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公开(公告)号：US12106933B2
公开(公告)日：2024-10-01
申请号：US17694549
申请日：2022-03-14
申请人： FEI Company
发明人： Jan Stopka , Bohuslav Sed'a
IPC分类号： H01J37/28 , H01J37/10 , H01J37/153
CPC分类号： H01J37/28 , H01J37/10 , H01J37/153 , H01J2237/0453 , H01J2237/1532
摘要： An example multi-beam scanning electron microscope (MB-SEM) for correcting both astigmatism and linear distortion at least includes an electron source coupled to provide an electron beam, an aperture plate comprising an array of apertures, the aperture plate arranged to form an array of electron beamlets from the electron beam, and an electron column including a plurality of lenses and first and second stigmators, the electron column coupled to direct the array of electron beamlets toward a sample, wherein the first and second stigmators are arranged and excited to correct both astigmatism and linear distortion.
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公开(公告)号：US12085523B2
公开(公告)日：2024-09-10
申请号：US18516645
申请日：2023-11-21
申请人： FEI Company
发明人： Pavel Potocek
IPC分类号： G01N23/2251 , H01J37/26 , H01J37/28
CPC分类号： G01N23/2251 , H01J37/265 , H01J37/28 , G01N2223/401 , G01N2223/408 , G01N2223/418
摘要： A method comprises: using a Scanning Electron Microscope (SEM) to acquire an image of a specimen; identifying one or more objects of interest within the SEM image; generating a scan mask indicating a first set of one or more regions corresponding to the identified one or more objects of interest; and based on the scan mask, providing instructions to the SEM to acquire one or more Electron Backscatter Diffraction (EBSD) images from the first set of one or more regions of the specimen, wherein the method is performed by at least one device including a hardware processor.
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公开(公告)号：US20240280522A1
公开(公告)日：2024-08-22
申请号：US18171541
申请日：2023-02-20
申请人： FEI COMPANY
发明人： Hans Vanrompay , Maurice Peemen
IPC分类号： G01N23/2252 , G06N3/0455
CPC分类号： G01N23/2252 , G06N3/0455
摘要： Disclosed herein are scientific instrument support systems, as well as related methods, apparatus, computing devices, and computer-readable media. Some embodiments provide a scientific instrument including detectors supporting one or more spectroscopic modalities and an imaging modality and further including an electronic controller configured to process streams of measurements received from the detectors. The electronic controller operates to generate a base image of the sample based on the measurements corresponding to the imaging modality and further operates to generate an anomaly map of the sample based on the base image and further based on differences between measured and autoencoder-reconstructed spectra corresponding to different pixels of the base image. In at least some instances, the anomaly map can beneficially be used in a quality-control procedure to identify, within seconds, specific problem spots in the sample for more-detailed inspection and/or analyses.
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公开(公告)号：US20240266142A1
公开(公告)日：2024-08-08
申请号：US18617227
申请日：2024-03-26
申请人： FEI Company
IPC分类号： H01J37/305 , H01J37/20 , H01J37/244 , H01J37/28
CPC分类号： H01J37/3056 , H01J37/20 , H01J37/244 , H01J37/28 , H01J2237/2007 , H01J2237/208 , H01J2237/31745 , H01J2237/31749
摘要： Methods and systems for creating attachments between a sample manipulator and a sample within a charged particle systems are disclosed herein. Methods include translating a sample manipulator so that it is proximate to a sample, and milling portions of the sample manipulator such that portions are removed. The portion of the sample manipulator proximate to the sample is composed of a high sputter yield material, and the high sputter yield material may be the material milled with the charged particle beam such that it is removed from the sample manipulator. According to the present disclosure, the portions of the sample manipulator are milled such that at least some of the removed high sputter yield material redeposits to form an attachment between the sample manipulator and the sample.
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公开(公告)号：US12057286B2
公开(公告)日：2024-08-06
申请号：US18084430
申请日：2022-12-19
申请人： FEI Company
发明人： Edwin Verschueren , Paul Tacx
CPC分类号： H01J37/023 , H01J37/28 , H01J2237/20221 , H01J2237/20264 , H01J2237/20278 , H01J2237/2802
摘要： A method of producing a compensation signal to compensate for misalignment of a drive unit clamp element can include applying a clamp element drive signal to a drive unit clamp element to engage a mover element, determining a first displacement of the mover element, and determining a first compensation signal based at least in part on the first displacement. The method can further comprise applying the first compensation signal to the drive unit shear elements and the clamp element drive signal to the drive unit clamp element and determining a second displacement of the mover element. If the second displacement is less than a preselected threshold, the first compensation signal can be combined with an initial shear element drive signal to produce a modified shear element drive signal. If the second displacement is greater than the preselected threshold, a second compensation signal can be determined.
