利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

18 条记录 (耗时 0.012 秒)

    Temperature controlled showerhead
    1.
    发明申请
    Temperature controlled showerhead 有权
    温控花洒

    公开(公告)号：US20090095219A1

    公开(公告)日：2009-04-16

    申请号：US11974966

    申请日：2007-10-16

    申请人： Henner Meinhold ,  Dan M. Doble ,  Stephen Lau ,  Vince Wilson ,  Easwar Srinivasan

    发明人： Henner Meinhold ,  Dan M. Doble ,  Stephen Lau ,  Vince Wilson ,  Easwar Srinivasan

    IPC分类号： C23C16/00

    CPC分类号： C23C16/45565 ,  C23C16/4557 ,  C23C16/45572

    摘要： A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.

    摘要翻译： 用于化学气相沉积（CVD）室的温度控制喷头增强了散热，从而能够使用电加热器进行精确的温度控制。 散热通过喷头杆和流体通道的传导以及来自背板的辐射而消散。 温度控制系统包括在CVD室中的一个或多个温度控制的喷头，其中流体通道串联连接到热交换器。

    Method for measuring the oxygen concentration in gas mixtures
    2.
    发明授权
    Method for measuring the oxygen concentration in gas mixtures 失效
    测量气体混合物中氧气浓度的方法

    公开(公告)号：US4472247A

    公开(公告)日：1984-09-18

    申请号：US562863

    申请日：1983-12-19

    申请人： Franz-Josef Rohr ,  Henner Meinhold

    发明人： Franz-Josef Rohr ,  Henner Meinhold

    IPC分类号： G01N27/41 ,  G01N27/406 ,  G01N27/58

    CPC分类号： G01N27/4065

    摘要： Method for measuring the free oxygen concentration in gas mixtures, especially combustion gases, with an electrochemical measuring device which comprises an oxygen ion-conducting solid electrolyte and two electrodes to which the supply voltage U.sub.s is fed. The supply voltage U.sub.s is formed from the sum of at least two voltage components U.sub.a and U.sub.v. The first voltage component U.sub.a is kept at a constant predeterminable value which is required for ionizing the free oxygen. The second voltage component U.sub.v is kept variable and its respective value is determined as a function of the magnitude of the probe current I.sub.s flowing between the electrodes.

    摘要翻译： 使用包含氧离子传导固体电解质的电化学测量装置和供给电压Us的两个电极测量气体混合物，特别是燃烧气体中的游离氧浓度的方法。 电源电压Us由至少两个电压分量Ua和Uv的总和形成。 第一电压分量Ua保持在电离游离氧所需的恒定可预定值。 第二电压分量Uv保持可变，并且其相应值被确定为在电极之间流动的探针电流Is的大小的函数。

    Electrochemical storage cell
    3.
    发明授权
    Electrochemical storage cell 失效
    电化学储存池

    公开(公告)号：US4207386A

    公开(公告)日：1980-06-10

    申请号：US35269

    申请日：1979-05-01

    申请人： Henner Meinhold ,  Wilhelm Haar ,  Wilfried Fischer

    发明人： Henner Meinhold ,  Wilhelm Haar ,  Wilfried Fischer

    IPC分类号： H01H37/76 ,  H01M2/34 ,  H01M10/39 ,  H01M2/00

    CPC分类号： H01M2/348 ,  H01M10/3909 ,  H01M2/34 ,  H01H37/761

    摘要： Electrochemical storage cell of the alkali metal and chalcogen type with an anode and a cathode chamber separated by a solid electrolyte wall and confined by a metal wall. A first current collector has an outer sub-part which extends outside the reactant chamber enclosed by the solid electrolyte, and an inner sub-part which extends into the interior of this reactant chamber. The outer sub-part and the inner sub-part are connected to an electrically conducting contact element which melts at a predetermined temperature exceeding the operating temperature of the cell. A second current collector is formed by part of the metal wall which confines the other reactant chamber.

