公开(公告)号：US09093601B2

公开(公告)日：2015-07-28

申请号：US13398877

申请日：2012-02-17

申请人： Shunpei Yamazaki ,  Fumito Isaka ,  Jiro Nishida

发明人： Shunpei Yamazaki ,  Fumito Isaka ,  Jiro Nishida

IPC分类号： H01L31/00 ,  H01L31/18 ,  H01L31/074 ,  H01L31/075 ,  H01L31/0224

CPC分类号： H01L31/1868 ,  H01L31/022466 ,  H01L31/074 ,  H01L31/075 ,  H01L31/1804 ,  Y02E10/547 ,  Y02E10/548 ,  Y02E10/549 ,  Y02P70/521

摘要： An object is to provide a photoelectric conversion device which has little loss of light absorption in a window layer and has high conversion efficiency. A photoelectric conversion device including a crystalline silicon substrate having n-type conductivity and a light-transmitting semiconductor layer having p-type conductivity between a pair of electrodes is formed. In the photoelectric conversion device, a p-n junction is formed between the crystalline silicon substrate and the light-transmitting semiconductor layer, and the light-transmitting semiconductor layer serves as a window layer. The light-transmitting semiconductor layer includes an organic compound and an inorganic compound. As the organic compound and the inorganic compound, a material having a high hole-transport property and a transition metal oxide having an electron-accepting property are respectively used.

摘要翻译： 目的在于提供一种在窗口层中几乎没有光吸收损失并具有高转换效率的光电转换装置。 形成包括具有n型导电性的晶体硅衬底和在一对电极之间具有p型导电性的透光半导体层的光电转换装置。 在光电转换装置中，在结晶硅衬底和透光半导体层之间形成p-n结，透光半导体层用作窗口层。 透光半导体层包括有机化合物和无机化合物。 作为有机化合物和无机化合物，分别使用具有高空穴传输性的材料和具有电子接受性的过渡金属氧化物。

公开(公告)号：US08815635B2

公开(公告)日：2014-08-26

申请号：US13285062

申请日：2011-10-31

申请人： Tetsuhiro Tanaka ,  Fumito Isaka

发明人： Tetsuhiro Tanaka ,  Fumito Isaka

IPC分类号： H01L21/00 ,  H01L31/076

CPC分类号： H01L31/076 ,  H01L31/0747 ,  H01L31/1824 ,  H01L31/202 ,  Y02E10/545 ,  Y02P70/521

摘要： A photoelectric conversion device has a structure that includes a first amorphous silicon layer and a second amorphous silicon layer that are in contact with a single crystalline silicon substrate, and a first microcrystalline silicon layer with one conductivity type and a second microcrystalline silicon layer with a conductivity type that is opposite the one conductivity type that are in contact with the first and second amorphous silicon layers, respectively. The first and second microcrystalline silicon layers are formed using a plasma CVD apparatus that is suitable for high pressure film formation conditions.

摘要翻译： 光电转换装置具有包括与单晶硅衬底接触的第一非晶硅层和第二非晶硅层以及具有一种导电型的第一微晶硅层和具有导电性的第二微晶硅层的结构 类型与分别与第一和第二非晶硅层接触的一种导电类型相反。 使用适合高压成膜条件的等离子体CVD装置形成第一和第二微晶硅层。

公开(公告)号：US20110318864A1

公开(公告)日：2011-12-29

申请号：US13222423

申请日：2011-08-31

申请人： Fumito ISAKA ,  Sho KATO ,  Junpei MOMO

发明人： Fumito ISAKA ,  Sho KATO ,  Junpei MOMO

IPC分类号： H01L31/18

CPC分类号： H01L31/022425 ,  H01L31/0236 ,  H01L31/02363 ,  H01L31/03685 ,  H01L31/03762 ,  H01L31/068 ,  H01L31/1892 ,  Y02E10/545 ,  Y02E10/547 ,  Y02E10/548

