移角自补偿基本上消色差延迟器公开(公告)号：US08462341B2
公开(公告)日：2013-06-11
申请号：US13065090
申请日：2011-03-14
申请人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
发明人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
IPC分类号： G01J4/00
摘要： A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译： 一种用于配置和应用用于将相对相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中所述系统包括用于宽光谱范围的基本上无色的多元件延迟器系统（例如，190 -1700nm）旋转补偿光谱椭偏仪和/或偏振计系统。
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公开(公告)号：US10247611B1
公开(公告)日：2019-04-02
申请号：US14757280
申请日：2015-12-14
申请人： Martin M. Liphardt , Ping He , Duane E. Meyer
发明人： Martin M. Liphardt , Ping He , Duane E. Meyer
摘要： Application of detectors of electromagnetic radiation and systems for enabling the optimization thereof for application over various specific wavelength ranges, involving functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics.
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10.发明申请Mounting for deviation angle self compensating substantially achromatic retarder 有权安装偏移角自补偿基本上消色差延迟器公开(公告)号：US20110188040A1
公开(公告)日：2011-08-04
申请号：US13065090
申请日：2011-03-14
申请人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
发明人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
摘要： A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译： 一种用于配置和应用用于将相对相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中所述系统包括用于宽光谱范围的基本上无色的多元件延迟器系统（例如，190 -1700nm）旋转补偿光谱椭偏仪和/或偏振计系统。
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