    摘要翻译： 碱金属和硫族元素类型的电化学存储电池，阳极和阴极室由固体电解质壁隔开并被金属壁限制。 第一集电器具有外部子部分，其延伸到由固体电解质包围的反应物室的外部，以及延伸到该反应物室的内部的内部子部件。 外部子部分和内部子部分连接到导电接触元件，其在超过电池的工作温度的预定温度下熔化。 第二集电器由限定另一反应物室的金属壁的一部分形成。

    System and method for coating substrates using ink jet technology
    5.
    发明授权
    System and method for coating substrates using ink jet technology 有权
    使用喷墨技术涂覆基材的系统和方法

    公开(公告)号：US06436843B1

    公开(公告)日：2002-08-20

    申请号：US09823721

    申请日：2001-03-30

    申请人： Henner Meinhold ,  Fred J. Chetcuti ,  Judy Huang

    发明人： Henner Meinhold ,  Fred J. Chetcuti ,  Judy Huang

    IPC分类号： H01L2131

    CPC分类号： H01L21/6715 ,  B05C5/0212 ,  B05C5/0291 ,  H01L51/0005

    摘要： In a method for applying a coating material on a substrate, a print head is disposed over a substrate. Drops of a coating material are controllably dispensed from the print head to form a wide area film on the substrate. A system for coating a wafer includes a housing, and a chuck for supporting the wafer and a print head are disposed in the housing. A source of a coating material is coupled to the print head. A digital signal processor provides control signals for controlling process parameters for dispensing drops of the coating material and for controlling the relative position of the print head and the chuck. The relative position of the print head and the chuck (and hence the wafer supported thereon) may be controlled by moving the print head by itself, by moving the chuck by itself, or by moving both the print head and the chuck.

    摘要翻译： 在将涂料施加在基材上的方法中，将印刷头设置在基材上。 从打印头可控地分配涂料的液滴，以在基材上形成广泛的膜。 用于涂覆晶片的系统包括壳体和用于支撑晶片的卡盘，并且打印头设置在壳体中。 涂料的源连接到打印头。 数字信号处理器提供用于控制处理参数的控制信号，用于分配涂料的液滴并用于控制打印头和卡盘的相对位置。 可以通过使打印头本身移动，通过自身移动卡盘或通过移动打印头和卡盘来控制打印头和卡盘（以及因此支撑在其上的晶片）的相对位置（并且因此支撑在其上的晶片）。

    High-temperature battery
    6.
    发明授权
    High-temperature battery 失效
    高温电池

    公开(公告)号：US4443524A

    公开(公告)日：1984-04-17

    申请号：US375967

    申请日：1982-05-07

    申请人： Henner Meinhold ,  Dieter Hasenauer

    发明人： Henner Meinhold ,  Dieter Hasenauer

    IPC分类号： H01M10/39 ,  H01M2/10 ,  H01M10/613 ,  H01M10/6566 ,  H01M10/658

    CPC分类号： H01M2/1088 ,  H01M10/613 ,  H01M10/6566 ,  H01M10/658 ,  H01M10/615

    摘要： High-temperature battery with at least one electrochemical storage cell which is surrounded by thermal insulation as well as by feed and discharge lines for the cooling air. At least one module which can be inserted into the high-temperature battery, contains the storage cells. The module has a feedline for cooling air and a discharge for the cooling air which are arranged so that the cooling air can be introduced into the module against the force of gravity and discharged from the module with the force of gravity.

    摘要翻译： 具有至少一个电化学蓄电池的高温电池，其被绝热以及用于冷却空气的进料和排出管线包围。 可插入高温电池的至少一个模块包含存储单元。 模块具有用于冷却空气的馈送线和用于冷却空气的排出口，其布置成使得冷却空气能够克服重力而被引入模块中并且随着重力从模块中排出。

    Circuit for protecting storage cells
    7.
    发明授权
    Circuit for protecting storage cells 失效
    保护存储单元的电路

    公开(公告)号：US4349773A

    公开(公告)日：1982-09-14

    申请号：US212460

    申请日：1980-12-03

    申请人： Bernd Hartmann ,  Henner Meinhold

    发明人： Bernd Hartmann ,  Henner Meinhold

    IPC分类号： H01M10/44 ,  H01M6/50 ,  H01M10/42 ,  H02H7/18 ,  H02J7/00

    CPC分类号： H02J7/0031 ,  H01M10/42 ,  H01M2200/10

    摘要： Circuit for the uniform charging and discharging of electrochemical storage cells of the alkali metal and chalcogen type having a protective element in the circuit. The protective element is a container filled with a chemical compound which easily dissociates and easily recombines. The outer surface of the container forms an anode. An electrically conducting rod which forms a cathode extends into and also out of the container, and is electrically insulated in its mounting.

