-
公开(公告)号:US07361911B2
公开(公告)日:2008-04-22
申请号:US11007579
申请日:2004-12-09
申请人: Johannes Hubertus Josephina Moors , Robertus Nicodemus Jacobus Van Ballegoij , Vadim Yevgenyevich Banine , Gert-Jan Heerens , Frederik Theodorus Elisabeth Heuts , Johannes Henricus Wilhelmus Jacobs , Paulus Martinus Maria Liebregts , Hendrik Antony Johannes Neerhof
发明人: Johannes Hubertus Josephina Moors , Robertus Nicodemus Jacobus Van Ballegoij , Vadim Yevgenyevich Banine , Gert-Jan Heerens , Frederik Theodorus Elisabeth Heuts , Johannes Henricus Wilhelmus Jacobs , Paulus Martinus Maria Liebregts , Hendrik Antony Johannes Neerhof
IPC分类号: B21D53/84
CPC分类号: G03F7/70916 , G03F7/70883 , G03F7/70908
摘要: A device manufacturing method includes projecting a patterned beam of radiation through an optics compartment and a channel that provides an open connection between the optics compartment and a substrate compartment onto a substrate, maintaining an ionized flush gas at a higher pressure in the channel than in the substrate compartment and in the optics compartment during the projecting, intercepting particles that emanate from the substrate with the ionized flush gas, pumping the flush gas carrying the intercepted particles from the substrate compartment using a pump coupled to a gas outlet coupled to at least one of the compartments, and establishing an electrical potential difference between a wall of the channel and the outlet and/or a rotor of the pump so that the outlet and/or the rotor of the pump attracts positively charged ions that stem from the flush gas in the channel.
摘要翻译: 一种器件制造方法包括将图案化的辐射束投射通过光学隔室和通道,其在光学隔室和衬底隔室之间提供开放的连接到衬底上,保持电离冲洗气体在通道中的压力高于在 衬底隔室和在光电隔室中,在用电离冲洗气体从衬底发射的颗粒中突出,截留颗粒时,使用耦合到与至少一个 隔室,并且在通道的壁与出口和/或泵的转子之间建立电势差,使得泵的出口和/或转子吸引来自于冲洗气体的带正电荷的离子 渠道。