摘要： The purpose is manufacturing a photoelectric conversion device with excellent photoelectric conversion characteristics typified by a solar cell with effective use of a silicon material. A single crystal silicon layer is irradiated with a laser beam through an optical modulator to form an uneven structure on a surface thereof. The single crystal silicon layer is obtained in the following manner; an embrittlement layer is formed in a single crystal silicon substrate; one surface of a supporting substrate and one surface of an insulating layer formed over the single crystal silicon substrate are disposed to be in contact and bonded; heat treatment is performed; and the single crystal silicon layer is formed over the supporting substrate by separating part of the single crystal silicon substrate fixed to the supporting substrate along the embrittlement layer or a periphery of the embrittlement layer. Then, irradiation with a laser beam is performed on a separation surface of the single crystal silicon layer through an optical modulator which modulates light intensity regularly, and unevenness is formed on the surface. Due to the unevenness, reflection of incident light is reduced and absorptance with respect to light is improved, therefore, photoelectric conversion efficiency of the photoelectric conversion device is improved.

摘要翻译： 目的是制造具有优异的光电转换特性的光电转换装置，其特征在于以太阳能电池为代表，有效利用硅材料。 通过光学调制器用激光束照射单晶硅层，以在其表面上形成不均匀的结构。 以下列方式获得单晶硅层： 在单晶硅衬底中形成脆化层; 支撑基板的一个表面和形成在单晶硅基板上的绝缘层的一个表面被设置成接触和接合; 进行热处理; 并且通过沿着脆化层或脆化层的周边分离固定到支撑基板上的一部分单晶硅基板，在支撑基板上形成单晶硅层。 然后，通过光调制器在单晶硅层的分离面上进行激光束的照射，光调制器规则地调制光强度，并且在表面上形成不均匀性。 由于不均匀性，入射光的反射降低，相对于光的吸收性提高，光电转换装置的光电转换效率提高。

公开(公告)号：US20110092013A1

公开(公告)日：2011-04-21

申请号：US12977213

申请日：2010-12-23

申请人： Fumito ISAKA ,  Sho KATO ,  Koji DAIRIKI

发明人： Fumito ISAKA ,  Sho KATO ,  Koji DAIRIKI

IPC分类号： H01L31/18

CPC分类号： H01L31/1804 ,  H01L31/02168 ,  H01L31/022433 ,  H01L31/03762 ,  H01L31/0725 ,  H01L31/1864 ,  H01L31/202 ,  Y02E10/547 ,  Y02E10/548 ,  Y02P70/521

摘要： A fragile layer is formed in a region at a depth of less than 1000 nm from one surface of a single crystal semiconductor substrate, and a first impurity semiconductor layer and a first electrode are formed at the one surface side. After bonding the first electrode and a supporting substrate, the single crystal semiconductor substrate is separated using the fragile layer or the vicinity as a separation plane, thereby forming a first single crystal semiconductor layer over the supporting substrate. An amorphous semiconductor layer is formed on the first single crystal semiconductor layer, and a second single crystal semiconductor layer is formed by heat treatment for solid phase growth of the amorphous semiconductor layer. A second impurity semiconductor layer having a conductivity type opposite to that of the first impurity semiconductor layer and a second electrode are formed over the second single crystal semiconductor layer.

摘要翻译： 在单晶半导体衬底的一个表面的深度小于1000nm的区域形成脆性层，在一个表面侧形成第一杂质半导体层和第一电极。 在接合第一电极和支撑衬底之后，使用脆弱层或附近分离单晶半导体衬底作为分离平面，从而在支撑衬底上形成第一单晶半导体层。 在第一单晶半导体层上形成非晶半导体层，通过对非晶半导体层的固相生长进行热处理形成第二单晶半导体层。 在第二单晶半导体层上形成具有与第一杂质半导体层的导电类型相反的导电类型的第二杂质半导体层和第二电极。

