公开(公告)号：US08820170B2

公开(公告)日：2014-09-02

申请号：US13615783

申请日：2012-09-14

申请人： Rob Slakhorst ,  Gerard Klaasse ,  Erik Hop ,  Arnout van den Bos ,  Wico Hopman

发明人： Rob Slakhorst ,  Gerard Klaasse ,  Erik Hop ,  Arnout van den Bos ,  Wico Hopman

IPC分类号： G01L7/08 ,  G01L9/00

CPC分类号： G01L19/145 ,  G01L19/148

摘要： Techniques disclosed herein include systems and methods for pressure measurement of fluids including vehicular fluids. The pressure sensor includes a MEMS die for pressure measurement. The MEMS die is attached to a glass pedestal member. The pedestal member is mechanically held in place via a mounting frame that attachable to a pressure port of a fluid-containing enclosure. Techniques herein provide a strong connection of a MEMS die to a pressure sensor while decoupling thermal expansion stress from the MEMS die. With such decoupling techniques, pressure sensing reliability and accuracy can be improved. With thermal expansion stress decoupled from the MEMS die, sensor sealing materials can be selected for their robust chemical properties instead of structural properties. Such techniques provide an accurate, durable, and cost-effective pressure sensor.

摘要翻译： 本文公开的技术包括用于包括车辆流体的流体的压力测量的系统和方法。 压力传感器包括用于压力测量的MEMS模头。 MEMS模头附接到玻璃基座构件。 基座构件通过可附接到流体容纳外壳的压力端口的安装框架机械地保持就位。 这里的技术提供了MEMS管芯与压力传感器的强连接，同时使来自MEMS管芯的热膨胀应力解耦。 通过这种解耦技术，可以提高压力感测的可靠性和精度。 随着从MEMS模具解耦的热膨胀应力，传感器密封材料可以选择其坚固的化学性质而不是结构特性。 这种技术提供了一种精确，耐久和经济有效的压力传感器。

公开(公告)号：US20140076057A1

公开(公告)日：2014-03-20

申请号：US13615783

申请日：2012-09-14

申请人： Rob Slakhorst ,  Gerard Klaasse ,  Erik Hop ,  Arnout van den Bos ,  Wico Hopman

发明人： Rob Slakhorst ,  Gerard Klaasse ,  Erik Hop ,  Arnout van den Bos ,  Wico Hopman

IPC分类号： G01L7/08

CPC分类号： G01L19/145 ,  G01L19/148

摘要： Techniques disclosed herein include systems and methods for pressure measurement of fluids including vehicular fluids. The pressure sensor includes a MEMS die for pressure measurement. The MEMS die is attached to a glass pedestal member. The pedestal member is mechanically held in place via a mounting frame that attachable to a pressure port of a fluid-containing enclosure. Techniques herein provide a strong connection of a MEMS die to a pressure sensor while decoupling thermal expansion stress from the MEMS die. With such decoupling techniques, pressure sensing reliability and accuracy can be improved. With thermal expansion stress decoupled from the MEMS die, sensor sealing materials can be selected for their robust chemical properties instead of structural properties. Such techniques provide an accurate, durable, and cost-effective pressure sensor.

摘要翻译： 本文公开的技术包括用于包括车辆流体的流体的压力测量的系统和方法。 压力传感器包括用于压力测量的MEMS模头。 MEMS模头附接到玻璃基座构件。 基座构件通过可附接到流体容纳外壳的压力端口的安装框架机械地保持就位。 这里的技术提供了MEMS管芯与压力传感器的强连接，同时使来自MEMS管芯的热膨胀应力解耦。 通过这种解耦技术，可以提高压力感测的可靠性和精度。 随着从MEMS模具解耦的热膨胀应力，传感器密封材料可以选择其坚固的化学性质而不是结构特性。 这种技术提供了一种精确，耐久和经济有效的压力传感器。

