公开(公告)号：US07901970B2

公开(公告)日：2011-03-08

申请号：US11939589

申请日：2007-11-14

申请人： Anis Zribi ,  Glenn Scott Claydon ,  Christopher James Kapusta ,  Laura Jean Meyer ,  Ertugal Berkcan ,  Wei-Cheng Tian

发明人： Anis Zribi ,  Glenn Scott Claydon ,  Christopher James Kapusta ,  Laura Jean Meyer ,  Ertugal Berkcan ,  Wei-Cheng Tian

IPC分类号： H01L21/00

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.

摘要翻译： 基于微机电系统（MEMS）的电流和磁场传感器包括具有电容式磁MEMS组件的基于MEMS的磁场感测部件，补偿器和用于感测磁场的输出部件，并且响应于此而提供 当前存在于待测量的导体中的指示。 在一个实施例中，第一和第二机械感测部件是导电的并且用于响应于来自磁 - 机械转换器的机械指示器感测机械感测部件之间的电容的变化。

公开(公告)号：US20080070338A1

公开(公告)日：2008-03-20

申请号：US11939589

申请日：2007-11-14

申请人： Anis Zribi ,  Glenn Claydon ,  Christopher Kapusta ,  Laura Meyer ,  Ertugal Berkcan ,  Wei-Cheng Tian

发明人： Anis Zribi ,  Glenn Claydon ,  Christopher Kapusta ,  Laura Meyer ,  Ertugal Berkcan ,  Wei-Cheng Tian

IPC分类号： H01L21/02

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.

摘要翻译： 基于微机电系统（MEMS）的电流和磁场传感器包括具有电容式磁MEMS组件的基于MEMS的磁场感测部件，补偿器和用于感测磁场的输出部件，并且响应于此而提供 当前存在于待测量的导体中的指示。 在一个实施例中，第一和第二机械感测部件是导电的并且用于响应于来自磁 - 机械转换器的机械指示器感测机械感测部件之间的电容的变化。