公开(公告)号：US07767547B2

公开(公告)日：2010-08-03

申请号：US12360419

申请日：2009-01-27

申请人： Fumito Isaka ,  Sho Kato ,  Kosei Nei ,  Ryu Komatsu ,  Tatsuya Mizoi ,  Akihisa Shimomura

发明人： Fumito Isaka ,  Sho Kato ,  Kosei Nei ,  Ryu Komatsu ,  Tatsuya Mizoi ,  Akihisa Shimomura

IPC分类号： H01L21/46

CPC分类号： H01L21/76254

摘要： An SOI substrate is manufactured by a method in which a first insulating film is formed over a first substrate over which a plurality of first single crystal semiconductor films is formed; the first insulating film is planarized; heat treatment is performed on a single crystal semiconductor substrate attached to the first insulating film; a second single crystal semiconductor film is formed; a third single crystal semiconductor film is formed using the first single crystal semiconductor films and the second single crystal semiconductor films as seed layers; a fragile layer is formed by introducing ions into the third single crystal semiconductor film; a second insulating film is formed over the third single crystal semiconductor film; heat treatment is performed on a second substrate superposed on the second insulating film; and a part of the third single crystal semiconductor film is fixed to the second substrate.

摘要翻译： 通过在形成有多个第一单晶半导体膜的第一基板上形成第一绝缘膜的方法制造SOI衬底; 第一绝缘膜被平坦化; 对附着在第一绝缘膜上的单晶半导体衬底进行热处理; 形成第二单晶半导体膜; 使用第一单晶半导体膜和第二单晶半导体膜作为晶种层形成第三单晶半导体膜; 通过将离子引入第三单晶半导体膜中形成脆性层; 在第三单晶半导体膜上形成第二绝缘膜; 在叠置在第二绝缘膜上的第二基板上进行热处理; 并且第三单晶半导体膜的一部分固定到第二基板。

公开(公告)号：US20090117716A1

公开(公告)日：2009-05-07

申请号：US12259241

申请日：2008-10-27

申请人： Akihisa SHIMOMURA ,  Junpei Momo ,  Fumito Isaka

发明人： Akihisa SHIMOMURA ,  Junpei Momo ,  Fumito Isaka

IPC分类号： H01L21/62

CPC分类号： H01L21/76254

摘要： To provide a high-performance semiconductor device using an SOI substrate in which a substrate having low heat resistance is used as a base substrate, to provide a high-performance semiconductor device without performing mechanical polishing, and to provide an electronic device using the semiconductor device, planarity of a semiconductor layer is improved and defects in the semiconductor layer are reduced by laser beam irradiation. Accordingly, a high-performance semiconductor device can be provided without performing mechanical polishing. In addition, a semiconductor device is manufactured using a region having the most excellent characteristics in a region irradiated with the laser beam. Specifically, instead of the semiconductor layer in a region which is irradiated with the edge portion of the laser beam, the semiconductor layer in a region which is irradiated with portions of the laser beam except the edge portion is used as a semiconductor element. Accordingly, performance of the semiconductor device can be greatly improved. Moreover, an excellent electronic device can be provided.

摘要翻译： 为了提供使用其中使用耐热性低的衬底的SOI衬底的高性能半导体器件用作基底衬底，以提供不执行机械抛光的高性能半导体器件，并且提供使用该半导体器件的电子器件 通过激光束照射改善了半导体层的平坦度，减小了半导体层的缺陷。 因此，可以提供高性能半导体器件而不进行机械抛光。 此外，使用在激光束照射的区域中具有最优异特性的区域来制造半导体器件。 具体地，代替在激光束的边缘部分照射的区域中的半导体层，将被照射到除了边缘部分之外的部分激光束的区域中的半导体层用作半导体元件。 因此，可以大大提高半导体器件的性能。 此外，可以提供优良的电子装置。