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公开(公告)号：US20240194466A1
公开(公告)日：2024-06-13
申请号：US18076813
申请日：2022-12-07
申请人： FEI Company
CPC分类号： H01J49/0036 , H01J49/44
摘要： Methods and systems for automatically tuning an EELS spectrometer according to the present disclosure include obtaining an initial measurement of an EELS spectrum, generating an simulated EELS spectrum fit to the initial measurement of the EELS spectrum, and estimating one or more values of one or more aberration parameters based on the simulated EELS spectrum. Then, using the value(s) of the aberration parameter(s) to tune the optical elements of the EELS spectrometer to remove and/or reduce aberrations in the EELS system.
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公开(公告)号：US20240167935A1
公开(公告)日：2024-05-23
申请号：US18515557
申请日：2023-11-21
申请人： FEI COMPANY
发明人： Chien-Sheng LIAO
IPC分类号： G01N15/14
CPC分类号： G01N15/1436 , G01N15/1404 , G01N2015/0065
摘要： A flow cell for use with a spectrometer is described. The flow cell includes a waveguide having a hollow core. An inlet is fluidly coupled at a first end of the hollow core, and an outlet is fluidly coupled at a second end of the hollow core. A window at the inlet is optically coupled to the waveguide at the second end, and a mirror at the outlet is optically coupled to the waveguide at the second end. The flow cell also includes a first conduit configured to couple a fluid to the inlet, and a second conduit configured to couple the fluid to the outlet. Methods and systems using the flow cell are described. For example, methods and systems for monitoring a bioreactor.
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公开(公告)号：US11961709B2
公开(公告)日：2024-04-16
申请号：US17873778
申请日：2022-07-26
申请人： FEI Company
IPC分类号： H01J37/317 , H01J37/12 , H01J37/244
CPC分类号： H01J37/3177 , H01J37/12 , H01J37/244 , H01J2237/0453 , H01J2237/1534 , H01J2237/2817
摘要： The invention relates to a charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets. The charged particle beam device comprises a specimen holder for holding a specimen; a source for producing a beam of charged particles; and an illuminator for converting said beam of charged particles into a plurality of charged particle beamlets and directing said plurality of charged particle beamlets onto said specimen. According to the disclosure, the illuminator comprises a multi-aperture lens plate having a plurality of apertures for defining the corresponding plurality of charged particle beamlets; as well as at least a first electrode for generating an electrical field at a surface of the multi-aperture lens plate. The apertures in said multi-aperture lens plate have a noncircular cross-sectional shape to correct for neighbouring aperture induced aberrations. This allows for decreased spot size, and with this imaging resolution of the device is increased.
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9.发明授权公开(公告)号：US11955310B2
公开(公告)日：2024-04-09
申请号：US17214719
申请日：2021-03-26
申请人： FEI Company
IPC分类号： H01J37/28 , H01J37/10 , H01J37/147 , H01J37/20 , H01J37/26
CPC分类号： H01J37/28 , H01J37/10 , H01J37/1474 , H01J37/20 , H01J37/265 , H01J2237/24485 , H01J2237/2802 , H01J2237/31749
摘要： The invention relates to a transmission charged particle microscope comprising a charged particle beam source for emitting a charged particle beam, a sample holder for holding a sample, an illuminator for directing the charged particle beam emitted from the charged particle beam source onto the sample, and a control unit for controlling operations of the transmission charged particle microscope. As defined herein, the transmission charged particle microscope is arranged for operating in at least two modes that substantially yield a first magnification whilst keeping said diffraction pattern substantially in focus. Said at least two modes comprise a first mode having first settings of a final projector lens of a projecting system; and a second mode having second settings of said final projector lens.
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公开(公告)号：US20240110881A1
公开(公告)日：2024-04-04
申请号：US18051170
申请日：2022-10-31
申请人： FEI Company
发明人： James B. McGinn
IPC分类号： G01N23/2251
CPC分类号： G01N23/2251 , G01N2223/07 , G01N2223/418 , G01N2223/507
摘要： Detectors, systems, and methods for detecting lateral beam displacement for a beam microscopy system are described herein. In one aspect, a detector can include an aperture for allowing a charged particle beam passing through the detector and irradiating a sample; and a plurality of rails arranged in a first plane extending radially outward from the aperture, wherein each of the plurality of rails is configured to detect charged particles from the charged particle beam before irradiating the sample.
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