公开(公告)号：US20140076059A1

公开(公告)日：2014-03-20

申请号：US13615764

申请日：2012-09-14

申请人： Erik Hop ,  Gerard Klaasse ,  Rob Slakhorst ,  Wico Hopman ,  Arnout van den Bos

发明人： Erik Hop ,  Gerard Klaasse ,  Rob Slakhorst ,  Wico Hopman ,  Arnout van den Bos

IPC分类号： G01L7/00 ,  B32B37/00

CPC分类号： G01L19/04 ,  G01L19/147 ,  Y10T156/10

摘要： Techniques disclosed herein include systems and methods for pressure measurement of fluids including vehicular fluids. The pressure sensor includes a microelectromechanical system (MEMS) sensor for pressure measurement. The MEMS sensor is attached to a glass tube which is compressively sealed to a mounting frame that is attachable to a pressure port of a fluid-containing enclosure. Techniques disclosed herein provide an hermetic seal between the tube and the mounting frame and a rigid seal between the MEMS sensor to a pressure sensor while decoupling thermal expansion stress from the MEMS sensor. With such decoupling techniques, pressure sensing reliability and accuracy can be improved because thermal expansion stress is decoupled from the MEMS sensor. Such techniques provide an accurate, durable, and cost-effective pressure sensor.

摘要翻译： 本文公开的技术包括用于包括车辆流体的流体的压力测量的系统和方法。 压力传感器包括用于压力测量的微机电系统（MEMS）传感器。 MEMS传感器附接到玻璃管，该玻璃管被压缩密封到可附接到流体容纳封壳的压力端口的安装框架。 本文公开的技术提供了管和安装框架之间的气密密封，以及MEMS传感器与压力传感器之间的刚性密封，同时从MEMS传感器解耦热膨胀应力。 通过这种解耦技术，可以提高压力感测的可靠性和精度，因为热膨胀应力与MEMS传感器解耦。 这种技术提供了一种精确，耐久和经济有效的压力传感器。

公开(公告)号：US09027410B2

公开(公告)日：2015-05-12

申请号：US13615764

申请日：2012-09-14

申请人： Erik Hop ,  Gerard Klaasse ,  Rob Slakhorst ,  Wico Hopman ,  Arnout van den Bos

发明人： Erik Hop ,  Gerard Klaasse ,  Rob Slakhorst ,  Wico Hopman ,  Arnout van den Bos

IPC分类号： G01L7/00 ,  G01L19/04 ,  G01L19/14

CPC分类号： G01L19/04 ,  G01L19/147 ,  Y10T156/10

摘要： Techniques disclosed herein include systems and methods for pressure measurement of fluids including vehicular fluids. The pressure sensor includes a microelectromechanical system (MEMS) sensor for pressure measurement. The MEMS sensor is attached to a glass tube which is compressively sealed to a mounting frame that is attachable to a pressure port of a fluid-containing enclosure. Techniques disclosed herein provide an hermetic seal between the tube and the mounting frame and a rigid seal between the MEMS sensor to a pressure sensor while decoupling thermal expansion stress from the MEMS sensor. With such decoupling techniques, pressure sensing reliability and accuracy can be improved because thermal expansion stress is decoupled from the MEMS sensor. Such techniques provide an accurate, durable, and cost-effective pressure sensor.

摘要翻译： 本文公开的技术包括用于包括车辆流体的流体的压力测量的系统和方法。 压力传感器包括用于压力测量的微机电系统（MEMS）传感器。 MEMS传感器附接到玻璃管，该玻璃管被压缩密封到可附接到流体容纳封壳的压力端口的安装框架。 本文公开的技术提供了管和安装框架之间的气密密封，以及MEMS传感器与压力传感器之间的刚性密封，同时从MEMS传感器分离热膨胀应力。 通过这种解耦技术，可以提高压力感测的可靠性和精度，因为热膨胀应力与MEMS传感器解耦。 这种技术提供了一种精确，耐久和经济有效的压力传感器。