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公开(公告)号：US20240361664A1
公开(公告)日：2024-10-31
申请号：US18637686
申请日：2024-04-17
发明人： Koyo WATANABE , Takashi INOUE
IPC分类号： G02F1/35
CPC分类号： G02F1/353 , G02F1/3501 , G02F2203/12 , G02F2203/26 , G02F2203/54
摘要： An optical pulse train generation device includes a storage unit and a characteristic setting unit. The storage unit stores a plurality of phase patterns in advance. The plurality of phase patterns are phase patterns for forming, from a first optical pulse, an optical pulse train including a plurality of second optical pulses having time differences therebetween and having different center wavelengths. Between the plurality of phase patterns, one or both of a first characteristic regarding the first optical pulse and a second characteristic regarding the optical pulse train are different. The characteristic setting unit sets the first characteristic and the second characteristic in response to the user's input. The storage unit stores the plurality of phase patterns in association with the first characteristic and the second characteristic. A spatial light modulator displays a phase pattern corresponding to the first characteristic and the second characteristic set by the characteristic setting unit.
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公开(公告)号：US20240361382A1
公开(公告)日：2024-10-31
申请号：US18579888
申请日：2022-03-15
发明人： Masataka IKESU , Tomonori NAKAMURA
IPC分类号： G01R31/311 , G01R31/28
CPC分类号： G01R31/311 , G01R31/2879
摘要： A semiconductor failure analysis device includes a first analysis unit that emits first irradiation light along a first path set on a first main surface of a semiconductor device, a second analysis unit that emits second irradiation light along a second path set on a second main surface that is a back side of the first main surface, an electric signal acquisition unit that receives an electric signal output from the semiconductor device irradiated with the first irradiation light and the second irradiation light, and a computer that controls the second analysis unit. A size of a first irradiation region is different from a size of a second irradiation region. The computer emits the first irradiation light and the second irradiation light while a state where the entire second irradiation region overlaps the first irradiation region is maintained.
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公开(公告)号：US20240356307A1
公开(公告)日：2024-10-24
申请号：US18630207
申请日：2024-04-09
IPC分类号： H01S5/34 , H01S5/00 , H01S5/02216 , H01S5/02253 , H01S5/14
CPC分类号： H01S5/3402 , H01S5/0064 , H01S5/02216 , H01S5/02253 , H01S5/141
摘要： A laser module according to an embodiment includes a QCL element, a diffraction grating portion configured to diffract and reflect first light emitted from a first end face of the QCL element and return second light as a part of the first light to the first end face, a lens member configured to be disposed between the first end face and the diffraction grating portion and allow the first light and the second light to pass therethrough, and a lens holder configured to support the lens member. The lens member includes a first portion configured to constitute a collimator lens collimating the first light, and a second portion configured to be connected to an outer edge portion of the first portion and not to constitute the collimator lens when viewed from an X-axis direction.
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公开(公告)号：US20240355572A1
公开(公告)日：2024-10-24
申请号：US18682276
申请日：2022-08-05
IPC分类号： H01J1/34
摘要： A photoelectric conversion device is provided with an electron emitter including a meta-surface emitting an electron in response to incidence of an electromagnetic wave. The meta-surface includes a plurality of photoelectric conversion units having a sensitivity for electromagnetic waves having mutually different wavelength regions. The plurality of photoelectric conversion units respectively include patterns having mutually different configurations.
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5.发明公开公开(公告)号：US20240344985A1
公开(公告)日：2024-10-17
申请号：US18293518
申请日：2022-07-25
CPC分类号： G01N21/6456 , G01N21/6428 , G06T7/0002 , G01N2021/6439 , G06T2207/10064
摘要： A dye image acquisition system includes an image acquisition device that irradiates a sample with each of excitation light beams having C wavelength distributions and acquires the C fluorescence images each including N pixels; and an image processing device that clusters the N pixels into L (L is an integer of 2 or more and N−1 or less) pixel groups based on fluorescence intensities of respective pixels of the C fluorescence images, generates L cluster matrices in which the C fluorescence images are arranged, calculates statistical values of the fluorescence intensities of the pixel groups configuring the C fluorescence images, and performs unmixing on the C fluorescence images by using the statistical values of the C fluorescence images, and generates K (K is an integer of 2 or more and C or less) dye images indicating a distribution for each K dyes.