    摘要翻译： 电路中具有保护元件的碱金属和硫族元素类型的电化学蓄电池的均匀充放电电路。 保护元件是容易分解并容易复合的化学化合物的容器。 容器的外表面形成阳极。 形成阴极的导电杆延伸到容器中并且也从容器中排出，并且在其安装中电绝缘。

    Conductive contacts and methods for fabricating conductive contacts for elctrochemical planarization of a work piece
    9.
    发明授权
    Conductive contacts and methods for fabricating conductive contacts for elctrochemical planarization of a work piece 有权
    用于制造用于工件的化学平整化的导电触点的导电触点和方法

    公开(公告)号：US07391086B1

    公开(公告)日：2008-06-24

    申请号：US11478150

    申请日：2006-06-28

    申请人： John Drewery ,  Francisco Juarez ,  Henner Meinhold

    发明人： John Drewery ,  Francisco Juarez ,  Henner Meinhold

    IPC分类号： H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119

    CPC分类号： B24B37/24 ,  B23H5/08 ,  B24B37/046

    摘要： Conductive contacts and methods for fabricating conductive contacts for electrochemical mechanical planarization are provided. A conductive contact in accordance with an exemplary embodiment of the invention includes, but is not limited to, a first conductive surface formed of a flexible material, a conductive element that is disposed remote from the first conductive surface and that is configured for electrical coupling to an external circuit, and an intermediate portion that electrically couples the first conductive surface and the conductive element.

    摘要翻译： 提供用于制造用于电化学机械平面化的导电触头的导电触头和方法。 根据本发明的示例性实施例的导电接触包括但不限于由柔性材料形成的第一导电表面，远离第一导电表面设置的导电元件，其被配置用于电耦合到 外部电路和电耦合第一导电表面和导电元件的中间部分。

    Spin bowl having fluid seal for preventing air from flowing into the bowl during spinning
    10.
    发明授权
    Spin bowl having fluid seal for preventing air from flowing into the bowl during spinning 有权
    具有流体密封的旋转碗，用于在旋转期间防止空气流入碗中

    公开(公告)号：US06767403B1

    公开(公告)日：2004-07-27

    申请号：US09713846

    申请日：2000-11-15

    申请人： Fred J. Chetcuti ,  Henner Meinhold

    发明人： Fred J. Chetcuti ,  Henner Meinhold

    IPC分类号： B05C1102

    CPC分类号： H01L21/6715

    摘要： A spin bowl includes a base and a sidewall that extends from the base. The base has an upper portion for supporting a substrate in a horizontal plane and a lower portion that intersects with the sidewall. The lower portion of the base has a plurality of drain holes formed therein proximate to the sidewall. Each of the plurality of drain holes is configured to trap fluid therein during spinning of the spin bowl to thereby form a fluid seal that prevents air from flowing therethrough. In one embodiment, each of the drain holes is V-shaped. In another embodiment, the fluid seal is formed by the intersection of a straight drain hole with an external fluid catch area. An apparatus and method for spin coating a film over a substrate also are described.

    摘要翻译： 旋转碗包括从基部延伸的基部和侧壁。 基部具有用于在水平面中支撑基板的上部和与侧壁相交的下部。 基部的下部具有形成在其中的靠近侧壁的多个排出孔。 多个排水孔中的每一个构造成在旋转筒中旋转期间捕获流体，从而形成防止空气流过其中的流体密封。 在一个实施例中，每个排水孔是V形的。 在另一个实施例中，流体密封件由直排放孔与外部流体捕获区域的相交形成。 还描述了一种用于在衬底上旋涂膜的设备和方法。