公开(公告)号：US09437758B2

公开(公告)日：2016-09-06

申请号：US13398872

申请日：2012-02-17

申请人： Shunpei Yamazaki ,  Fumito Isaka ,  Jiro Nishida

发明人： Shunpei Yamazaki ,  Fumito Isaka ,  Jiro Nishida

IPC分类号： H01L31/00 ,  H01L31/0236 ,  H01L31/028 ,  H01L31/068 ,  H01L31/056

CPC分类号： H01L31/02363 ,  H01L31/028 ,  H01L31/056 ,  H01L31/068 ,  Y02E10/52 ,  Y02E10/547

摘要： A photoelectric conversion device in photoelectric conversion in a light-absorption region in a crystalline silicon substrate is efficiently performed is provided. In the photoelectric conversion device, a light-transmitting conductive film which has a high effect of passivation of defects on a silicon surface and improves the reflectance on a back electrode side is provided between the back electrode and the crystalline silicon substrate, The light-transmitting conductive film includes an organic compound and an inorganic compound. The organic compound includes 4-phenyl-4′-(9-phenylfluoren-9-yl)triphenylamine. The inorganic compound includes an oxide of a metal belonging to any of Groups 4 to 8 of the periodic table.

摘要翻译： 提供了一种在晶体硅衬底中的光吸收区域中进行光电转换的光电转换装置。 在光电转换装置中，在背面电极和结晶硅基板之间设置有具有高的硅表面上的缺陷钝化和提高背面电极侧的反射率的透光性导电膜。透光性 导电膜包括有机化合物和无机化合物。 有机化合物包括4-苯基-4' - （9-苯基芴-9-基）三苯胺。 无机化合物包括属于周期表第4至8族中任何一种的金属的氧化物。

公开(公告)号：US08981379B2

公开(公告)日：2015-03-17

申请号：US13239853

申请日：2011-09-22

申请人： Akihisa Shimomura ,  Hidekazu Miyairi ,  Fumito Isaka ,  Yasuhiro Jinbo ,  Junya Maruyama

发明人： Akihisa Shimomura ,  Hidekazu Miyairi ,  Fumito Isaka ,  Yasuhiro Jinbo ,  Junya Maruyama

IPC分类号： H01L29/04 ,  H01L21/20 ,  H01L27/12 ,  H01L29/786

CPC分类号： H01L21/02683 ,  H01L21/02422 ,  H01L21/02532 ,  H01L21/02592 ,  H01L21/02686 ,  H01L21/2026 ,  H01L27/1214 ,  H01L27/1266 ,  H01L27/1285 ,  H01L29/66757 ,  H01L29/78603 ,  H01L29/78675

摘要： It is an object to provide a method of manufacturing a crystalline silicon device and a semiconductor device in which formation of cracks in a substrate, a base protective film, and a crystalline silicon film can be suppressed. First, a layer including a semiconductor film is formed over a substrate, and is heated. A thermal expansion coefficient of the substrate is 6×10−7/° C. to 38×10−7/° C., preferably 6×10−7/° C. to 31.8×10−7/° C. Next, the layer including the semiconductor film is irradiated with a laser beam to crystallize the semiconductor film so as to form a crystalline semiconductor film. Total stress of the layer including the semiconductor film is −500 N/m to +50 N/m, preferably −150 N/m to 0 N/m after the heating step.

摘要翻译： 本发明的目的是提供一种制造晶体硅器件和半导体器件的方法，其中可以抑制衬底，基底保护膜和晶体硅膜中的裂纹的形成。 首先，在基板上形成包含半导体膜的层，并加热。 基板的热膨胀系数为6×10-7 /℃至38×10-7 /℃，优选为6×10-7 /℃至31.8×10-7 /℃。接下来， 用激光束照射包含半导体膜的层，使半导体膜结晶化，形成结晶半导体膜。 包括半导体膜的层的总应力在加热步骤之后为-500N / m至+ 50N / m，优选为-150N / m至0N / m。

