SEMICONDUCTOR DEVICE PACKAGING HAVING PRE-ENCAPSULATION THROUGH VIA FORMATION
    6.
    发明申请
    SEMICONDUCTOR DEVICE PACKAGING HAVING PRE-ENCAPSULATION THROUGH VIA FORMATION 审中-公开
    具有通过形成的预封装的半导体器件封装

    公开(公告)号:US20130049218A1

    公开(公告)日:2013-02-28

    申请号:US13222150

    申请日:2011-08-31

    IPC分类号: H01L21/77 H01L21/56 H01L23/48

    摘要: A method for forming signal conduits before encapsulation for incorporation as through vias in a semiconductor device package is provided. One or more signal conduits are formed through photolithography and metal deposition on a metal film or substrate. After removing photoresistive material, the semiconductor device package is built by encapsulating the signal conduits along with any semiconductor die and other parts of the package. The ends of the signal conduits are exposed and the signal conduits can then be used as through vias, providing signal-bearing pathways between interconnects or contacts on the bottom and top of the package, and electrical contacts of the semiconductor die. Using this method, signal conduits can be provided in a variety of geometric placings in the semiconductor device package. A semiconductor device package including the signal conduits made from the above method is also provided.

    摘要翻译: 提供了一种用于在封装之前形成信号导管以在半导体器件封装中通过通孔并入的方法。 通过光刻和金属沉积在金属膜或衬底上形成一个或多个信号导管。 在除去光致抗蚀材料之后,通过封装信号导管以及任何半导体管芯和封装的其它部分来构建半导体器件封装。 信号管道的端部被暴露,然后可以将信号导管用作通孔,在封装的底部和顶部上的互连或触点之间提供信号承载通路,以及半导体管芯的电触头。 使用该方法,信号导管可以以半导体器件封装中的各种几何布置提供。 还提供了包括由上述方法制成的信号导管的半导体器件封装。