公开(公告)号：US20110098926A1

公开(公告)日：2011-04-28

申请号：US12604722

申请日：2009-10-23

Applicant: Ing-Shouh Hwang ,  En-Te Hwu ,  Hans Ulrich Danzebrink ,  Hartmut Illers

Inventor： Ing-Shouh Hwang ,  En-Te Hwu ,  Hans Ulrich Danzebrink ,  Hartmut Illers

IPC: G06G7/78

CPC classification number: G01Q10/065 ,  G01Q70/04

Abstract: A system includes a displacement sensor, an actuator connected to the displacement sensor, and a feedback unit. The displacement sensor is configured to measure at least one of a relative position and a relative orientation between the displacement sensor and the target object. The feedback unit receives a signal from the displacement sensor related to the measured relative position or relative orientation and controls the actuator to move the displacement sensor on the basis of variations in the received signal arising due to a change in environmental conditions.

Abstract translation: 系统包括位移传感器，连接到位移传感器的致动器和反馈单元。 位移传感器构造成测量位移传感器和目标物体之间的相对位置和相对取向中的至少一个。 反馈单元从位移传感器接收与所测量的相对位置或相对取向相关的信号，并且基于由于环境条件的变化而产生的接收信号的变化来控制致动器来移动位移传感器。

公开(公告)号：US20110004326A1

公开(公告)日：2011-01-06

申请号：US12588204

申请日：2009-10-07

Applicant: Hans-Ulrich Danzebrink ,  Kazuhiko Hidaka ,  Hartmut Illers ,  Akinori Saito

Inventor： Hans-Ulrich Danzebrink ,  Kazuhiko Hidaka ,  Hartmut Illers ,  Akinori Saito

IPC: G05B11/01

CPC classification number: G01Q10/06 ,  G01D3/0365

Abstract: A method of actuating a system comprising a movable component and an actuator configured to move the movable component comprises providing a control signal representative of a desired motion of the movable component. The control signal is supplied to one or more resonators. Each of the one or more resonators has a mode of oscillation representative of at least one elastic mode of oscillation of the system. The control signal is modified by subtracting from the control signal a signal representative of a response of the one or more resonators to the control signal. The actuator is operated in accordance with the modified control signal. Thus, undesirable elastic oscillations of the system which might occur if the system were operated with the original control system can be reduced.

Abstract translation: 一种致动包括可移动部件和构造成移动可移动部件的致动器的系统的方法包括提供表示可移动部件的期望运动的控制信号。 控制信号被提供给一个或多个谐振器。 一个或多个谐振器中的每一个具有代表系统的至少一个弹性振荡模式的振荡模式。 通过从控制信号中减去表示一个或多个谐振器对控制信号的响应的信号来修改控制信号。 执行器根据修改的控制信号进行操作。 因此，如果系统使用原始控制系统操作，则可能发生系统的不期望的弹性振荡。

公开(公告)号：US08606376B2

公开(公告)日：2013-12-10

申请号：US12588204

申请日：2009-10-07

Applicant: Hartmut Illers ,  Kazuhiko Hidaka ,  Akinori Saito ,  Hans-Ulrich Danzebrink

Inventor： Hartmut Illers ,  Kazuhiko Hidaka ,  Akinori Saito ,  Hans-Ulrich Danzebrink

IPC: G05B11/01

CPC classification number: G01Q10/06 ,  G01D3/0365

Abstract: A method of actuating a system comprising a movable component and an actuator configured to move the movable component comprises providing a control signal representative of a desired motion of the movable component. The control signal is supplied to one or more resonators. Each of the one or more resonators has a mode of oscillation representative of at least one elastic mode of oscillation of the system. The control signal is modified by subtracting from the control signal a signal representative of a response of the one or more resonators to the control signal. The actuator is operated in accordance with the modified control signal. Thus, undesirable elastic oscillations of the system which might occur if the system were operated with the original control system can be reduced.

Abstract translation: 一种致动包括可移动部件和构造成移动可移动部件的致动器的系统的方法包括提供表示可移动部件的期望运动的控制信号。 控制信号被提供给一个或多个谐振器。 一个或多个谐振器中的每一个具有代表系统的至少一个弹性振荡模式的振荡模式。 通过从控制信号中减去表示一个或多个谐振器对控制信号的响应的信号来修改控制信号。 执行器根据修改的控制信号进行操作。 因此，如果系统使用原始控制系统操作，则可能发生系统的不期望的弹性振荡。

公开(公告)号：US08345260B2

公开(公告)日：2013-01-01

申请号：US12461810

申请日：2009-08-25

Applicant: Hartmut Illers ,  Kazuhiko Hidaka ,  Akinori Saito ,  Hans Ullrich Danzebrink

Inventor： Hartmut Illers ,  Kazuhiko Hidaka ,  Akinori Saito ,  Hans Ullrich Danzebrink