公开(公告)号：US08772128B2

公开(公告)日：2014-07-08

申请号：US12246577

申请日：2008-10-07

申请人： Shunpei Yamazaki ,  Junpei Momo ,  Fumito Isaka ,  Eiji Higa ,  Masaki Koyama ,  Akihisa Shimomura

发明人： Shunpei Yamazaki ,  Junpei Momo ,  Fumito Isaka ,  Eiji Higa ,  Masaki Koyama ,  Akihisa Shimomura

IPC分类号： H01L21/762

CPC分类号： H01L27/1266 ,  B23K26/03 ,  B23K26/083 ,  B23K26/12 ,  B23K26/127 ,  B23K26/14 ,  H01L21/268 ,  H01L21/3247 ,  H01L21/76254 ,  H01L27/1214 ,  H01L27/1218 ,  H01L29/66772

摘要： A single crystal semiconductor substrate is irradiated with ions that are generated by exciting a hydrogen gas and are accelerated with an ion doping apparatus, thereby forming a damaged region that contains a large amount of hydrogen. After the single crystal semiconductor substrate and a supporting substrate are bonded, the single crystal semiconductor substrate is heated to be separated along the damaged region. While a single crystal semiconductor layer separated from the single crystal semiconductor substrate is heated, this single crystal semiconductor layer is irradiated with a laser beam. The single crystal semiconductor layer undergoes re-single-crystallization by being melted through laser beam irradiation, thereby recovering its crystallinity and planarizing the surface of the single crystal semiconductor layer.

摘要翻译： 照射通过激发氢气产生的离子并用离子掺杂装置加速的单晶半导体衬底，从而形成含有大量氢的损伤区域。 在单晶半导体衬底和支撑衬底接合之后，单晶半导体衬底被加热以沿着损伤区域分离。 当与单晶半导体衬底分离的单晶半导体层被加热时，用激光束照射该单晶半导体层。 单晶半导体层通过激光束照射熔融而进行再单晶化，从而回收其结晶性并使单晶半导体层的表面平坦化。

公开(公告)号：US08349702B2

公开(公告)日：2013-01-08

申请号：US12426305

申请日：2009-04-20

申请人： Sho Kato ,  Satoshi Toriumi ,  Fumito Isaka

发明人： Sho Kato ,  Satoshi Toriumi ,  Fumito Isaka

IPC分类号： H01L21/30 ,  H01L21/46

CPC分类号： H01L21/02532 ,  H01L21/0262 ,  H01L21/02667 ,  H01L21/02686 ,  H01L21/76254

摘要： A semiconductor substrate is provided by a method suitable for mass production. Further, a semiconductor substrate having an excellent characteristic with effective use of resources is provided. A single crystal semiconductor substrate is irradiated with ions to form a damaged region in the single crystal semiconductor substrate; an insulating layer is formed over the single crystal semiconductor substrate; the insulating layer and a supporting substrate are bonded to each other; a first single crystal semiconductor layer is formed over the supporting substrate by partially separating the single crystal semiconductor substrate at the damaged region; a first semiconductor layer is formed over the first single crystal semiconductor layer; a second semiconductor layer is formed over the first semiconductor layer with a different condition from that used for forming the first semiconductor layer; a second single crystal semiconductor layer is formed by improving crystallinity of the first and the second semiconductor layers.

摘要翻译： 通过适合于批量生产的方法提供半导体衬底。 此外，提供了具有优异特性的具有有效利用资源的半导体衬底。 单晶半导体衬底被照射以在单晶半导体衬底中形成受损区域; 在单晶半导体衬底上形成绝缘层; 绝缘层和支撑基板彼此接合; 通过在损伤区域部分分离单晶半导体衬底，在支撑衬底上形成第一单晶半导体层; 在所述第一单晶半导体层上形成第一半导体层; 在与第一半导体层的形成不同的条件下，在第一半导体层上形成第二半导体层; 通过提高第一和第二半导体层的结晶度来形成第二单晶半导体层。