ENHANCING PLASMA SURFACE MODIFICATION USING HIGH INTENSITY AND HIGH POWER ULTRASONIC ACOUSTIC WAVES
    2.
    发明申请
    ENHANCING PLASMA SURFACE MODIFICATION USING HIGH INTENSITY AND HIGH POWER ULTRASONIC ACOUSTIC WAVES 有权
    使用高强度和高功率超声波提高等离子体表面改性

    公开(公告)号:US20100304146A1

    公开(公告)日:2010-12-02

    申请号:US12599775

    申请日:2008-05-09

    摘要: This invention relates to a plasma surface modification process (and a corresponding a system) of a solid object (100) comprising creating plasma (104) by a plasma source (106), application of the plasma (104) to at least a part of a surface (314) of the solid object (100), generating ultrasonic high intensity and high power acoustic waves (102) by at least one ultrasonic high intensity and high power acoustic wave generator (101), wherein the ultrasonic acoustic waves are directed to propagate towards said surface (314) of the object (100) so that a laminar boundary layer (313) of a gas or a mixture of gases (500) flow in contact with said solid object (100) is thinned or destructed for at least a part of said surface (314). In this way, the plasma can more efficiently access and influence the surface of the solid object to be treated by the plasma, which speeds the process time up significantly.

    摘要翻译: 本发明涉及固体物体(100)的等离子体表面改性方法(和相应的系统),包括通过等离子体源(106)产生等离子体(104),将等离子体(104)施加至至少一部分 固体物体(100)的表面(314),通过至少一个超声波高强度和高功率声波发生器(101)产生超声波高强度和高功率声波(102),其中超声波被引导到 朝向物体(100)的所述表面(314)传播,使得与所述固体物体(100)流动的气体或气体混合物(500)的层流边界层(313)被稀释或破坏至少 所述表面(314)的一部分。 以这种方式,等离子体可以更有效地访问和影响待等待处理的固体物体的表面,这显着地加快了处理时间。

    Enhancing plasma surface modification using high intensity and high power ultrasonic acoustic waves
    3.
    发明授权
    Enhancing plasma surface modification using high intensity and high power ultrasonic acoustic waves 有权
    使用高强度和高功率超声波增强等离子体表面改性

    公开(公告)号:US08399795B2

    公开(公告)日:2013-03-19

    申请号:US12599775

    申请日:2008-05-09

    摘要: This invention relates to a plasma surface modification process (and a corresponding a system) of a solid object (100) comprising creating plasma (104) by a plasma source (106), application of the plasma (104) to at least a part of a surface (314) of the solid object (100), generating ultrasonic high intensity and high power acoustic waves (102) by at least one ultrasonic high intensity and high power acoustic wave generator (101), wherein the ultrasonic acoustic waves are directed to propagate towards said surface (314) of the object (100) so that a laminar boundary layer (313) of a gas or a mixture of gases (500) flow in contact with said solid object (100) is thinned or destructed for at least a part of said surface (314). In this way, the plasma can more efficiently access and influence the surface of the solid object to be treated by the plasma, which speeds the process time up significantly.

    摘要翻译: 本发明涉及固体物体(100)的等离子体表面改性方法(和相应的系统),包括通过等离子体源(106)产生等离子体(104),将等离子体(104)施加至至少一部分 固体物体(100)的表面(314),通过至少一个超声波高强度和高功率声波发生器(101)产生超声波高强度和高功率声波(102),其中超声波被引导到 朝向物体(100)的所述表面(314)传播,使得与所述固体物体(100)流动的气体或气体混合物(500)的层流边界层(313)被稀释或破坏至少 所述表面(314)的一部分。 以这种方式,等离子体可以更有效地访问并影响待等待处理的固体物体的表面,这显着地加快了处理时间。