IPC: G01B11/02

CPC classification number: G01Q20/02 ,  G01B9/02031 ,  G01B2290/70

Abstract: A method of detecting a movement of a measuring probe provided between an objective lens adapted to image an object plane on a predetermined image plane and the object plane is disclosed. Additionally, a measuring instrument comprising an objective lens and a measuring probe is disclosed. An input beam of light is split into a measurement beam and a reference beam. The measurement beam is focused on a reverse focal plane of the objective lens such that the measurement beam is collimated by the objective lens. The collimated measurement beam is reflected at the measuring probe. The reflected measurement beam is directed towards the objective lens such that the objective lens focuses the reflected measurement beam on the reverse focal plane. The reflected measurement beam is collimated. The collimated reference beam and the reference beam are superimposed to form a superimposed beam and an interference between the reflected measurement beam and the reference beam is detected.

Abstract translation: 公开了一种检测设置在适于在预定图像平面上成像物体平面的物镜与物平面之间的测量探针的移动的方法。 另外，公开了一种包括物镜和测量探针的测量仪器。 输入光束被分成测量光束和参考光束。 测量光束聚焦在物镜的反向焦平面上，使得测量光束被物镜准直。 准直测量光束在测量探头处反射。 反射的测量光束被引向物镜，使得物镜将反射的测量光束聚焦在反向焦平面上。 反射的测量光束被准直。 校准参考光束和参考光束被叠加以形成叠加的光束，并且检测反射的测量光束和参考光束之间的干涉。

公开(公告)号：US08606426B2

公开(公告)日：2013-12-10

申请号：US12604722

申请日：2009-10-23

Applicant: Ing-Shouh Hwang ,  En-Te Hwu ,  Hans Ulrich Danzebrink ,  Hartmut Illers

Inventor： Ing-Shouh Hwang ,  En-Te Hwu ,  Hans Ulrich Danzebrink ,  Hartmut Illers

IPC: G05D23/00

CPC classification number: G01Q10/065 ,  G01Q70/04

Abstract: A system includes a displacement sensor, an actuator connected to the displacement sensor, and a feedback unit. The displacement sensor is configured to measure at least one of a relative position and a relative orientation between the displacement sensor and the target object. The feedback unit receives a signal from the displacement sensor related to the measured relative position or relative orientation and controls the actuator to move the displacement sensor on the basis of variations in the received signal arising due to a change in environmental conditions.

Abstract translation: 系统包括位移传感器，连接到位移传感器的致动器和反馈单元。 位移传感器构造成测量位移传感器和目标物体之间的相对位置和相对取向中的至少一个。 反馈单元从位移传感器接收与所测量的相对位置或相对取向相关的信号，并且基于由于环境条件的变化而产生的接收信号的变化来控制致动器来移动位移传感器。

公开(公告)号：US20100067021A1

公开(公告)日：2010-03-18

申请号：US12461810

申请日：2009-08-25

Applicant: Hans-Ullrich Danzebrink ,  Kazuhiko Hidaka ,  Hartmut Illers ,  Akinori Saito

Inventor： Hans-Ullrich Danzebrink ,  Kazuhiko Hidaka ,  Hartmut Illers ,  Akinori Saito

IPC: G01B9/02 ,  G01B11/02 ,  G02B27/10

CPC classification number: G01Q20/02 ,  G01B9/02031 ,  G01B2290/70

Abstract: A method of detecting a movement of a measuring probe provided between an objective lens adapted to image an object plane on a predetermined image plane and the object plane is disclosed. Additionally, a measuring instrument comprising an objective lens and a measuring probe is disclosed. An input beam of light is split into a measurement beam and a reference beam. The measurement beam is focused on a reverse focal plane of the objective lens such that the measurement beam is collimated by the objective lens. The collimated measurement beam is reflected at the measuring probe. The reflected measurement beam is directed towards the objective lens such that the objective lens focuses the reflected measurement beam on the reverse focal plane. The reflected measurement beam is collimated. The collimated reference beam and the reference beam are superimposed to form a superimposed beam and an interference between the reflected measurement beam and the reference beam is detected.

Abstract translation: 公开了一种检测设置在适于在预定图像平面上成像物体平面的物镜与物平面之间的测量探针的移动的方法。 另外，公开了一种包括物镜和测量探针的测量仪器。 输入光束被分成测量光束和参考光束。 测量光束聚焦在物镜的反向焦平面上，使得测量光束被物镜准直。 准直测量光束在测量探头处反射。 反射的测量光束被引向物镜，使得物镜将反射的测量光束聚焦在反向焦平面上。 反射的测量光束被准直。 校准参考光束和参考光束被叠加以形成叠加的光束，并且检测反射的测量光束和参考光束之间的干涉。