Reduction of cracking in low-k spin-on dielectric films
    3.
    发明授权
    Reduction of cracking in low-k spin-on dielectric films 有权
    降低低k自旋电介质薄膜的开裂

    公开(公告)号:US07670961B2

    公开(公告)日:2010-03-02

    申请号:US11629058

    申请日:2005-06-08

    IPC分类号: H01L21/31 H01L21/469

    摘要: The present invention relates to a process that minimizes the cracking of low-k dielectric polymers. In an example embodiment, on a semiconductor substrate (200), there is a method of forming a composite dielectric disposed on a metal layer passivated with plasma deposited silicon oxide SiOx. The method comprises depositing a first layer of a first predetermined thickness of a spin-on dielectric on the metal layer protected with a plasma deposited silicon oxide SiOx. Next a thin stress relief layer of a second predetermined thickness is disposed on the first layer of spin-on-dielectric. Upon the thin stress-relief layer, a second layer of a third predetermined thickness of spin-on dielectric is deposited. Low-k spin-on dielectrics may include hydrogen silsequioxane (HSQ) and methyl silsequioxane (MSQ).

    摘要翻译: 本发明涉及使低k电介质聚合物的开裂最小化的方法。 在一个示例性实施例中,在半导体衬底(200)上,存在一种形成复合电介质的方法,该复合电介质设置在用等离子体沉积氧化硅SiO x钝化的金属层上。 该方法包括在用等离子体沉积氧化硅SiO x保护的金属层上沉积第一预定厚度的旋涂电介质的第一层。 接下来,将第二预定厚度的薄的应力消除层设置在第一层旋涂电介质上。 在薄的应力消除层上沉积第二预定厚度的旋涂电介质层。 低k自旋电介质可以包括氢三硅氧烷(HSQ)和甲基硅二恶烷(MSQ)。