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公开(公告)号：US12117480B2
公开(公告)日：2024-10-15
申请号：US17798980
申请日：2020-11-17
发明人： Masataka Ikesu , Shinsuke Suzuki
IPC分类号： G01R31/265 , G01R31/28 , G01R31/311 , H01L21/66
CPC分类号： G01R31/2656 , G01R31/2891 , G01R31/2894 , G01R31/311 , H01L22/00
摘要： A semiconductor failure analysis device includes an analysis part that analyzes a failure place in a semiconductor device; a marking part that irradiates the semiconductor device with laser light; a device arrangement part in which a wafer chuck, which holds the semiconductor device and on which an alignment target is provided, moves relative to the analysis part and the marking part; and a control part that outputs commands. The control part moves the wafer chuck to a position at which the analysis part is capable of taking an image of the alignment target, then outputs an alignment command that causes the marking part to be aligned with the analysis part with the alignment target as a reference, and irradiates the semiconductor device with laser light in a state in which a positional relationship between the marking part and the analysis part is maintained.
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公开(公告)号：US20240329391A1
公开(公告)日：2024-10-03
申请号：US18623385
申请日：2024-04-01
发明人： Tomoyuki IDE
CPC分类号： G02B26/101 , G02B26/0816
摘要： A mirror apparatus includes a base portion; a mirror unit; a frame member; and a window member. The frame member includes a first wall portion, a second wall portion, and a pair of standing wall portions. The window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion, and is inclined with respect to a mirror surface. A top surface of each of the pair of standing wall portions includes a flat portion. A width of the top surface and a width of a bottom surface of each of the pair of standing wall portions are wider than a width of the first wall portion and a width of the second wall portion. At least a part of the bottom surface of each of the pair of standing wall portions is in contact with the base portion.
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公开(公告)号：US20240321542A1
公开(公告)日：2024-09-26
申请号：US18572420
申请日：2022-02-15
发明人： Naonobu SUZUKI , Atsushi ISHII , Ryosuke YABUSHITA , Akimichi SHIMIZU , Naofumi KOSUGI , Ginji SUGIURA
CPC分类号： H01J35/30 , H01J35/112 , H01J35/153 , H01J35/18
摘要： An X-ray generation device includes: a housing; an electron gun including an electron-emitting unit that emits an electron inside the housing, and an extraction electrode for extracting the electron emitted from the electron-emitting unit; a target that generates an X-ray upon an incidence of the electron inside the housing; a window member that seals an opening of the housing and that transmits the X-ray; and a tube voltage application unit that applies a tube voltage between the electron-emitting unit and the target. A thickness of the target has a distribution, and the target is disposed to be inclined with respect to an imaginary plane orthogonal to an axis of the electron gun.
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公开(公告)号：US12098920B2
公开(公告)日：2024-09-24
申请号：US17798377
申请日：2021-01-21
IPC分类号： G01B9/02091 , G01N21/17 , H04N25/10 , H04N25/70 , G01N21/47
CPC分类号： G01B9/02091 , G01N21/17 , H04N25/10 , H04N25/70 , G01N2021/4761
摘要： An optical coherence tomography device includes a light source, a mirror device including a movable mirror configured to perform a reciprocating operation, a support part configured to support an object, a beam splitter configured to generate interfering light, an optical sensor configured to detect the interfering light, and a control unit. Each of the plurality of pixels included in the optical sensor includes a light receiving part, a plurality of transfer gates, and a discharge gate. The control unit applies an electric signal to the optical sensor so that the plurality of transfer gates are sequentially brought into a charge transfer state in at least three time ranges separated from each other and the discharge gate is brought into a charge discharge state in a time range other than the at least three time ranges for each period of an interferogram signal of the interfering light.
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公开(公告)号：US12094138B2
公开(公告)日：2024-09-17
申请号：US17608833
申请日：2020-04-16
IPC分类号： G06T7/30 , G06T11/00 , G06F30/392
CPC分类号： G06T7/30 , G06T11/00 , G06F30/392 , G06T2207/20081 , G06T2207/30148 , G06T2210/32
摘要： An observation system includes a detector that detects light from a semiconductor device and outputs a detection signal, a 2D camera, an optical device that guides light to the detector and the 2D camera, an image processing unit that generates a first optical image of the semiconductor device based on the detection signal and receives an input of a first CAD image, an image analysis unit that learns a conversion process of the first CAD image by machine learning using the first optical image as training data, and converts the first CAD image into a second CAD image resembling the first optical image by the conversion process based on a result of the learning, and an alignment unit that performs alignment based on a second optical image and the second CAD image.
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